DE3851485D1 - Optisches System zur Erhöhung der Beleuchtungsstärke in Peripherobjektzonen. - Google Patents

Optisches System zur Erhöhung der Beleuchtungsstärke in Peripherobjektzonen.

Info

Publication number
DE3851485D1
DE3851485D1 DE3851485T DE3851485T DE3851485D1 DE 3851485 D1 DE3851485 D1 DE 3851485D1 DE 3851485 T DE3851485 T DE 3851485T DE 3851485 T DE3851485 T DE 3851485T DE 3851485 D1 DE3851485 D1 DE 3851485D1
Authority
DE
Germany
Prior art keywords
illuminance
increasing
optical system
peripheral object
object zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3851485T
Other languages
English (en)
Other versions
DE3851485T2 (de
Inventor
Shinichi Danippon Scree Nagata
Haruo Danippon Screen M Uemura
Kenji Danippon Screen Mfg Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62179630A external-priority patent/JPH0734056B2/ja
Priority claimed from JP62193328A external-priority patent/JPH0727117B2/ja
Priority claimed from JP62193329A external-priority patent/JPH0731306B2/ja
Priority claimed from JP62193327A external-priority patent/JPH0727116B2/ja
Priority claimed from JP62198775A external-priority patent/JPH0734057B2/ja
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of DE3851485D1 publication Critical patent/DE3851485D1/de
Application granted granted Critical
Publication of DE3851485T2 publication Critical patent/DE3851485T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/34—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having four components only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/04—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having two components only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/12—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having three components only
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
  • Projection Apparatus (AREA)
DE3851485T 1987-07-17 1988-07-14 Optisches System zur Erhöhung der Beleuchtungsstärke in Peripherobjektzonen. Expired - Fee Related DE3851485T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP62179630A JPH0734056B2 (ja) 1987-07-17 1987-07-17 照明用レンズ
JP62193328A JPH0727117B2 (ja) 1987-07-31 1987-07-31 照明用レンズ
JP62193329A JPH0731306B2 (ja) 1987-07-31 1987-07-31 照明用レンズ
JP62193327A JPH0727116B2 (ja) 1987-07-31 1987-07-31 照明用レンズ
JP62198775A JPH0734057B2 (ja) 1987-08-07 1987-08-07 照明用レンズ

Publications (2)

Publication Number Publication Date
DE3851485D1 true DE3851485D1 (de) 1994-10-20
DE3851485T2 DE3851485T2 (de) 1995-01-19

Family

ID=27528751

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3851485T Expired - Fee Related DE3851485T2 (de) 1987-07-17 1988-07-14 Optisches System zur Erhöhung der Beleuchtungsstärke in Peripherobjektzonen.

Country Status (4)

Country Link
US (1) US4878745A (de)
EP (1) EP0299475B1 (de)
KR (1) KR910008066B1 (de)
DE (1) DE3851485T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5067803A (en) * 1991-03-06 1991-11-26 Fuji Photo Optical Co., Ltd. Photographic wide angle lens
US5485316A (en) * 1991-10-25 1996-01-16 Olympus Optical Co., Ltd. Illumination optical system for endoscopes
US5491765A (en) * 1992-12-08 1996-02-13 Olympus Optical Co., Ltd. Light source devices for endoscopes
US5515123A (en) * 1994-02-17 1996-05-07 Minnesota Mining And Manufacturing Company Condensers for illumination systems
JP2957910B2 (ja) * 1994-07-08 1999-10-06 大日本スクリーン製造株式会社 照明装置
JP3566460B2 (ja) * 1996-06-28 2004-09-15 株式会社トミー 光学装置
DE10029852A1 (de) * 2000-06-16 2001-12-20 Sick Ag Objekterkennung
KR100813959B1 (ko) * 2004-10-19 2008-03-14 삼성전자주식회사 조명장치
US7634152B2 (en) * 2005-03-07 2009-12-15 Hewlett-Packard Development Company, L.P. System and method for correcting image vignetting
TWI563285B (en) 2015-05-28 2016-12-21 Largan Precision Co Ltd Photographing lens system, image capturing device, and electronic device
CN117803887A (zh) * 2024-01-19 2024-04-02 上海燧影光电科技有限公司 一种光学放大装置及其所应用的平面照明系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2803277A1 (de) * 1978-01-26 1979-08-02 Bosch Gmbh Robert Vorrichtung zur belichtung einer auf eine oberflaeche eines substrats aufgebrachten fotolackschicht
JPS57154213A (en) * 1981-03-18 1982-09-24 Asahi Optical Co Ltd Objective lens for video disk
JPS5843416A (ja) * 1981-09-10 1983-03-14 Nippon Kogaku Kk <Nikon> ミラ−集光型逆エキスパンドアフオ−カル照明光学系
DE3220408C2 (de) * 1982-05-29 1985-05-15 Optische Werke G. Rodenstock, 8000 München Abtastobjektiv
DE3505771A1 (de) * 1985-02-20 1986-08-21 Helmut Hund GmbH, 6330 Wetzlar Beleuchtungssystem fuer dia-projektoren
JP2588505B2 (ja) * 1985-08-06 1997-03-05 オリンパス光学工業株式会社 接眼レンズ
JPS62178207A (ja) * 1986-01-31 1987-08-05 Dainippon Screen Mfg Co Ltd 照明用の光学系

Also Published As

Publication number Publication date
US4878745A (en) 1989-11-07
EP0299475A3 (en) 1990-02-28
EP0299475A2 (de) 1989-01-18
DE3851485T2 (de) 1995-01-19
KR890002689A (ko) 1989-04-11
KR910008066B1 (ko) 1991-10-07
EP0299475B1 (de) 1994-09-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee