DE60004855D1 - Verfahren und vorrichtung für einen proportional-integral-regler mit variabler verstärkung - Google Patents

Verfahren und vorrichtung für einen proportional-integral-regler mit variabler verstärkung

Info

Publication number
DE60004855D1
DE60004855D1 DE60004855T DE60004855T DE60004855D1 DE 60004855 D1 DE60004855 D1 DE 60004855D1 DE 60004855 T DE60004855 T DE 60004855T DE 60004855 T DE60004855 T DE 60004855T DE 60004855 D1 DE60004855 D1 DE 60004855D1
Authority
DE
Germany
Prior art keywords
signal
integral
gain
function
proportional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60004855T
Other languages
English (en)
Other versions
DE60004855T2 (de
Inventor
Emmanuel Vyers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Publication of DE60004855D1 publication Critical patent/DE60004855D1/de
Application granted granted Critical
Publication of DE60004855T2 publication Critical patent/DE60004855T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Artificial Intelligence (AREA)
  • Health & Medical Sciences (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
  • Flow Control (AREA)
  • Control Of Electric Motors In General (AREA)
DE60004855T 1999-07-10 2000-06-21 Verfahren und vorrichtung für einen proportional-integral-regler mit variabler verstärkung Expired - Fee Related DE60004855T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/351,098 US6445980B1 (en) 1999-07-10 1999-07-10 System and method for a variable gain proportional-integral (PI) controller
US351098 1999-07-10
PCT/US2000/040275 WO2001004717A1 (en) 1999-07-10 2000-06-21 System and method for a variable gain proportional-integral (pi) controller

Publications (2)

Publication Number Publication Date
DE60004855D1 true DE60004855D1 (de) 2003-10-02
DE60004855T2 DE60004855T2 (de) 2004-08-19

Family

ID=23379559

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60004855T Expired - Fee Related DE60004855T2 (de) 1999-07-10 2000-06-21 Verfahren und vorrichtung für einen proportional-integral-regler mit variabler verstärkung

Country Status (10)

Country Link
US (1) US6445980B1 (de)
EP (1) EP1196833B1 (de)
JP (1) JP2003504750A (de)
KR (1) KR100621830B1 (de)
CN (1) CN1235106C (de)
AT (1) ATE248392T1 (de)
AU (1) AU6802600A (de)
DE (1) DE60004855T2 (de)
TW (1) TW490605B (de)
WO (1) WO2001004717A1 (de)

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US7669777B2 (en) 2001-05-07 2010-03-02 Automated Logic Corporation Slope predictive control and digital PID control for a variable temperature control system
US6549837B2 (en) * 2001-05-09 2003-04-15 Caterpillar Inc Automatic tracking control for work machines
US6675073B2 (en) * 2001-11-20 2004-01-06 Steve Kieman System and method for tuning the weight control of a flow of material
US7711627B2 (en) * 2002-01-07 2010-05-04 Bgc Partners, Inc. Methods and systems for providing crossing markets
EP1523701A2 (de) * 2002-07-19 2005-04-20 Celerity Group, Inc. Verfahren und vorrichtungen zur druckkompensation in einer massenströmungssteuerung
US6845659B2 (en) 2002-07-19 2005-01-25 Celerity Group, Inc. Variable resistance sensor with common reference leg
US6843139B2 (en) * 2003-03-12 2005-01-18 Rosemount Inc. Flow instrument with multisensors
GB2412186B (en) * 2004-03-19 2008-06-04 Chemfeed Ltd Supply rate control method and apparatus
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7454254B2 (en) * 2005-08-30 2008-11-18 Honeywell International, Inc. Aircraft cabin pressure control system and method for reducing outflow valve actuator induced cabin pressure oscillations
US7414379B2 (en) * 2005-10-14 2008-08-19 Cambridge Technology, Inc. Servo control system
NO327866B1 (no) * 2006-03-09 2009-10-12 Abb Research Ltd En fremgangsmåte for styring og/eller overvåking
US7603186B2 (en) * 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
US7640078B2 (en) * 2006-07-05 2009-12-29 Advanced Energy Industries, Inc. Multi-mode control algorithm
CN100449432C (zh) * 2006-09-28 2009-01-07 上海交通大学 双输入双输出系统的解耦控制方法
CN100428090C (zh) * 2006-10-19 2008-10-22 上海交通大学 工业多输入输出过程的分布式pi和pid控制器定量整定方法
US8079383B2 (en) * 2006-12-07 2011-12-20 Mks Instruments, Inc. Controller gain scheduling for mass flow controllers
KR100836227B1 (ko) * 2007-03-08 2008-06-09 한국기계연구원 전공 레귤레이터의 압력제어를 위한 펄스 폭 변조방법
US7819183B2 (en) * 2008-06-16 2010-10-26 Halliburton Energy Services, Inc. Work string controller
US8746275B2 (en) * 2008-07-14 2014-06-10 Emerson Electric Co. Gas valve and method of control
US8381760B2 (en) 2008-07-14 2013-02-26 Emerson Electric Co. Stepper motor valve and method of control
US8015791B2 (en) 2008-11-18 2011-09-13 General Electric Company Fuel control system for gas turbine and feed forward control method
CN103216314B (zh) * 2008-12-26 2015-06-03 三菱重工业株式会社 利用船舶用废热回收系统的发电方法及其废热回收系统
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
CN102096420B (zh) * 2009-12-15 2015-01-14 株式会社堀场Stec 质量流量控制器
US8301275B2 (en) * 2010-06-04 2012-10-30 Sti Srl Modified proportional integral derivative controller
TWI452824B (zh) * 2010-08-10 2014-09-11 Richtek Technology Corp 動態增益控制器及其方法
US8624559B2 (en) * 2010-10-14 2014-01-07 GM Global Technology Operations LLC Excessive current detection controls method
KR101943684B1 (ko) 2012-02-03 2019-01-29 히타치 긴조쿠 가부시키가이샤 유량 제어 장치 및 기록 매체
JP5947113B2 (ja) * 2012-06-01 2016-07-06 Dmg森精機株式会社 工作機械を用いた被加工物の加工方法
CN103676644B (zh) * 2012-09-17 2016-06-22 中国石油化工股份有限公司 一种新的阀门摩擦补偿方法
WO2014158530A1 (en) * 2013-03-14 2014-10-02 Illinois Tool Works Inc. System and method to automatically self-adjust a valve pedestal of a mass flow controller
CN103294029A (zh) * 2013-05-15 2013-09-11 华南理工大学 一种针对工业过程的高效数据驱动内模多项式控制器
EP3109714B1 (de) * 2014-02-17 2022-03-23 Shimadzu Corporation Rückkopplungsregelungsvorrichtung
RU2573731C2 (ru) * 2014-05-23 2016-01-27 Сергей Иванович Малафеев Способ работы пропорционально-интегрального регулятора
US10637266B2 (en) 2015-06-01 2020-04-28 Intersil Americas LLC Regulator with high speed nonlinear compensation
CN108027621B (zh) * 2015-09-28 2021-12-31 皇家飞利浦有限公司 用于使用比例流量阀控制气体流的方法和系统
JP6426652B2 (ja) 2016-04-15 2018-11-21 ファナック株式会社 ディジタル制御電源装置および生産管理システム

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US4253153A (en) * 1979-06-28 1981-02-24 United Technologies Corporation Energy conservative control of terminal reheat heating, ventilating, and air conditioning (HVAC) systems
US4498809A (en) * 1983-06-20 1985-02-12 Farmer Edward J Flow compensated computing controller
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US5875109A (en) * 1995-05-24 1999-02-23 Johnson Service Company Adaptive flow controller for use with a flow control system
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Also Published As

Publication number Publication date
ATE248392T1 (de) 2003-09-15
TW490605B (en) 2002-06-11
CN1235106C (zh) 2006-01-04
EP1196833A1 (de) 2002-04-17
KR20020047089A (ko) 2002-06-21
DE60004855T2 (de) 2004-08-19
CN1371490A (zh) 2002-09-25
US6445980B1 (en) 2002-09-03
JP2003504750A (ja) 2003-02-04
KR100621830B1 (ko) 2006-09-13
AU6802600A (en) 2001-01-30
EP1196833B1 (de) 2003-08-27
WO2001004717A1 (en) 2001-01-18

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication related to discontinuation of the patent is to be deleted
8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS,INC. (N.D.GES.D.STAATES DELAWARE), BILLER

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee