DE3832088C2 - - Google Patents

Info

Publication number
DE3832088C2
DE3832088C2 DE19883832088 DE3832088A DE3832088C2 DE 3832088 C2 DE3832088 C2 DE 3832088C2 DE 19883832088 DE19883832088 DE 19883832088 DE 3832088 A DE3832088 A DE 3832088A DE 3832088 C2 DE3832088 C2 DE 3832088C2
Authority
DE
Germany
Prior art keywords
lens
scanning
sensor
optical
button
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19883832088
Other languages
German (de)
English (en)
Other versions
DE3832088A1 (de
Inventor
Oskar Dipl.-Ing. 8060 Dachau De Gerstorfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEINPRUEF PERTHEN GMBH, 37073 GOETTINGEN, DE
Original Assignee
Optische Werke G Rodenstock
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optische Werke G Rodenstock filed Critical Optische Werke G Rodenstock
Priority to DE3832088A priority Critical patent/DE3832088A1/de
Publication of DE3832088A1 publication Critical patent/DE3832088A1/de
Application granted granted Critical
Publication of DE3832088C2 publication Critical patent/DE3832088C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE3832088A 1988-09-21 1988-09-21 Optischer taster Granted DE3832088A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3832088A DE3832088A1 (de) 1988-09-21 1988-09-21 Optischer taster

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3832088A DE3832088A1 (de) 1988-09-21 1988-09-21 Optischer taster

Publications (2)

Publication Number Publication Date
DE3832088A1 DE3832088A1 (de) 1990-03-22
DE3832088C2 true DE3832088C2 (enrdf_load_stackoverflow) 1993-03-25

Family

ID=6363427

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3832088A Granted DE3832088A1 (de) 1988-09-21 1988-09-21 Optischer taster

Country Status (1)

Country Link
DE (1) DE3832088A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4425879A1 (de) * 1994-07-09 1996-01-11 Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev Vorrichtung zum Ritzen von im wesentlichen einkristallinen Substraten
DE10320165A1 (de) * 2003-05-05 2004-12-02 Vision & Control Gmbh Vorrichtung zur Inspektion von Bauteilen, insbesondere von Bohrlöchern

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19930628A1 (de) * 1999-07-02 2001-02-01 Graul Renate Topographiemeßgerät

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0652170B2 (ja) * 1986-02-25 1994-07-06 株式会社オカダ 光結像式非接触位置測定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4425879A1 (de) * 1994-07-09 1996-01-11 Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev Vorrichtung zum Ritzen von im wesentlichen einkristallinen Substraten
DE10320165A1 (de) * 2003-05-05 2004-12-02 Vision & Control Gmbh Vorrichtung zur Inspektion von Bauteilen, insbesondere von Bohrlöchern

Also Published As

Publication number Publication date
DE3832088A1 (de) 1990-03-22

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FEINPRUEF PERTHEN GMBH, 37073 GOETTINGEN, DE

8339 Ceased/non-payment of the annual fee