DE50112278D1 - DEVICE AND METHOD FOR ELECTROCHEMICAL COATING - Google Patents

DEVICE AND METHOD FOR ELECTROCHEMICAL COATING

Info

Publication number
DE50112278D1
DE50112278D1 DE50112278T DE50112278T DE50112278D1 DE 50112278 D1 DE50112278 D1 DE 50112278D1 DE 50112278 T DE50112278 T DE 50112278T DE 50112278 T DE50112278 T DE 50112278T DE 50112278 D1 DE50112278 D1 DE 50112278D1
Authority
DE
Germany
Prior art keywords
layers
coated
substrate
thin layers
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50112278T
Other languages
German (de)
Inventor
Alexander Kraft
Karl-Heinz Heckner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dritte Patentportfolio Beteiligungsgesellschaf De
Original Assignee
GESIMAT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GESIMAT GmbH filed Critical GESIMAT GmbH
Application granted granted Critical
Publication of DE50112278D1 publication Critical patent/DE50112278D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10—Electrodes, e.g. composition, counter electrode
    • C25D17/12—Shape or form
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Battery Mounting, Suspending (AREA)
  • Sealing Battery Cases Or Jackets (AREA)

Abstract

The invention relates to a device and method, with which it is possible to electrochemically deposit thin layers with a nearly homogeneous layer thickness on large-surface substrates having relatively high resistances. These thin layers are, for example, metal layers, metal oxide layers or semiconductor layers as well as layers consisting of conductive polymers that, for example, are deposited on transparent electrodes or semiconductor substrates. The counter-electrode for the substrate to be coated is divided into several electrode segments and voltages that differ from one another can be applied between each individual electrode segment and the substrate to be coated. This results in achieving a good homogeneity of the deposited thin layers with respect to thickness and physical properties.
DE50112278T 2001-01-04 2001-09-24 DEVICE AND METHOD FOR ELECTROCHEMICAL COATING Expired - Lifetime DE50112278D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10100297A DE10100297A1 (en) 2001-01-04 2001-01-04 Device and method for electrochemical coating
PCT/DE2001/003676 WO2002053806A2 (en) 2001-01-04 2001-09-24 Electrochemical coating device and method

Publications (1)

Publication Number Publication Date
DE50112278D1 true DE50112278D1 (en) 2007-05-10

Family

ID=7669816

Family Applications (3)

Application Number Title Priority Date Filing Date
DE10100297A Withdrawn DE10100297A1 (en) 2001-01-04 2001-01-04 Device and method for electrochemical coating
DE10195773T Expired - Fee Related DE10195773D2 (en) 2001-01-04 2001-09-24 Device and method for electrochemical coating
DE50112278T Expired - Lifetime DE50112278D1 (en) 2001-01-04 2001-09-24 DEVICE AND METHOD FOR ELECTROCHEMICAL COATING

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE10100297A Withdrawn DE10100297A1 (en) 2001-01-04 2001-01-04 Device and method for electrochemical coating
DE10195773T Expired - Fee Related DE10195773D2 (en) 2001-01-04 2001-09-24 Device and method for electrochemical coating

Country Status (5)

Country Link
EP (1) EP1534880B1 (en)
AT (1) ATE358194T1 (en)
AU (1) AU2002223435A1 (en)
DE (3) DE10100297A1 (en)
WO (1) WO2002053806A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10132408C2 (en) * 2001-07-04 2003-08-21 Fraunhofer Ges Forschung Variable shape electrode
DE10141056C2 (en) * 2001-08-22 2003-12-24 Atotech Deutschland Gmbh Method and device for the electrolytic treatment of electrically conductive layers in continuous systems
DE102004056158B3 (en) * 2004-11-17 2006-03-30 Siemens Ag Method for monitoring an electrochemical treatment process and electrode arrangement suitable for this method
JP6993288B2 (en) * 2018-05-07 2022-01-13 株式会社荏原製作所 Plating equipment
DE102018004841B9 (en) 2018-06-13 2020-12-03 Hooshiar Mahdjour Method and device for the automated regulation of the currents in an electroplating bath

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61279695A (en) * 1985-06-04 1986-12-10 Central Glass Co Ltd Formation of thin film by electrolytic synthesizing method
JPH04143299A (en) * 1990-10-03 1992-05-18 Fujitsu Ltd Electroplating method
US5156730A (en) * 1991-06-25 1992-10-20 International Business Machines Electrode array and use thereof
JP3207909B2 (en) * 1992-02-07 2001-09-10 ティーディーケイ株式会社 Electroplating method and split type insoluble electrode for electroplating
DE19717489B4 (en) * 1997-04-25 2008-04-10 Sms Demag Ag Arrangement for the electrogalvanic metal coating of a strip
AU6773000A (en) * 1999-08-26 2001-03-19 Cvc Products, Inc. Apparatus and method for electroplating a material layer onto a wafer
JP2003535974A (en) * 2000-06-05 2003-12-02 アプライド マテリアルズ インコーポレイテッド Programmable anode device and related method

Also Published As

Publication number Publication date
WO2002053806A2 (en) 2002-07-11
DE10100297A1 (en) 2002-07-18
WO2002053806A3 (en) 2005-03-24
ATE358194T1 (en) 2007-04-15
DE10195773D2 (en) 2004-01-22
AU2002223435A1 (en) 2002-07-16
EP1534880B1 (en) 2007-03-28
EP1534880A2 (en) 2005-06-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DRITTE PATENTPORTFOLIO BETEILIGUNGSGESELLSCHAF, DE