DE3826046C2 - - Google Patents

Info

Publication number
DE3826046C2
DE3826046C2 DE3826046A DE3826046A DE3826046C2 DE 3826046 C2 DE3826046 C2 DE 3826046C2 DE 3826046 A DE3826046 A DE 3826046A DE 3826046 A DE3826046 A DE 3826046A DE 3826046 C2 DE3826046 C2 DE 3826046C2
Authority
DE
Germany
Prior art keywords
coating
layers
substrate
laser
structured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3826046A
Other languages
German (de)
English (en)
Other versions
DE3826046A1 (de
Inventor
Michael Dipl.-Phys. Dr. 3400 Goettingen De Stuke
Hilmar Dipl.-Phys. Dr. 6900 Heidelberg De Esrom
Georg Dipl.-Chem. Dr. 6904 Eppelheim De Wahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
ABB AG Germany
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Asea Brown Boveri AG Germany
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV, Asea Brown Boveri AG Germany filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority to DE3826046A priority Critical patent/DE3826046A1/de
Priority to JP63203314A priority patent/JPH01100279A/ja
Priority to US07/233,241 priority patent/US4900581A/en
Publication of DE3826046A1 publication Critical patent/DE3826046A1/de
Application granted granted Critical
Publication of DE3826046C2 publication Critical patent/DE3826046C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1612—Process or apparatus coating on selected surface areas by direct patterning through irradiation means
DE3826046A 1987-08-17 1988-07-30 Verfahren zur herstellung von metallischen schichten Granted DE3826046A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE3826046A DE3826046A1 (de) 1987-08-17 1988-07-30 Verfahren zur herstellung von metallischen schichten
JP63203314A JPH01100279A (ja) 1987-08-17 1988-08-17 金属層の製造方法
US07/233,241 US4900581A (en) 1987-08-17 1988-08-17 Method for producing metal films

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3727422 1987-08-17
DE3826046A DE3826046A1 (de) 1987-08-17 1988-07-30 Verfahren zur herstellung von metallischen schichten

Publications (2)

Publication Number Publication Date
DE3826046A1 DE3826046A1 (de) 1989-03-02
DE3826046C2 true DE3826046C2 (US06277897-20010821-C00009.png) 1990-12-06

Family

ID=25858741

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3826046A Granted DE3826046A1 (de) 1987-08-17 1988-07-30 Verfahren zur herstellung von metallischen schichten

Country Status (3)

Country Link
US (1) US4900581A (US06277897-20010821-C00009.png)
JP (1) JPH01100279A (US06277897-20010821-C00009.png)
DE (1) DE3826046A1 (US06277897-20010821-C00009.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19882125B4 (de) * 1997-02-28 2009-03-19 The Whitaker Corp., Wilmington Direkte Abscheidung von Palladium

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DE3922233A1 (de) * 1989-07-06 1991-01-17 Guenter Link Verfahren zur abscheidung von metallen aus metallorganischen verbindungen mittels photonenstrahlung
DE3936479A1 (de) * 1989-11-02 1991-05-08 Guenter Link Verfahren zur erzeugung von schutzschichten auf materialoberflaechen mittels laserstrahlung
US5225251A (en) * 1989-12-22 1993-07-06 Asea Brown Boveri Aktiengesellschaft Method for forming layers by UV radiation of aluminum nitride
DE4008482A1 (de) * 1990-03-16 1991-09-19 Asea Brown Boveri Galvanisierungsverfahren
DE4034834C2 (de) * 1990-11-02 1995-03-23 Heraeus Noblelight Gmbh Verfahren zur Herstellung metallischer Schichten auf Substraten und Verwendung der Schichten
JP2740764B2 (ja) * 1990-11-19 1998-04-15 工業技術院長 高分子成形品表面の選択的無電解めっき方法
US5153023A (en) * 1990-12-03 1992-10-06 Xerox Corporation Process for catalysis of electroless metal plating on plastic
DE4210400C1 (en) * 1992-03-30 1993-01-07 Siemens Ag, 8000 Muenchen, De Local copper@ deposition from organo:metallic film on substrate - by forming film from mixt. of copper acetate and copper formate in specified ratio and depositing film by laser irradiation
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US5322986A (en) * 1992-04-06 1994-06-21 Eastman Kodak Company Methods for preparing polymer stripe waveguides and polymer stripe waveguides prepared thereby
US5459098A (en) * 1992-10-19 1995-10-17 Marietta Energy Systems, Inc. Maskless laser writing of microscopic metallic interconnects
US5721287A (en) 1993-08-05 1998-02-24 Kimberly-Clark Worldwide, Inc. Method of mutating a colorant by irradiation
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US6211383B1 (en) 1993-08-05 2001-04-03 Kimberly-Clark Worldwide, Inc. Nohr-McDonald elimination reaction
US5643356A (en) 1993-08-05 1997-07-01 Kimberly-Clark Corporation Ink for ink jet printers
CA2120838A1 (en) 1993-08-05 1995-02-06 Ronald Sinclair Nohr Solid colored composition mutable by ultraviolet radiation
US6017661A (en) 1994-11-09 2000-01-25 Kimberly-Clark Corporation Temporary marking using photoerasable colorants
US6017471A (en) 1993-08-05 2000-01-25 Kimberly-Clark Worldwide, Inc. Colorants and colorant modifiers
US5645964A (en) 1993-08-05 1997-07-08 Kimberly-Clark Corporation Digital information recording media and method of using same
US5773182A (en) 1993-08-05 1998-06-30 Kimberly-Clark Worldwide, Inc. Method of light stabilizing a colorant
US5703341A (en) * 1993-11-23 1997-12-30 Lockheed Martin Energy Systems, Inc. Method for adhesion of metal films to ceramics
US5685754A (en) 1994-06-30 1997-11-11 Kimberly-Clark Corporation Method of generating a reactive species and polymer coating applications therefor
US6242057B1 (en) 1994-06-30 2001-06-05 Kimberly-Clark Worldwide, Inc. Photoreactor composition and applications therefor
US5739175A (en) 1995-06-05 1998-04-14 Kimberly-Clark Worldwide, Inc. Photoreactor composition containing an arylketoalkene wavelength-specific sensitizer
US6071979A (en) 1994-06-30 2000-06-06 Kimberly-Clark Worldwide, Inc. Photoreactor composition method of generating a reactive species and applications therefor
JP2882572B2 (ja) * 1994-08-31 1999-04-12 インターナショナル・ビジネス・マシーンズ・コーポレイション 金属薄膜をレーザで平坦化する方法
US5626670A (en) * 1994-10-03 1997-05-06 American Research Corporation Of Virginia Method for producing low thermal budget ferroelectric thin films for integrated device structures using laser-crystallization of spin-on sol-gel films
US6008268A (en) 1994-10-21 1999-12-28 Kimberly-Clark Worldwide, Inc. Photoreactor composition, method of generating a reactive species, and applications therefor
DE4444567A1 (de) * 1994-12-02 1996-06-05 Siemens Ag Verfahren zum Herstellen einer Leiterplatte mit einer Kernplatte aus Aluminium oder Aluminiumlegierung
DE19518512C2 (de) * 1995-03-06 2001-11-29 Fraunhofer Ges Forschung Palladiumhaltiges Precursormaterial und Verfahren zur Herstellung von metallischen Mikrostrukturen auf dielektrischen Substraten mit einem palladiumhaltigen Precursormaterial
US5811199A (en) 1995-06-05 1998-09-22 Kimberly-Clark Worldwide, Inc. Adhesive compositions containing a photoreactor composition
US5786132A (en) 1995-06-05 1998-07-28 Kimberly-Clark Corporation Pre-dyes, mutable dye compositions, and methods of developing a color
US5849411A (en) 1995-06-05 1998-12-15 Kimberly-Clark Worldwide, Inc. Polymer film, nonwoven web and fibers containing a photoreactor composition
US5798015A (en) 1995-06-05 1998-08-25 Kimberly-Clark Worldwide, Inc. Method of laminating a structure with adhesive containing a photoreactor composition
US5747550A (en) 1995-06-05 1998-05-05 Kimberly-Clark Worldwide, Inc. Method of generating a reactive species and polymerizing an unsaturated polymerizable material
WO1996039646A1 (en) 1995-06-05 1996-12-12 Kimberly-Clark Worldwide, Inc. Novel pre-dyes
MX9710016A (es) 1995-06-28 1998-07-31 Kimberly Clark Co Colorantes novedosos y modificadores de colorante.
DE69620428T2 (de) 1995-11-28 2002-11-14 Kimberly Clark Co Lichtstabilisierte fabstoffzusammensetzungen
US5855655A (en) 1996-03-29 1999-01-05 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5782963A (en) 1996-03-29 1998-07-21 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US6099628A (en) 1996-03-29 2000-08-08 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5891229A (en) 1996-03-29 1999-04-06 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
DE19723734C2 (de) 1997-06-06 2002-02-07 Gerhard Naundorf Leiterbahnstrukturen auf einem nichtleitenden Trägermaterial und Verfahren zu ihrer Herstellung
US6524379B2 (en) 1997-08-15 2003-02-25 Kimberly-Clark Worldwide, Inc. Colorants, colorant stabilizers, ink compositions, and improved methods of making the same
KR100591999B1 (ko) 1998-06-03 2006-06-22 킴벌리-클라크 월드와이드, 인크. 마이크로에멀젼 기술에 의해 제조된 네오나노플라스트 및잉크젯 프린팅용 잉크
AU4818299A (en) 1998-06-03 1999-12-20 Kimberly-Clark Worldwide, Inc. Novel photoinitiators and applications therefor
IE980461A1 (en) 1998-06-15 2000-05-03 Univ Cork Method for selective activation and metallisation of materials
BR9912003A (pt) 1998-07-20 2001-04-10 Kimberly Clark Co Composições de tinta para jato de tinta aperfeiçoadas
DE19835158A1 (de) * 1998-08-04 2000-02-10 Wolfgang Anger Verfahren zur Erzeugung von Leiterplatten
JP2003533548A (ja) 1998-09-28 2003-11-11 キンバリー クラーク ワールドワイド インコーポレイテッド 光重合開始剤であるキノイド基を含むキレート
WO2000042110A1 (en) 1999-01-19 2000-07-20 Kimberly-Clark Worldwide, Inc. Novel colorants, colorant stabilizers, ink compositions, and improved methods of making the same
US6331056B1 (en) 1999-02-25 2001-12-18 Kimberly-Clark Worldwide, Inc. Printing apparatus and applications therefor
US6294698B1 (en) 1999-04-16 2001-09-25 Kimberly-Clark Worldwide, Inc. Photoinitiators and applications therefor
US6368395B1 (en) 1999-05-24 2002-04-09 Kimberly-Clark Worldwide, Inc. Subphthalocyanine colorants, ink compositions, and method of making the same
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US7800024B2 (en) * 2004-09-27 2010-09-21 Duguay Michel A Lithic wireless warming table and portable heaters
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19882125B4 (de) * 1997-02-28 2009-03-19 The Whitaker Corp., Wilmington Direkte Abscheidung von Palladium

Also Published As

Publication number Publication date
US4900581A (en) 1990-02-13
DE3826046A1 (de) 1989-03-02
JPH01100279A (ja) 1989-04-18

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8363 Opposition against the patent
8331 Complete revocation