DE60005849T2 - Verfahren und vorrichtung zum bertreiben eines digitalen massendurchflussreglers - Google Patents
Verfahren und vorrichtung zum bertreiben eines digitalen massendurchflussreglers Download PDFInfo
- Publication number
- DE60005849T2 DE60005849T2 DE60005849T DE60005849T DE60005849T2 DE 60005849 T2 DE60005849 T2 DE 60005849T2 DE 60005849 T DE60005849 T DE 60005849T DE 60005849 T DE60005849 T DE 60005849T DE 60005849 T2 DE60005849 T2 DE 60005849T2
- Authority
- DE
- Germany
- Prior art keywords
- flow
- mass flow
- control device
- flow control
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 239000012530 fluid Substances 0.000 description 2
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Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
- Y10T137/0368—By speed of fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Testing And Monitoring For Control Systems (AREA)
- Measuring Volume Flow (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US350744 | 1999-07-09 | ||
| US09/350,744 US6343617B1 (en) | 1999-07-09 | 1999-07-09 | System and method of operation of a digital mass flow controller |
| PCT/US2000/017062 WO2001004715A1 (en) | 1999-07-09 | 2000-06-21 | System and method of operation of a digital mass flow controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60005849D1 DE60005849D1 (de) | 2003-11-13 |
| DE60005849T2 true DE60005849T2 (de) | 2004-09-09 |
Family
ID=23377995
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60036649T Expired - Fee Related DE60036649T2 (de) | 1999-07-09 | 2000-06-21 | Verfahren und Vorrichtung zum Betreiben eines digitalen Massendurchflussreglers |
| DE60005849T Expired - Fee Related DE60005849T2 (de) | 1999-07-09 | 2000-06-21 | Verfahren und vorrichtung zum bertreiben eines digitalen massendurchflussreglers |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60036649T Expired - Fee Related DE60036649T2 (de) | 1999-07-09 | 2000-06-21 | Verfahren und Vorrichtung zum Betreiben eines digitalen Massendurchflussreglers |
Country Status (9)
| Country | Link |
|---|---|
| US (3) | US6343617B1 (enExample) |
| EP (2) | EP1212665B1 (enExample) |
| JP (1) | JP2003504748A (enExample) |
| KR (1) | KR100718209B1 (enExample) |
| CN (1) | CN1249545C (enExample) |
| AT (2) | ATE251773T1 (enExample) |
| AU (1) | AU5498700A (enExample) |
| DE (2) | DE60036649T2 (enExample) |
| WO (1) | WO2001004715A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007035977A1 (de) * | 2007-08-01 | 2009-02-19 | Toptron Gmbh | Elektronischer Durchflusssensor |
| DE102007039262A1 (de) * | 2007-08-20 | 2009-02-26 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Verfahren zum Betreiben eines Messgerätes |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5998217A (ja) | 1982-11-26 | 1984-06-06 | Fujikin:Kk | 流量制御装置 |
| US5062446A (en) * | 1991-01-07 | 1991-11-05 | Sematech, Inc. | Intelligent mass flow controller |
| US5660207A (en) | 1994-12-29 | 1997-08-26 | Tylan General, Inc. | Flow controller, parts of flow controller, and related method |
| US5911238A (en) * | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
| US5944048A (en) * | 1996-10-04 | 1999-08-31 | Emerson Electric Co. | Method and apparatus for detecting and controlling mass flow |
-
1999
- 1999-07-09 US US09/350,744 patent/US6343617B1/en not_active Expired - Lifetime
-
2000
- 2000-06-21 CN CNB008113238A patent/CN1249545C/zh not_active Expired - Fee Related
- 2000-06-21 EP EP00939986A patent/EP1212665B1/en not_active Expired - Lifetime
- 2000-06-21 AT AT00939986T patent/ATE251773T1/de not_active IP Right Cessation
- 2000-06-21 AU AU54987/00A patent/AU5498700A/en not_active Abandoned
- 2000-06-21 DE DE60036649T patent/DE60036649T2/de not_active Expired - Fee Related
- 2000-06-21 WO PCT/US2000/017062 patent/WO2001004715A1/en not_active Ceased
- 2000-06-21 KR KR1020027000296A patent/KR100718209B1/ko not_active Expired - Fee Related
- 2000-06-21 JP JP2001510059A patent/JP2003504748A/ja not_active Withdrawn
- 2000-06-21 EP EP03016602A patent/EP1359487B1/en not_active Expired - Lifetime
- 2000-06-21 AT AT03016602T patent/ATE374964T1/de not_active IP Right Cessation
- 2000-06-21 DE DE60005849T patent/DE60005849T2/de not_active Expired - Fee Related
-
2001
- 2001-12-06 US US10/006,774 patent/US6681787B2/en not_active Expired - Lifetime
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2002
- 2002-02-05 US US10/068,052 patent/US6640822B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007035977A1 (de) * | 2007-08-01 | 2009-02-19 | Toptron Gmbh | Elektronischer Durchflusssensor |
| DE102007035977B4 (de) * | 2007-08-01 | 2009-07-16 | Toptron Gmbh | Elektronischer Durchflusssensor |
| US9587754B2 (en) | 2007-08-01 | 2017-03-07 | Toptron Gmbh | Electronic flow sensor |
| DE102007039262A1 (de) * | 2007-08-20 | 2009-02-26 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Verfahren zum Betreiben eines Messgerätes |
| DE102007039262B4 (de) * | 2007-08-20 | 2021-01-28 | Endress+Hauser Conducta Gmbh+Co. Kg | Verfahren zum Betreiben eines Messgerätes |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE374964T1 (de) | 2007-10-15 |
| WO2001004715A1 (en) | 2001-01-18 |
| US6640822B2 (en) | 2003-11-04 |
| KR20020039317A (ko) | 2002-05-25 |
| EP1212665B1 (en) | 2003-10-08 |
| EP1359487A2 (en) | 2003-11-05 |
| US20020117202A1 (en) | 2002-08-29 |
| CN1249545C (zh) | 2006-04-05 |
| DE60036649T2 (de) | 2008-07-03 |
| US6343617B1 (en) | 2002-02-05 |
| ATE251773T1 (de) | 2003-10-15 |
| CN1371492A (zh) | 2002-09-25 |
| AU5498700A (en) | 2001-01-30 |
| EP1359487B1 (en) | 2007-10-03 |
| DE60005849D1 (de) | 2003-11-13 |
| US6681787B2 (en) | 2004-01-27 |
| EP1359487A3 (en) | 2004-02-04 |
| US20020139418A1 (en) | 2002-10-03 |
| KR100718209B1 (ko) | 2007-05-15 |
| EP1212665A1 (en) | 2002-06-12 |
| DE60036649D1 (de) | 2007-11-15 |
| JP2003504748A (ja) | 2003-02-04 |
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