DE3789276D1 - Verfahren zur Herstellung von für die Herstellung von keramischen Materialien geeigneten Polymeren aus cyclischen Silazanen und Halosilanen. - Google Patents
Verfahren zur Herstellung von für die Herstellung von keramischen Materialien geeigneten Polymeren aus cyclischen Silazanen und Halosilanen.Info
- Publication number
- DE3789276D1 DE3789276D1 DE87308947T DE3789276T DE3789276D1 DE 3789276 D1 DE3789276 D1 DE 3789276D1 DE 87308947 T DE87308947 T DE 87308947T DE 3789276 T DE3789276 T DE 3789276T DE 3789276 D1 DE3789276 D1 DE 3789276D1
- Authority
- DE
- Germany
- Prior art keywords
- halosilanes
- preparation
- production
- ceramic materials
- polymers suitable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
- C08G77/62—Nitrogen atoms
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Ceramic Products (AREA)
- Silicon Polymers (AREA)
- Carbon And Carbon Compounds (AREA)
- Inorganic Fibers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/926,607 US4742143A (en) | 1986-11-04 | 1986-11-04 | Preceramic polymers derived from cyclic silazanes, and halosilanes and a method for their preparation |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3789276D1 true DE3789276D1 (de) | 1994-04-14 |
DE3789276T2 DE3789276T2 (de) | 1994-08-25 |
Family
ID=25453436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3789276T Expired - Fee Related DE3789276T2 (de) | 1986-11-04 | 1987-10-09 | Verfahren zur Herstellung von für die Herstellung von keramischen Materialien geeigneten Polymeren aus cyclischen Silazanen und Halosilanen. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4742143A (de) |
EP (1) | EP0266918B1 (de) |
JP (1) | JP2511074B2 (de) |
CA (1) | CA1287433C (de) |
DE (1) | DE3789276T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4826733A (en) * | 1986-12-03 | 1989-05-02 | Dow Corning Corporation | Sin-containing coatings for electronic devices |
JP2507762B2 (ja) * | 1987-10-31 | 1996-06-19 | 新技術事業団 | メチルポリシラザンの製造法 |
DE3824614A1 (de) * | 1988-07-20 | 1990-01-25 | Hoechst Ag | Verfahren zur herstellung von siliziumnitrid enthaltendem keramischem material aus polymeren hydridochlorsilazanen |
US5189132A (en) * | 1988-12-03 | 1993-02-23 | Hoechst Aktiengesellschaft | Polymeric hydridochlorosilazanes, process for their preparation, ceramic materials containing silicon nitride which can be manufactured therefrom, and their manufacture |
DE3840777A1 (de) * | 1988-12-03 | 1990-06-07 | Hoechst Ag | Chlorhaltige, silazanpolymere, verfahren zu ihrer herstellung, aus ihnen herstellbare, siliziumnitrid enthaltende keramische materialien, sowie deren herstellung |
DE3840775A1 (de) * | 1988-12-03 | 1990-06-07 | Hoechst Ag | Polymere chlorsilazane, verfahren zu ihrer herstellung, aus ihnen herstellbare, siliziumnitrid enthaltende keramische materialien, sowie deren herstellung |
DE3840770A1 (de) * | 1988-12-03 | 1990-06-07 | Hoechst Ag | Polymere ethylenverbrueckte chlorsilazane, verfahren zu ihrer herstellung, aus ihnen herstellbare, siliziumnitrid enthaltende keramische materialien, sowie deren herstellung |
DE3840774A1 (de) * | 1988-12-03 | 1990-06-07 | Hoechst Ag | Polymere hydridochlorsilazane, verfahren zu ihrer herstellung, aus ihnen herstellbare, siliziumnitrid enthaltende keramische materialien, sowie deren herstellung |
DE3904118A1 (de) * | 1989-02-11 | 1990-08-16 | Hoechst Ag | Hochfeste verbundkeramik, verfahren zu ihrer herstellung sowie ihre verwendung |
DE3909978A1 (de) * | 1989-03-25 | 1990-09-27 | Hoechst Ag | Sinterfaehiges keramikpulver, verfahren zu seiner herstellung, daraus hergestellte siliziumnitridkeramik, verfahren zu deren herstellung sowie deren verwendung |
EP0409146A3 (en) * | 1989-07-18 | 1992-05-06 | Shin-Etsu Chemical Co., Ltd. | Method and apparatus for preparing organic silazane polymer and method for preparing inorganic fibers |
DE4002383A1 (de) * | 1990-01-27 | 1991-08-01 | Hoechst Ag | Sicl-gruppen enthaltende silazanpolymere, verfahren zu ihrer herstellung, aus ihnen herstellbare, siliciumnitrid enthaltende keramische materialien, sowie deren herstellung |
KR100362834B1 (ko) | 2000-05-02 | 2002-11-29 | 삼성전자 주식회사 | 반도체 장치의 산화막 형성 방법 및 이에 의하여 제조된 반도체 장치 |
US6479405B2 (en) | 2000-10-12 | 2002-11-12 | Samsung Electronics Co., Ltd. | Method of forming silicon oxide layer in semiconductor manufacturing process using spin-on glass composition and isolation method using the same method |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2547678A (en) * | 1946-10-11 | 1951-04-03 | Gen Electric | Liquid polysiloxanes |
US2448556A (en) * | 1947-01-16 | 1948-09-07 | Gen Electric | Synthetic elastic and elastomeric products |
US2579418A (en) * | 1949-01-24 | 1951-12-18 | Edwin L Gustus | Polymeric resinous products containing repeating units of silicon linked to nitrogen and process for making same |
US3007886A (en) * | 1958-10-15 | 1961-11-07 | Richardson Co | Silicon-nitrogen compositions modified with metallic salts |
US3393218A (en) * | 1964-05-18 | 1968-07-16 | Monsanto Co | Polymeric silazane compounds |
DE2243527A1 (de) * | 1972-09-05 | 1974-04-18 | Bayer Ag | Formkoerper aus homogenen mischungen von siliciumcarbid und siliciumnitrid und verfahren zu ihrer herstellung |
US4312970A (en) * | 1981-02-20 | 1982-01-26 | Dow Corning Corporation | Silazane polymers from {R'3 Si}2 NH and organochlorosilanes |
US4482669A (en) * | 1984-01-19 | 1984-11-13 | Massachusetts Institute Of Technology | Preceramic organosilazane polymers |
US4482689A (en) * | 1984-03-12 | 1984-11-13 | Dow Corning Corporation | Process for the preparation of polymetallo(disily)silazane polymers and the polymers therefrom |
CA1241972A (en) * | 1984-09-11 | 1988-09-13 | Dow Corning Corporation | Ceramic materials from silazane polymers |
FR2590584B1 (fr) * | 1985-11-28 | 1988-03-04 | Rhone Poulenc Spec Chim | Procede de preparation, en deux etapes, de reticulats d'organopolysilazanes de tenue thermique amelioree pouvant servir notamment comme precurseur ceramique |
JPS62199623A (ja) * | 1986-02-28 | 1987-09-03 | Toshiba Silicone Co Ltd | 環状ポリメチルシラザン構造を有する重合体の製造方法 |
-
1986
- 1986-11-04 US US06/926,607 patent/US4742143A/en not_active Expired - Lifetime
-
1987
- 1987-09-24 CA CA000547724A patent/CA1287433C/en not_active Expired - Lifetime
- 1987-10-09 EP EP87308947A patent/EP0266918B1/de not_active Expired - Lifetime
- 1987-10-09 DE DE3789276T patent/DE3789276T2/de not_active Expired - Fee Related
- 1987-11-04 JP JP62277571A patent/JP2511074B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0266918A3 (en) | 1990-03-28 |
JP2511074B2 (ja) | 1996-06-26 |
EP0266918A2 (de) | 1988-05-11 |
CA1287433C (en) | 1991-08-06 |
DE3789276T2 (de) | 1994-08-25 |
EP0266918B1 (de) | 1994-03-09 |
JPS63128026A (ja) | 1988-05-31 |
US4742143A (en) | 1988-05-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |