DE59707919D1 - Mehrstufige tieftemperaturkältemaschine - Google Patents

Mehrstufige tieftemperaturkältemaschine

Info

Publication number
DE59707919D1
DE59707919D1 DE59707919T DE59707919T DE59707919D1 DE 59707919 D1 DE59707919 D1 DE 59707919D1 DE 59707919 T DE59707919 T DE 59707919T DE 59707919 T DE59707919 T DE 59707919T DE 59707919 D1 DE59707919 D1 DE 59707919D1
Authority
DE
Germany
Prior art keywords
temperature refrigerator
deep temperature
stage deep
stage
refrigerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59707919T
Other languages
English (en)
Inventor
Hans-Ulrich Haefner
Christoph Heiden
Guenter Thummes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Application granted granted Critical
Publication of DE59707919D1 publication Critical patent/DE59707919D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/10—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point with several cooling stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/006—Gas cycle refrigeration machines using a distributing valve of the rotary type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1408—Pulse-tube cycles with pulse tube having U-turn or L-turn type geometrical arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1424—Pulse tubes with basic schematic including an orifice and a reservoir
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F25D19/006—Thermal coupling structure or interface

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE59707919T 1996-03-29 1997-01-25 Mehrstufige tieftemperaturkältemaschine Expired - Lifetime DE59707919D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19612539A DE19612539A1 (de) 1996-03-29 1996-03-29 Mehrstufige Tieftemperaturkältemaschine
PCT/EP1997/000342 WO1997037174A1 (de) 1996-03-29 1997-01-25 Mehrstufige tieftemperaturkältemaschine

Publications (1)

Publication Number Publication Date
DE59707919D1 true DE59707919D1 (de) 2002-09-12

Family

ID=7789848

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19612539A Withdrawn DE19612539A1 (de) 1996-03-29 1996-03-29 Mehrstufige Tieftemperaturkältemaschine
DE59707919T Expired - Lifetime DE59707919D1 (de) 1996-03-29 1997-01-25 Mehrstufige tieftemperaturkältemaschine

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19612539A Withdrawn DE19612539A1 (de) 1996-03-29 1996-03-29 Mehrstufige Tieftemperaturkältemaschine

Country Status (5)

Country Link
US (1) US6263677B1 (de)
EP (1) EP0890063B1 (de)
JP (1) JP3702964B2 (de)
DE (2) DE19612539A1 (de)
WO (1) WO1997037174A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6330800B1 (en) * 1999-04-16 2001-12-18 Raytheon Company Apparatus and method for achieving temperature stability in a two-stage cryocooler
US6167707B1 (en) * 1999-04-16 2001-01-02 Raytheon Company Single-fluid stirling/pulse tube hybrid expander
DE29911071U1 (de) * 1999-06-24 2000-12-14 CSP Cryogenic Spectrometers GmbH, 85737 Ismaning Kühlvorrichtung
DE19954077C1 (de) * 1999-11-10 2001-03-22 Csp Cryogenic Spectrometers Gm Tieftemperaturkühlvorrichtung
US6467276B2 (en) * 2000-02-17 2002-10-22 Lg Electronics Inc. Pulse tube refrigerator
DE10033410C1 (de) 2000-07-08 2002-05-23 Bruker Biospin Gmbh Kreislaufkryostat
DE10137552C1 (de) * 2001-08-01 2003-01-30 Karlsruhe Forschzent Einrichtung mit einem Kryogenerator zur Rekondensation von tiefsiedenden Gasen des aus einem Flüssiggas-Behälter verdampfenden Gases
US7165406B2 (en) * 2002-01-08 2007-01-23 Shi-Apd Cryogenics, Inc. Integral pulse tube refrigerator and cryopump
WO2003060390A1 (en) * 2002-01-08 2003-07-24 Shi-Apd Cryogenics, Inc. Cryopump with two-stage pulse tube refrigerator
US6915642B2 (en) * 2002-01-22 2005-07-12 L'Air Liquide-Societe Anonyme à Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude Apparatus and method for extracting cooling power from helium in a cooling system regenerator
DE10226498B4 (de) 2002-06-14 2004-07-29 Bruker Biospin Gmbh Kryostatenanordnung mit verbesserten Eigenschaften
US7093449B2 (en) * 2003-07-28 2006-08-22 Raytheon Company Stirling/pulse tube hybrid cryocooler with gas flow shunt
DE202004018469U1 (de) * 2004-11-29 2006-04-13 Vericold Technologies Gmbh Tieftemperatur-Kryostat
US7628022B2 (en) * 2005-10-31 2009-12-08 Clever Fellows Innovation Consortium, Inc. Acoustic cooling device with coldhead and resonant driver separated
EP2310768B1 (de) * 2008-05-21 2018-12-26 Brooks Automation, Inc. Kryogener kühlschrank mit linearantrieb
CN106679217B (zh) * 2016-12-16 2020-08-28 复旦大学 一种机械振动隔离的液氦再凝聚低温制冷系统
US11248996B2 (en) 2017-12-04 2022-02-15 Montana Instruments Corporation Analytical instruments, methods, and components
JP7033009B2 (ja) * 2018-05-31 2022-03-09 住友重機械工業株式会社 パルス管冷凍機
US11956924B1 (en) 2020-08-10 2024-04-09 Montana Instruments Corporation Quantum processing circuitry cooling systems and methods

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1442415A (fr) 1965-05-03 1966-06-17 Air Liquide Procédé de maintien à basse température d'une enceinte, notamment d'une enceinte de mesure
US3721101A (en) * 1971-01-28 1973-03-20 Cryogenic Technology Inc Method and apparatus for cooling a load
JP2706828B2 (ja) 1989-11-01 1998-01-28 株式会社日立製作所 冷凍機
EP0448738A1 (de) * 1990-03-24 1991-10-02 Leybold Aktiengesellschaft Mit einem Refrigerator betriebene Einrichtung
JP2821241B2 (ja) 1990-06-08 1998-11-05 株式会社日立製作所 液化冷凍機付きクライオスタツト
DE4234678C2 (de) 1991-10-15 2003-04-24 Aisin Seiki Reversible Schwingrohr-Wärmekraftmaschine
JP2783112B2 (ja) 1992-03-31 1998-08-06 三菱電機株式会社 極低温冷凍機
US5335505A (en) 1992-05-25 1994-08-09 Kabushiki Kaisha Toshiba Pulse tube refrigerator
US5485730A (en) 1994-08-10 1996-01-23 General Electric Company Remote cooling system for a superconducting magnet
GB2301426B (en) 1995-05-16 1999-05-19 Toshiba Kk A refrigerator having a plurality of cooling stages

Also Published As

Publication number Publication date
JP2000507684A (ja) 2000-06-20
JP3702964B2 (ja) 2005-10-05
EP0890063A1 (de) 1999-01-13
WO1997037174A1 (de) 1997-10-09
DE19612539A1 (de) 1997-10-02
EP0890063B1 (de) 2002-08-07
US6263677B1 (en) 2001-07-24

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