DE3876534D1 - Verfahren zur herstellung von materialien auf basis von siliciumcarbid und eine zusammensetzung von rohmaterialien dafuer. - Google Patents
Verfahren zur herstellung von materialien auf basis von siliciumcarbid und eine zusammensetzung von rohmaterialien dafuer.Info
- Publication number
- DE3876534D1 DE3876534D1 DE8888112738T DE3876534T DE3876534D1 DE 3876534 D1 DE3876534 D1 DE 3876534D1 DE 8888112738 T DE8888112738 T DE 8888112738T DE 3876534 T DE3876534 T DE 3876534T DE 3876534 D1 DE3876534 D1 DE 3876534D1
- Authority
- DE
- Germany
- Prior art keywords
- composition
- production
- silicon carbide
- raw materials
- therefor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/575—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20037487 | 1987-08-11 | ||
JP22005387 | 1987-09-02 | ||
JP4563788 | 1988-02-26 | ||
JP63112963A JP2736380B2 (ja) | 1987-08-11 | 1988-05-10 | 炭化珪素質材料の製造方法及び原料組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3876534D1 true DE3876534D1 (de) | 1993-01-21 |
DE3876534T2 DE3876534T2 (de) | 1993-04-22 |
Family
ID=27461749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888112738T Expired - Fee Related DE3876534T2 (de) | 1987-08-11 | 1988-08-04 | Verfahren zur herstellung von materialien auf basis von siliciumcarbid und eine zusammensetzung von rohmaterialien dafuer. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5108965A (de) |
EP (1) | EP0303192B1 (de) |
JP (1) | JP2736380B2 (de) |
CA (1) | CA1314296C (de) |
DE (1) | DE3876534T2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4963516A (en) * | 1987-07-28 | 1990-10-16 | Ngk Insulators, Ltd. | SiC complex sintered bodies and production thereof |
DE4136744C2 (de) * | 1991-11-08 | 2002-10-10 | Max Planck Gesellschaft | Verstärkte Werkstoffe, Verfahren zu deren Herstellung und deren Verwendung |
US6277440B1 (en) | 1998-11-23 | 2001-08-21 | Msnw, Inc. | Preparation of ceramic matrix composites by infiltration of fibrous preforms with fluids or slurries and subsequent pyrolysis |
US7420275B1 (en) * | 2003-09-24 | 2008-09-02 | Novellus Systems, Inc. | Boron-doped SIC copper diffusion barrier films |
US6967405B1 (en) | 2003-09-24 | 2005-11-22 | Yongsik Yu | Film for copper diffusion barrier |
US7282438B1 (en) | 2004-06-15 | 2007-10-16 | Novellus Systems, Inc. | Low-k SiC copper diffusion barrier films |
US7803732B1 (en) * | 2006-05-09 | 2010-09-28 | BAE Systems Advanced Ceramics, Inc. | Compositions for improved ceramic armor |
US8097548B2 (en) | 2006-05-22 | 2012-01-17 | Zhang Shi C | High-density pressurelessly sintered zirconium diboride/silicon carbide composite bodies and a method for producing the same |
US20070270302A1 (en) * | 2006-05-22 | 2007-11-22 | Zhang Shi C | Pressurelessly sintered zirconium diboride/silicon carbide composite bodies and a method for producing the same |
US7915166B1 (en) | 2007-02-22 | 2011-03-29 | Novellus Systems, Inc. | Diffusion barrier and etch stop films |
US8173537B1 (en) | 2007-03-29 | 2012-05-08 | Novellus Systems, Inc. | Methods for reducing UV and dielectric diffusion barrier interaction |
US8291174B2 (en) * | 2007-08-15 | 2012-10-16 | Micron Technology, Inc. | Memory device and method having on-board address protection system for facilitating interface with multiple processors, and computer system using same |
US8124522B1 (en) | 2008-04-11 | 2012-02-28 | Novellus Systems, Inc. | Reducing UV and dielectric diffusion barrier interaction through the modulation of optical properties |
US8357623B2 (en) * | 2009-03-30 | 2013-01-22 | U.S. Department Of Energy | Composite materials and bodies including silicon carbide and titanium diboride and methods of forming same |
US8247332B2 (en) * | 2009-12-04 | 2012-08-21 | Novellus Systems, Inc. | Hardmask materials |
JP2012041214A (ja) * | 2010-08-17 | 2012-03-01 | Tokyo Yogyo Co Ltd | 炭化ケイ素焼結体の製造方法及び炭化ケイ素焼結体 |
JP5436486B2 (ja) * | 2011-04-15 | 2014-03-05 | 株式会社豊田中央研究所 | 摺動部材 |
US10325773B2 (en) | 2012-06-12 | 2019-06-18 | Novellus Systems, Inc. | Conformal deposition of silicon carbide films |
US9234276B2 (en) | 2013-05-31 | 2016-01-12 | Novellus Systems, Inc. | Method to obtain SiC class of films of desired composition and film properties |
US10211310B2 (en) | 2012-06-12 | 2019-02-19 | Novellus Systems, Inc. | Remote plasma based deposition of SiOC class of films |
US10832904B2 (en) | 2012-06-12 | 2020-11-10 | Lam Research Corporation | Remote plasma based deposition of oxygen doped silicon carbide films |
US9337068B2 (en) | 2012-12-18 | 2016-05-10 | Lam Research Corporation | Oxygen-containing ceramic hard masks and associated wet-cleans |
US10297442B2 (en) | 2013-05-31 | 2019-05-21 | Lam Research Corporation | Remote plasma based deposition of graded or multi-layered silicon carbide film |
US20160314964A1 (en) | 2015-04-21 | 2016-10-27 | Lam Research Corporation | Gap fill using carbon-based films |
US10002787B2 (en) | 2016-11-23 | 2018-06-19 | Lam Research Corporation | Staircase encapsulation in 3D NAND fabrication |
US9837270B1 (en) | 2016-12-16 | 2017-12-05 | Lam Research Corporation | Densification of silicon carbide film using remote plasma treatment |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4327186A (en) * | 1980-06-23 | 1982-04-27 | Kennecott Corporation | Sintered silicon carbide-titanium diboride mixtures and articles thereof |
JPS57191216A (en) * | 1981-05-22 | 1982-11-25 | Hitachi Metals Ltd | Preparation of nonoxide powder |
US4500643A (en) * | 1982-12-30 | 1985-02-19 | Alcan International Limited | Shaped refractory metal boride articles and method of making them |
JPS6027643A (ja) * | 1983-07-27 | 1985-02-12 | 株式会社日立製作所 | 高温構造部材 |
JPS60186468A (ja) * | 1984-03-06 | 1985-09-21 | 株式会社日立製作所 | セラミツクス構造材及びその製造方法 |
US4698319A (en) * | 1984-04-27 | 1987-10-06 | Aluminum Company Of America | Densified composite containing one or more interwoven matrix compositions |
US4636481A (en) * | 1984-07-10 | 1987-01-13 | Asahi Glass Company Ltd. | ZrB2 composite sintered material |
JPH0672051B2 (ja) * | 1985-03-30 | 1994-09-14 | 京セラ株式会社 | 炭化珪素質焼結体及びその製造法 |
JPS62260774A (ja) * | 1986-05-01 | 1987-11-13 | 新日本製鐵株式会社 | 炭化珪素系複合セラミックス焼結体 |
JPS6433070A (en) * | 1987-07-28 | 1989-02-02 | Ngk Insulators Ltd | Sic composite sintered body and production thereof |
US5034355A (en) * | 1987-10-28 | 1991-07-23 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Tough silicon carbide composite material containing fibrous boride |
-
1988
- 1988-05-10 JP JP63112963A patent/JP2736380B2/ja not_active Expired - Fee Related
- 1988-08-04 EP EP88112738A patent/EP0303192B1/de not_active Expired
- 1988-08-04 DE DE8888112738T patent/DE3876534T2/de not_active Expired - Fee Related
- 1988-08-10 CA CA000574282A patent/CA1314296C/en not_active Expired - Fee Related
-
1991
- 1991-08-19 US US07/747,499 patent/US5108965A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3876534T2 (de) | 1993-04-22 |
JPH01301508A (ja) | 1989-12-05 |
EP0303192B1 (de) | 1992-12-09 |
CA1314296C (en) | 1993-03-09 |
US5108965A (en) | 1992-04-28 |
EP0303192A1 (de) | 1989-02-15 |
JP2736380B2 (ja) | 1998-04-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8320 | Willingness to grant licences declared (paragraph 23) | ||
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |