DE3842099A1 - Wirbelschichtreaktor zur herstellung von polykristallinem silicium - Google Patents

Wirbelschichtreaktor zur herstellung von polykristallinem silicium

Info

Publication number
DE3842099A1
DE3842099A1 DE19883842099 DE3842099A DE3842099A1 DE 3842099 A1 DE3842099 A1 DE 3842099A1 DE 19883842099 DE19883842099 DE 19883842099 DE 3842099 A DE3842099 A DE 3842099A DE 3842099 A1 DE3842099 A1 DE 3842099A1
Authority
DE
Germany
Prior art keywords
silicon
silane
particles
fluidized bed
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19883842099
Other languages
German (de)
English (en)
Other versions
DE3842099C2 (fr
Inventor
Robert Nicholas Flagella
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Silicon Materials LLC
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of DE3842099A1 publication Critical patent/DE3842099A1/de
Application granted granted Critical
Publication of DE3842099C2 publication Critical patent/DE3842099C2/de
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE19883842099 1987-12-14 1988-12-14 Wirbelschichtreaktor zur herstellung von polykristallinem silicium Granted DE3842099A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13249087A 1987-12-14 1987-12-14

Publications (2)

Publication Number Publication Date
DE3842099A1 true DE3842099A1 (de) 1989-06-22
DE3842099C2 DE3842099C2 (fr) 1992-11-05

Family

ID=22454295

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883842099 Granted DE3842099A1 (de) 1987-12-14 1988-12-14 Wirbelschichtreaktor zur herstellung von polykristallinem silicium

Country Status (3)

Country Link
JP (1) JP2562360B2 (fr)
CA (1) CA1336937C (fr)
DE (1) DE3842099A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3910343A1 (de) * 1988-03-31 1989-10-12 Union Carbide Corp Aussenbeheizter wirbelschicht-reaktor
WO2005085133A1 (fr) * 2004-03-02 2005-09-15 Degussa Ag Procede de fabrication de silicium
WO2014191274A1 (fr) * 2013-05-29 2014-12-04 Wacker Chemie Ag Procédé de production de polysilicium granulaire

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10060469A1 (de) * 2000-12-06 2002-07-04 Solarworld Ag Verfahren zur Herstellung von hochreinem, granularem Silizium
DE102004027563A1 (de) * 2004-06-04 2005-12-22 Joint Solar Silicon Gmbh & Co. Kg Silizium sowie Verfahren zu dessen Herstellung
DE202008013839U1 (de) 2008-12-23 2009-04-09 G+R Polysilicon Gmbh Rohrwärmetauscher für eine Einrichtung zur Herstellung von Polysilizium
US8534904B2 (en) * 2010-03-10 2013-09-17 Lord Ltd., Lp Apparatus for restarting a gas-solids contactor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4314525A (en) * 1980-03-03 1982-02-09 California Institute Of Technology Fluidized bed silicon deposition from silane

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4314525A (en) * 1980-03-03 1982-02-09 California Institute Of Technology Fluidized bed silicon deposition from silane

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3910343A1 (de) * 1988-03-31 1989-10-12 Union Carbide Corp Aussenbeheizter wirbelschicht-reaktor
WO2005085133A1 (fr) * 2004-03-02 2005-09-15 Degussa Ag Procede de fabrication de silicium
US7632478B2 (en) 2004-03-02 2009-12-15 Degussa Ag Process for producing silicon
WO2014191274A1 (fr) * 2013-05-29 2014-12-04 Wacker Chemie Ag Procédé de production de polysilicium granulaire
CN105246827A (zh) * 2013-05-29 2016-01-13 瓦克化学股份公司 用于制造颗粒状多晶硅的方法

Also Published As

Publication number Publication date
CA1336937C (fr) 1995-09-12
DE3842099C2 (fr) 1992-11-05
JP2562360B2 (ja) 1996-12-11
JPH026392A (ja) 1990-01-10

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8125 Change of the main classification

Ipc: B01J 8/24

8125 Change of the main classification

Ipc: C01B 33/027

D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ADVANCED SILICON MATERIALS INC., MOSES LAKE, WASH.

8328 Change in the person/name/address of the agent

Free format text: FRHR. VON PECHMANN, E., DIPL.-CHEM. DR.RER.NAT., 8000 MUENCHEN BEHRENS, D., DR.-ING., 81541 MUENCHEN BRANDES, J., DIPL.-CHEM. DR.RER.NAT. GOETZ, R., DIPL.-ING. DIPL.-WIRTSCH.-ING. VON HELLFELD, A., DIPL.-PHYS. DR.RER.NAT., PAT.-ANWAELTE WUERTENBERGER, G., RECHTSANW., 8000 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: ADVANCED SILICON MATERIALS LLC,(N.D.GES.D.STAATES