DE4026061C1 - - Google Patents

Info

Publication number
DE4026061C1
DE4026061C1 DE4026061A DE4026061A DE4026061C1 DE 4026061 C1 DE4026061 C1 DE 4026061C1 DE 4026061 A DE4026061 A DE 4026061A DE 4026061 A DE4026061 A DE 4026061A DE 4026061 C1 DE4026061 C1 DE 4026061C1
Authority
DE
Germany
Prior art keywords
layer
platinum
rhodium
range
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE4026061A
Other languages
German (de)
English (en)
Inventor
Werner 8755 Alzenau De Englert
Karlheinz Dr. 8750 Aschaffenburg De Wienand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Sensor GmbH
Original Assignee
Heraeus Sensor GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Sensor GmbH filed Critical Heraeus Sensor GmbH
Priority to DE4026061A priority Critical patent/DE4026061C1/de
Priority to DE59103868T priority patent/DE59103868D1/de
Priority to EP91102300A priority patent/EP0471138B1/de
Priority to AT91102300T priority patent/ATE115761T1/de
Application granted granted Critical
Publication of DE4026061C1 publication Critical patent/DE4026061C1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
    • H01C7/022—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient mainly consisting of non-metallic substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/232—Adjusting the temperature coefficient; Adjusting value of resistance by adjusting temperature coefficient of resistance

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Thermistors And Varistors (AREA)
  • Conductive Materials (AREA)
DE4026061A 1990-08-17 1990-08-17 Expired - Lifetime DE4026061C1 (xx)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE4026061A DE4026061C1 (xx) 1990-08-17 1990-08-17
DE59103868T DE59103868D1 (de) 1990-08-17 1991-02-19 Verfahren zur Herstellung eines elektrischen Messwiderstandes.
EP91102300A EP0471138B1 (de) 1990-08-17 1991-02-19 Verfahren zur Herstellung eines elektrischen Messwiderstandes
AT91102300T ATE115761T1 (de) 1990-08-17 1991-02-19 Verfahren zur herstellung eines elektrischen messwiderstandes.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4026061A DE4026061C1 (xx) 1990-08-17 1990-08-17

Publications (1)

Publication Number Publication Date
DE4026061C1 true DE4026061C1 (xx) 1992-02-13

Family

ID=6412421

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4026061A Expired - Lifetime DE4026061C1 (xx) 1990-08-17 1990-08-17
DE59103868T Expired - Fee Related DE59103868D1 (de) 1990-08-17 1991-02-19 Verfahren zur Herstellung eines elektrischen Messwiderstandes.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE59103868T Expired - Fee Related DE59103868D1 (de) 1990-08-17 1991-02-19 Verfahren zur Herstellung eines elektrischen Messwiderstandes.

Country Status (3)

Country Link
EP (1) EP0471138B1 (xx)
AT (1) ATE115761T1 (xx)
DE (2) DE4026061C1 (xx)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4300084A1 (de) * 1993-01-06 1994-07-07 Heraeus Sensor Gmbh Widerstandsthermometer mit einem Meßwiderstand
DE4330447A1 (de) * 1993-09-09 1995-03-23 Heraeus Sensor Gmbh Temperatur-Sensor mit einer in einem Metallmantel angeordnetem mineralisolierten Zuleitung
DE4445243A1 (de) * 1993-12-27 1995-06-29 Ngk Insulators Ltd Temperaturfühler
DE19540194C1 (de) * 1995-10-30 1997-02-20 Heraeus Sensor Gmbh Widerstandsthermometer aus einem Metall der Platingruppe
EP0973020A1 (de) 1998-07-16 2000-01-19 Heraeus Electro-Nite International N.V. Elektrischer Temperatur-Sensor mit Mehrfachschicht
DE19945641A1 (de) * 1999-09-23 2001-04-05 Abb Research Ltd Strombegrenzendes Widerstandselement
DE102007023434A1 (de) * 2007-05-16 2008-11-20 Innovative Sensor Technology Ist Ag Widerstandsthermometer
DE102007046900B4 (de) * 2007-09-28 2011-07-21 Heraeus Sensor Technology GmbH, 63450 Hochtemperatursensor und ein Verfahren zu dessen Herstellung

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19542516C1 (de) * 1995-11-15 1997-04-17 Heraeus Sensor Gmbh Temperatur-Sensor
AT405591B (de) 1997-10-03 1999-09-27 Schaffler & Co Heizelement und verfahren zu dessen herstellung
SK284764B6 (sk) * 1999-01-18 2005-11-03 Slovenská Technická Univerzita, Materiálovotechnologická Spôsob tepelného spracovania platinových drôtov na zabezpečenie stabilizácie elektrického odporu
CN100359305C (zh) * 2004-04-19 2008-01-02 重庆大学 平面绕线型热流计测头
CN100359306C (zh) * 2004-04-19 2008-01-02 重庆大学 薄膜电路热流计传感器
EA012052B1 (ru) 2005-06-17 2009-08-28 Мерц Фарма Гмбх Унд Ко. Кгаа Устройство и способ для ферментативного получения биологически активных соединений

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1180215B (de) * 1962-05-18 1964-10-22 Duerrwaechter E Dr Doduco Loesung von Resinaten der Edelmetalle und/oder Unedelmetalle in Chlorkohlenwasserstoffen zur Erzeugung von auf Traegerwerkstoffen ein-gebrannten duennen Edelmetallschichten bzw. Unedelmetalloxydschichten fuer elektrotechnische Zwecke
DE1806756B2 (de) * 1968-11-02 1975-08-07 Telefunken Patentverwertungsgesellschaft Mbh, 7900 Ulm Verfahren zur Herstellung von ohmschen Widerständen in Dickschichttechnik auf Moduln
US4050052A (en) * 1975-06-21 1977-09-20 W. C. Heraeus Gmbh Electrical temperature measuring resistor structure, particularly for resistance thermometers
US4375056A (en) * 1980-02-29 1983-02-22 Leeds & Northrup Company Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture
US4469717A (en) * 1980-02-29 1984-09-04 Leeds & Northrup Company Thin film resistance thermometer with a predetermined temperature coefficient of resistance and its method of manufacture
DE3426804C2 (de) * 1984-07-10 1987-01-22 W.C. Heraeus Gmbh, 6450 Hanau Substrat für gedruckte Schaltungen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL83232C (xx) * 1950-06-20
US4766411A (en) * 1986-05-29 1988-08-23 U.S. Philips Corporation Use of compositionally modulated multilayer thin films as resistive material

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1180215B (de) * 1962-05-18 1964-10-22 Duerrwaechter E Dr Doduco Loesung von Resinaten der Edelmetalle und/oder Unedelmetalle in Chlorkohlenwasserstoffen zur Erzeugung von auf Traegerwerkstoffen ein-gebrannten duennen Edelmetallschichten bzw. Unedelmetalloxydschichten fuer elektrotechnische Zwecke
DE1806756B2 (de) * 1968-11-02 1975-08-07 Telefunken Patentverwertungsgesellschaft Mbh, 7900 Ulm Verfahren zur Herstellung von ohmschen Widerständen in Dickschichttechnik auf Moduln
US4050052A (en) * 1975-06-21 1977-09-20 W. C. Heraeus Gmbh Electrical temperature measuring resistor structure, particularly for resistance thermometers
DE2527739C3 (de) * 1975-06-21 1978-08-31 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer
US4375056A (en) * 1980-02-29 1983-02-22 Leeds & Northrup Company Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture
US4469717A (en) * 1980-02-29 1984-09-04 Leeds & Northrup Company Thin film resistance thermometer with a predetermined temperature coefficient of resistance and its method of manufacture
DE3426804C2 (de) * 1984-07-10 1987-01-22 W.C. Heraeus Gmbh, 6450 Hanau Substrat für gedruckte Schaltungen

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
AT-Z: "E und M", Jg. 103, H. 1, 1986, S. 22-26 *
Zeitschrift "Platinum Metals Revicer", Vol. 5, 1961, S. 58-65 *

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4300084A1 (de) * 1993-01-06 1994-07-07 Heraeus Sensor Gmbh Widerstandsthermometer mit einem Meßwiderstand
DE4330447A1 (de) * 1993-09-09 1995-03-23 Heraeus Sensor Gmbh Temperatur-Sensor mit einer in einem Metallmantel angeordnetem mineralisolierten Zuleitung
DE4445243C2 (de) * 1993-12-27 2002-03-21 Ngk Insulators Ltd Temperaturfühler
DE4445243A1 (de) * 1993-12-27 1995-06-29 Ngk Insulators Ltd Temperaturfühler
US5823680A (en) * 1993-12-27 1998-10-20 Ngk Insulators, Ltd. Temperature sensor
DE19540194C1 (de) * 1995-10-30 1997-02-20 Heraeus Sensor Gmbh Widerstandsthermometer aus einem Metall der Platingruppe
EP0772031A1 (de) * 1995-10-30 1997-05-07 Heraeus Sensor GmbH Widerstandsthermometer
US5831512A (en) * 1995-10-30 1998-11-03 Heraeus Sensor-Nite Gmbh Resistance thermometer
EP0973020A1 (de) 1998-07-16 2000-01-19 Heraeus Electro-Nite International N.V. Elektrischer Temperatur-Sensor mit Mehrfachschicht
DE19945641A1 (de) * 1999-09-23 2001-04-05 Abb Research Ltd Strombegrenzendes Widerstandselement
DE102007023434A1 (de) * 2007-05-16 2008-11-20 Innovative Sensor Technology Ist Ag Widerstandsthermometer
US8106740B2 (en) 2007-05-16 2012-01-31 Innovative Sensor Technology Ist Ag Resistance thermometer
DE102007023434B4 (de) * 2007-05-16 2017-07-06 Innovative Sensor Technology Ist Ag Widerstandsthermometer
DE102007046900B4 (de) * 2007-09-28 2011-07-21 Heraeus Sensor Technology GmbH, 63450 Hochtemperatursensor und ein Verfahren zu dessen Herstellung
US8183974B2 (en) 2007-09-28 2012-05-22 Heracus Sensor Technology GmbH 1200° C. film resistor
DE102007046900C5 (de) 2007-09-28 2018-07-26 Heraeus Sensor Technology Gmbh Hochtemperatursensor und ein Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
DE59103868D1 (de) 1995-01-26
EP0471138B1 (de) 1994-12-14
EP0471138A2 (de) 1992-02-19
EP0471138A3 (en) 1992-06-17
ATE115761T1 (de) 1994-12-15

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Legal Events

Date Code Title Description
8100 Publication of patent without earlier publication of application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee