DE60004855D1 - Verfahren und vorrichtung für einen proportional-integral-regler mit variabler verstärkung - Google Patents

Verfahren und vorrichtung für einen proportional-integral-regler mit variabler verstärkung

Info

Publication number
DE60004855D1
DE60004855D1 DE60004855T DE60004855T DE60004855D1 DE 60004855 D1 DE60004855 D1 DE 60004855D1 DE 60004855 T DE60004855 T DE 60004855T DE 60004855 T DE60004855 T DE 60004855T DE 60004855 D1 DE60004855 D1 DE 60004855D1
Authority
DE
Germany
Prior art keywords
signal
integral
gain
function
proportional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60004855T
Other languages
English (en)
Other versions
DE60004855T2 (de
Inventor
Emmanuel Vyers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Publication of DE60004855D1 publication Critical patent/DE60004855D1/de
Application granted granted Critical
Publication of DE60004855T2 publication Critical patent/DE60004855T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Artificial Intelligence (AREA)
  • Health & Medical Sciences (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
  • Flow Control (AREA)
  • Control Of Electric Motors In General (AREA)
DE60004855T 1999-07-10 2000-06-21 Verfahren und vorrichtung für einen proportional-integral-regler mit variabler verstärkung Expired - Fee Related DE60004855T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/351,098 US6445980B1 (en) 1999-07-10 1999-07-10 System and method for a variable gain proportional-integral (PI) controller
US351098 1999-07-10
PCT/US2000/040275 WO2001004717A1 (en) 1999-07-10 2000-06-21 System and method for a variable gain proportional-integral (pi) controller

Publications (2)

Publication Number Publication Date
DE60004855D1 true DE60004855D1 (de) 2003-10-02
DE60004855T2 DE60004855T2 (de) 2004-08-19

Family

ID=23379559

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60004855T Expired - Fee Related DE60004855T2 (de) 1999-07-10 2000-06-21 Verfahren und vorrichtung für einen proportional-integral-regler mit variabler verstärkung

Country Status (10)

Country Link
US (1) US6445980B1 (de)
EP (1) EP1196833B1 (de)
JP (1) JP2003504750A (de)
KR (1) KR100621830B1 (de)
CN (1) CN1235106C (de)
AT (1) ATE248392T1 (de)
AU (1) AU6802600A (de)
DE (1) DE60004855T2 (de)
TW (1) TW490605B (de)
WO (1) WO2001004717A1 (de)

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US7669777B2 (en) 2001-05-07 2010-03-02 Automated Logic Corporation Slope predictive control and digital PID control for a variable temperature control system
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CN100344941C (zh) 2002-07-19 2007-10-24 迅捷公司 具有公共参考臂的可变电阻传感器
CN1688948B (zh) * 2002-07-19 2010-05-26 布鲁克斯器具有限公司 在质量流动控制器中用于压力补偿的方法和装置
US6843139B2 (en) * 2003-03-12 2005-01-18 Rosemount Inc. Flow instrument with multisensors
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US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7454254B2 (en) * 2005-08-30 2008-11-18 Honeywell International, Inc. Aircraft cabin pressure control system and method for reducing outflow valve actuator induced cabin pressure oscillations
US7414379B2 (en) * 2005-10-14 2008-08-19 Cambridge Technology, Inc. Servo control system
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US7603186B2 (en) * 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
US7640078B2 (en) * 2006-07-05 2009-12-29 Advanced Energy Industries, Inc. Multi-mode control algorithm
CN100449432C (zh) * 2006-09-28 2009-01-07 上海交通大学 双输入双输出系统的解耦控制方法
CN100428090C (zh) * 2006-10-19 2008-10-22 上海交通大学 工业多输入输出过程的分布式pi和pid控制器定量整定方法
US8079383B2 (en) * 2006-12-07 2011-12-20 Mks Instruments, Inc. Controller gain scheduling for mass flow controllers
KR100836227B1 (ko) * 2007-03-08 2008-06-09 한국기계연구원 전공 레귤레이터의 압력제어를 위한 펄스 폭 변조방법
US7819183B2 (en) * 2008-06-16 2010-10-26 Halliburton Energy Services, Inc. Work string controller
US8381760B2 (en) 2008-07-14 2013-02-26 Emerson Electric Co. Stepper motor valve and method of control
US8746275B2 (en) * 2008-07-14 2014-06-10 Emerson Electric Co. Gas valve and method of control
US8015791B2 (en) 2008-11-18 2011-09-13 General Electric Company Fuel control system for gas turbine and feed forward control method
KR101183505B1 (ko) * 2008-12-26 2012-09-20 미츠비시 쥬고교 가부시키가이샤 배열 회수 시스템을 위한 제어 장치
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
CN102096420B (zh) * 2009-12-15 2015-01-14 株式会社堀场Stec 质量流量控制器
US8301275B2 (en) * 2010-06-04 2012-10-30 Sti Srl Modified proportional integral derivative controller
TWI452824B (zh) * 2010-08-10 2014-09-11 Richtek Technology Corp 動態增益控制器及其方法
US8624559B2 (en) * 2010-10-14 2014-01-07 GM Global Technology Operations LLC Excessive current detection controls method
CN104220946B (zh) 2012-02-03 2017-03-08 日立金属株式会社 流量控制装置以及流量控制方法
JP5947113B2 (ja) * 2012-06-01 2016-07-06 Dmg森精機株式会社 工作機械を用いた被加工物の加工方法
CN103676644B (zh) * 2012-09-17 2016-06-22 中国石油化工股份有限公司 一种新的阀门摩擦补偿方法
KR102201641B1 (ko) * 2013-03-14 2021-01-12 일리노이즈 툴 워크스 인코포레이티드 질량 흐름 제어기의 밸브 페데스탈을 자동으로 자가-조정하기 위한 시스템 및 방법
CN103294029A (zh) * 2013-05-15 2013-09-11 华南理工大学 一种针对工业过程的高效数据驱动内模多项式控制器
CN106233209B (zh) * 2014-02-17 2019-08-09 株式会社岛津制作所 反馈控制装置
RU2573731C2 (ru) * 2014-05-23 2016-01-27 Сергей Иванович Малафеев Способ работы пропорционально-интегрального регулятора
US10637266B2 (en) * 2015-06-01 2020-04-28 Intersil Americas LLC Regulator with high speed nonlinear compensation
JP7101114B2 (ja) * 2015-09-28 2022-07-14 コーニンクレッカ フィリップス エヌ ヴェ 比例流量弁を使用して気体流を制御するための方法及びシステム
JP6426652B2 (ja) * 2016-04-15 2018-11-21 ファナック株式会社 ディジタル制御電源装置および生産管理システム
JP7535015B2 (ja) 2021-07-13 2024-08-15 オークマ株式会社 位置制御装置

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US5335165A (en) * 1992-05-27 1994-08-02 The Foxboro Company Method and apparatus for adaptive deadtime process control
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US5875109A (en) * 1995-05-24 1999-02-23 Johnson Service Company Adaptive flow controller for use with a flow control system
US6142163A (en) * 1996-03-29 2000-11-07 Lam Research Corporation Method and apparatus for pressure control in vacuum processors

Also Published As

Publication number Publication date
US6445980B1 (en) 2002-09-03
CN1235106C (zh) 2006-01-04
KR100621830B1 (ko) 2006-09-13
TW490605B (en) 2002-06-11
EP1196833A1 (de) 2002-04-17
CN1371490A (zh) 2002-09-25
WO2001004717A1 (en) 2001-01-18
AU6802600A (en) 2001-01-30
DE60004855T2 (de) 2004-08-19
ATE248392T1 (de) 2003-09-15
EP1196833B1 (de) 2003-08-27
KR20020047089A (ko) 2002-06-21
JP2003504750A (ja) 2003-02-04

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication related to discontinuation of the patent is to be deleted
8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS,INC. (N.D.GES.D.STAATES DELAWARE), BILLER

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee