DE4035080A1 - Verfahren und einrichtung zur herstellung von partiellen metallischen schichten - Google Patents

Verfahren und einrichtung zur herstellung von partiellen metallischen schichten

Info

Publication number
DE4035080A1
DE4035080A1 DE4035080A DE4035080A DE4035080A1 DE 4035080 A1 DE4035080 A1 DE 4035080A1 DE 4035080 A DE4035080 A DE 4035080A DE 4035080 A DE4035080 A DE 4035080A DE 4035080 A1 DE4035080 A1 DE 4035080A1
Authority
DE
Germany
Prior art keywords
substrate
metal
solution
production
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE4035080A
Other languages
German (de)
English (en)
Inventor
Hilmar Dr Esrom
Ulrich Dr Kogelschatz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excelitas Noblelight GmbH
Original Assignee
ABB Patent GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB Patent GmbH filed Critical ABB Patent GmbH
Priority to DE4035080A priority Critical patent/DE4035080A1/de
Priority to EP91118471A priority patent/EP0484808A2/de
Priority to JP3286785A priority patent/JPH04272182A/ja
Publication of DE4035080A1 publication Critical patent/DE4035080A1/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
    • H05K3/125—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/12—Using specific substances
    • H05K2203/121—Metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE4035080A 1990-11-05 1990-11-05 Verfahren und einrichtung zur herstellung von partiellen metallischen schichten Ceased DE4035080A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE4035080A DE4035080A1 (de) 1990-11-05 1990-11-05 Verfahren und einrichtung zur herstellung von partiellen metallischen schichten
EP91118471A EP0484808A2 (de) 1990-11-05 1991-10-30 Verfahren und Einrichtung zur Herstellung von partiellen metallischen Schichten
JP3286785A JPH04272182A (ja) 1990-11-05 1991-10-31 部分金属層製造方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4035080A DE4035080A1 (de) 1990-11-05 1990-11-05 Verfahren und einrichtung zur herstellung von partiellen metallischen schichten

Publications (1)

Publication Number Publication Date
DE4035080A1 true DE4035080A1 (de) 1992-05-07

Family

ID=6417641

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4035080A Ceased DE4035080A1 (de) 1990-11-05 1990-11-05 Verfahren und einrichtung zur herstellung von partiellen metallischen schichten

Country Status (3)

Country Link
EP (1) EP0484808A2 (enExample)
JP (1) JPH04272182A (enExample)
DE (1) DE4035080A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20204442U1 (de) 2002-03-15 2002-06-20 Wieland Dental + Technik GmbH & Co. KG, 75179 Pforzheim Leitfähigkeitsstift
DE102006030822A1 (de) * 2006-06-30 2008-01-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen einer metallischen Kontaktstruktur einer Solarzelle
WO2009071145A2 (de) 2007-12-07 2009-06-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur metallisierung von solarzellen, hotmelt-aerosol-tinte und aerosol-jet-drucksystem
CN117083416A (zh) * 2021-01-29 2023-11-17 米德耐克斯股份公司 将金属涂层施加到表面上的方法和装置

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4230149A1 (de) * 1992-09-09 1994-03-17 Heraeus Noblelight Gmbh Verfahren zur Herstellung von oxydischen Schutzschichten
US5448605A (en) * 1993-10-29 1995-09-05 General Electric Company Palladium acetylacetonate solution and related method of manufacture
CA2147522A1 (en) * 1994-05-11 1995-11-12 Ronald Sinclair Nohr Method of coating a substrate with copper
ATE225567T1 (de) * 1994-08-11 2002-10-15 Canon Kk Verwendung einer lösung für die herstellung einer elektroemittierenden vorrichtung und methode zur herstellung von elektroemittierenden vorrichtungen
GB2376566B (en) * 1997-10-14 2003-02-05 Patterning Technologies Ltd Method of forming an electronic device
AU9451098A (en) 1997-10-14 1999-05-03 Patterning Technologies Limited Method of forming an electronic device
US7323634B2 (en) 1998-10-14 2008-01-29 Patterning Technologies Limited Method of forming an electronic device
JP4503792B2 (ja) * 1999-08-11 2010-07-14 三ツ星ベルト株式会社 セラミックス回路基板の製造方法
GB2391871A (en) * 2002-08-16 2004-02-18 Qinetiq Ltd Depositing conductive solid materials using reservoirs in a printhead
GB0402960D0 (en) 2004-02-10 2004-03-17 Plastic Logic Ltd Thermal imaging of catalyst in electroless deposition of metal films
US20050276911A1 (en) * 2004-06-15 2005-12-15 Qiong Chen Printing of organometallic compounds to form conductive traces
US7547647B2 (en) 2004-07-06 2009-06-16 Hewlett-Packard Development Company, L.P. Method of making a structure
JP2006075744A (ja) * 2004-09-10 2006-03-23 Jsr Corp アルミニウムパターンの形成方法
JP5382797B2 (ja) * 2009-09-30 2014-01-08 独立行政法人産業技術総合研究所 導電性組成物を用いた電気化学反応による構造体の作製方法
JP5382796B2 (ja) * 2009-09-30 2014-01-08 独立行政法人産業技術総合研究所 導電性組成物および電気化学反応方法および構造体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047884A1 (de) * 1980-12-18 1982-07-15 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur automatisierbaren bearbeitung in der halbleitertechnologie, z.b. von leiterplatten
EP0132677A1 (de) * 1983-07-22 1985-02-13 Bayer Ag Verfahren zum Aktivieren von Substratoberflächen für die direkte partielle Metallisierung von Trägermaterialien
US4720914A (en) * 1984-07-26 1988-01-26 Matsushita Electric Industrial Co., Ltd. Method for forming thick film circuit using rotatable nozzle having wide discharge hole
DE3840199A1 (de) * 1988-11-29 1990-05-31 Asea Brown Boveri Verfahren zur metallisierung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2757029A1 (de) * 1977-12-21 1980-01-31 Guenther Dr Ing Herrmann Verfahren zur herstellung einer schaltungsplatte
JPS56164595A (en) * 1980-05-23 1981-12-17 Tokyo Shibaura Electric Co Method of producing circuit board
JPS59112685A (ja) * 1982-12-17 1984-06-29 松下電器産業株式会社 電子回路板の製造方法
JPS59177358A (ja) * 1983-03-28 1984-10-08 Nec Corp 局所金属堆積方法および装置
US4668533A (en) * 1985-05-10 1987-05-26 E. I. Du Pont De Nemours And Company Ink jet printing of printed circuit boards
JPS63192874A (ja) * 1987-02-06 1988-08-10 Electroplating Eng Of Japan Co 金属被膜品の製造方法
NL8700833A (nl) * 1987-04-09 1988-11-01 Philips Nv Werkwijze voor het vervaardigen van een gedrukte bedradingspaneel.
JPH01196194A (ja) * 1988-02-01 1989-08-07 Matsushita Electric Ind Co Ltd 回路描画装置
DE58907207D1 (de) * 1988-07-02 1994-04-21 Heraeus Noblelight Gmbh Verfahren zur Herstellung von metallischen Schichten.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047884A1 (de) * 1980-12-18 1982-07-15 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur automatisierbaren bearbeitung in der halbleitertechnologie, z.b. von leiterplatten
EP0132677A1 (de) * 1983-07-22 1985-02-13 Bayer Ag Verfahren zum Aktivieren von Substratoberflächen für die direkte partielle Metallisierung von Trägermaterialien
US4720914A (en) * 1984-07-26 1988-01-26 Matsushita Electric Industrial Co., Ltd. Method for forming thick film circuit using rotatable nozzle having wide discharge hole
DE3840199A1 (de) * 1988-11-29 1990-05-31 Asea Brown Boveri Verfahren zur metallisierung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20204442U1 (de) 2002-03-15 2002-06-20 Wieland Dental + Technik GmbH & Co. KG, 75179 Pforzheim Leitfähigkeitsstift
DE102006030822A1 (de) * 2006-06-30 2008-01-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen einer metallischen Kontaktstruktur einer Solarzelle
WO2009071145A2 (de) 2007-12-07 2009-06-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur metallisierung von solarzellen, hotmelt-aerosol-tinte und aerosol-jet-drucksystem
DE102007058972A1 (de) * 2007-12-07 2009-07-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Metallisierung von Solarzellen, Hotmelt-Aerosol-Tinte und Aerosol-Jet-Drucksystem
CN117083416A (zh) * 2021-01-29 2023-11-17 米德耐克斯股份公司 将金属涂层施加到表面上的方法和装置

Also Published As

Publication number Publication date
EP0484808A2 (de) 1992-05-13
EP0484808A3 (enExample) 1994-02-09
JPH04272182A (ja) 1992-09-28

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Legal Events

Date Code Title Description
8127 New person/name/address of the applicant

Owner name: HERAEUS NOBLELIGHT GMBH, 63450 HANAU, DE

8110 Request for examination paragraph 44
8131 Rejection