DE60001479D1 - Mikroelektromechanische optische Vorrichtung - Google Patents
Mikroelektromechanische optische VorrichtungInfo
- Publication number
- DE60001479D1 DE60001479D1 DE60001479T DE60001479T DE60001479D1 DE 60001479 D1 DE60001479 D1 DE 60001479D1 DE 60001479 T DE60001479 T DE 60001479T DE 60001479 T DE60001479 T DE 60001479T DE 60001479 D1 DE60001479 D1 DE 60001479D1
- Authority
- DE
- Germany
- Prior art keywords
- optical device
- microelectromechanical optical
- microelectromechanical
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0003—MEMS mechanisms for assembling automatically hinged components, self-assembly devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/390,158 US6392221B1 (en) | 1997-12-22 | 1999-09-03 | Micro-electro-mechanical optical device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60001479D1 true DE60001479D1 (de) | 2003-04-03 |
DE60001479T2 DE60001479T2 (de) | 2003-12-18 |
Family
ID=23541325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60001479T Expired - Lifetime DE60001479T2 (de) | 1999-09-03 | 2000-08-21 | Mikroelektromechanische optische Vorrichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6392221B1 (de) |
EP (1) | EP1104746B1 (de) |
JP (1) | JP3723431B2 (de) |
DE (1) | DE60001479T2 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6300619B1 (en) * | 1997-12-22 | 2001-10-09 | Lucent Technologies Inc. | Micro-electro-mechanical optical device |
US6449406B1 (en) | 1999-05-28 | 2002-09-10 | Omm, Inc. | Micromachined optomechanical switching devices |
US6453083B1 (en) | 1999-05-28 | 2002-09-17 | Anis Husain | Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring |
US6445841B1 (en) | 1999-05-28 | 2002-09-03 | Omm, Inc. | Optomechanical matrix switches including collimator arrays |
US6445840B1 (en) | 1999-05-28 | 2002-09-03 | Omm, Inc. | Micromachined optical switching devices |
US6504643B1 (en) * | 2000-09-28 | 2003-01-07 | Xerox Corporation | Structure for an optical switch on a substrate |
US6632373B1 (en) * | 2000-09-28 | 2003-10-14 | Xerox Corporation | Method for an optical switch on a substrate |
US6632374B1 (en) * | 2000-09-28 | 2003-10-14 | Xerox Corporation | Method for an optical switch on a silicon on insulator substrate |
EP1193530B1 (de) * | 2000-09-28 | 2006-02-01 | Xerox Corporation | Verfahren zur Herstellung einer Spiegelstruktur |
US6522801B1 (en) * | 2000-10-10 | 2003-02-18 | Agere Systems Inc. | Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor |
US6798560B2 (en) * | 2002-10-11 | 2004-09-28 | Exajoula, Llc | Micromirror systems with open support structures |
US6825968B2 (en) * | 2002-10-11 | 2004-11-30 | Exajoule, Llc | Micromirror systems with electrodes configured for sequential mirror attraction |
US6870659B2 (en) * | 2002-10-11 | 2005-03-22 | Exajoule, Llc | Micromirror systems with side-supported mirrors and concealed flexure members |
US6975788B2 (en) * | 2002-12-09 | 2005-12-13 | Lucent Technologies, Inc. | Optical switch having combined input/output fiber array |
US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
US6900922B2 (en) * | 2003-02-24 | 2005-05-31 | Exajoule, Llc | Multi-tilt micromirror systems with concealed hinge structures |
US7038824B2 (en) * | 2003-11-18 | 2006-05-02 | Honeywell International Inc. | Dynamic reflector array and method of making the same |
TWI239414B (en) * | 2004-06-25 | 2005-09-11 | Ind Tech Res Inst | MEMS optical switch with self-assembly structure |
US7324323B2 (en) * | 2005-01-13 | 2008-01-29 | Lucent Technologies Inc. | Photo-sensitive MEMS structure |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5658636A (en) * | 1995-01-27 | 1997-08-19 | Carnegie Mellon University | Method to prevent adhesion of micromechanical structures |
US5903380A (en) | 1997-05-01 | 1999-05-11 | Rockwell International Corp. | Micro-electromechanical (MEM) optical resonator and method |
US6116756A (en) * | 1997-12-12 | 2000-09-12 | Xerox Corporation | Monolithic scanning light emitting devices |
US5994159A (en) * | 1997-12-22 | 1999-11-30 | Lucent Technologies, Inc. | Self-assemblying micro-mechanical device |
US6137623A (en) * | 1998-03-17 | 2000-10-24 | Mcnc | Modulatable reflectors and methods for using same |
US6137941A (en) * | 1998-09-03 | 2000-10-24 | Lucent Technologies, Inc. | Variable optical attenuator |
-
1999
- 1999-09-03 US US09/390,158 patent/US6392221B1/en not_active Expired - Lifetime
-
2000
- 2000-08-21 DE DE60001479T patent/DE60001479T2/de not_active Expired - Lifetime
- 2000-08-21 EP EP00307167A patent/EP1104746B1/de not_active Expired - Lifetime
- 2000-09-01 JP JP2000265136A patent/JP3723431B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1104746A1 (de) | 2001-06-06 |
DE60001479T2 (de) | 2003-12-18 |
US6392221B1 (en) | 2002-05-21 |
JP2001117028A (ja) | 2001-04-27 |
JP3723431B2 (ja) | 2005-12-07 |
EP1104746B1 (de) | 2003-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |