DE3862319D1 - Rotationsvakuumpumpe. - Google Patents

Rotationsvakuumpumpe.

Info

Publication number
DE3862319D1
DE3862319D1 DE8888102560T DE3862319T DE3862319D1 DE 3862319 D1 DE3862319 D1 DE 3862319D1 DE 8888102560 T DE8888102560 T DE 8888102560T DE 3862319 T DE3862319 T DE 3862319T DE 3862319 D1 DE3862319 D1 DE 3862319D1
Authority
DE
Germany
Prior art keywords
stator
vacuum pump
rotor
projected
vanes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888102560T
Other languages
English (en)
Inventor
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE3862319D1 publication Critical patent/DE3862319D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
DE8888102560T 1987-02-25 1988-02-22 Rotationsvakuumpumpe. Expired - Fee Related DE3862319D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8702490A FR2611819B1 (fr) 1987-02-25 1987-02-25 Pompe a vide, rotative

Publications (1)

Publication Number Publication Date
DE3862319D1 true DE3862319D1 (de) 1991-05-16

Family

ID=9348301

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888102560T Expired - Fee Related DE3862319D1 (de) 1987-02-25 1988-02-22 Rotationsvakuumpumpe.

Country Status (8)

Country Link
US (1) US4808067A (de)
EP (1) EP0280984B1 (de)
JP (1) JPH081190B2 (de)
AT (1) ATE62531T1 (de)
DE (1) DE3862319D1 (de)
ES (1) ES2021770B3 (de)
FR (1) FR2611819B1 (de)
GR (1) GR3002083T3 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3814721A1 (de) * 1988-04-30 1989-11-09 Asea Brown Boveri Radialluefter mit integriertem schmutzabscheider
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5217357A (en) * 1992-09-10 1993-06-08 Welch Robert E Rotary vane pump with removable particulate collection chamber
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
GB0013491D0 (en) 2000-06-02 2000-07-26 Boc Group Plc Improved vacuum pump
US6821099B2 (en) * 2002-07-02 2004-11-23 Tilia International, Inc. Rotary pump
JP2005344610A (ja) * 2004-06-03 2005-12-15 Boc Edwards Kk 真空排気装置
JP4679119B2 (ja) * 2004-11-10 2011-04-27 株式会社大阪真空機器製作所 ターボ分子ポンプの軸封防塵構造
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
JP4760424B2 (ja) * 2006-02-09 2011-08-31 株式会社島津製作所 ターボ分子ポンプ
US20180038389A1 (en) * 2015-03-20 2018-02-08 Mitsubishi Heavy Industries, Ltd. Compressor system, and attachment structure for centrifugal separator
DE102020209612A1 (de) 2020-07-30 2022-02-03 Robert Bosch Gesellschaft mit beschränkter Haftung Flüssigkeitspumpe

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2732032A (en) * 1956-01-24 sandison
CH132105A (de) * 1927-12-17 1929-03-31 Kuendig B A Zentrifugal-Ventilatoranlage.
US1958145A (en) * 1932-05-23 1934-05-08 Jones William Anthony Fan
US2370778A (en) * 1943-05-24 1945-03-06 Pesco Products Co Booster pump
BE542540A (de) * 1954-11-05
US3066912A (en) * 1961-03-28 1962-12-04 Gen Electric Turbine erosion protective device
US3813854A (en) * 1972-07-07 1974-06-04 N Hortman Centrifugal separator having axial-flow vortex generator
US3827482A (en) * 1972-12-21 1974-08-06 R Pope Radiator fan for earth movers
DD109918A1 (de) * 1974-02-22 1974-11-20
IT1032818B (it) * 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
JPS52147309A (en) * 1976-06-02 1977-12-07 Hitachi Zosen Corp Inlet casing of turbo machine
JPS5420207A (en) * 1977-07-15 1979-02-15 Mitsui Eng & Shipbuild Co Ltd Construction for preventing dust of axial flow turbine
CH633454A5 (de) * 1978-12-01 1982-12-15 Bbc Brown Boveri & Cie Staubabscheider zur abscheidung von staeuben aus stroemenden gasen.
JPS618240Y2 (de) * 1979-08-09 1986-03-13
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
JPS62107292A (ja) * 1985-11-01 1987-05-18 Hitachi Ltd 微小粒子除去機構付の真空ポンプ
JPS6321394A (ja) * 1986-07-15 1988-01-28 Hitachi Ltd 多段型オイルフリ−真空ポンプ

Also Published As

Publication number Publication date
ES2021770B3 (es) 1991-11-16
GR3002083T3 (en) 1992-12-30
FR2611819A1 (fr) 1988-09-09
FR2611819B1 (fr) 1989-05-05
JPH081190B2 (ja) 1996-01-10
EP0280984A1 (de) 1988-09-07
US4808067A (en) 1989-02-28
EP0280984B1 (de) 1991-04-10
ATE62531T1 (de) 1991-04-15
JPS63227990A (ja) 1988-09-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee