DE3785638D1 - Verfahren zur zuechtung von kristallen aus halbleiterverbindungen. - Google Patents
Verfahren zur zuechtung von kristallen aus halbleiterverbindungen.Info
- Publication number
- DE3785638D1 DE3785638D1 DE8787309668T DE3785638T DE3785638D1 DE 3785638 D1 DE3785638 D1 DE 3785638D1 DE 8787309668 T DE8787309668 T DE 8787309668T DE 3785638 T DE3785638 T DE 3785638T DE 3785638 D1 DE3785638 D1 DE 3785638D1
- Authority
- DE
- Germany
- Prior art keywords
- growing crystals
- semiconductor connections
- connections
- semiconductor
- crystals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/901—Levitation, reduced gravity, microgravity, space
- Y10S117/902—Specified orientation, shape, crystallography, or size of seed or substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25830986A JPH0729870B2 (ja) | 1986-10-31 | 1986-10-31 | 化合物半導体の結晶成長方法および装置 |
JP18896487A JPH0768075B2 (ja) | 1987-07-30 | 1987-07-30 | 化合物半導体単結晶成長方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3785638D1 true DE3785638D1 (de) | 1993-06-03 |
DE3785638T2 DE3785638T2 (de) | 1993-11-18 |
Family
ID=26505238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE87309668T Expired - Fee Related DE3785638T2 (de) | 1986-10-31 | 1987-11-02 | Verfahren zur Züchtung von Kristallen aus Halbleiterverbindungen. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4853066A (de) |
EP (1) | EP0266227B1 (de) |
DE (1) | DE3785638T2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5342475A (en) * | 1991-06-07 | 1994-08-30 | The Furukawa Electric Co., Ltd. | Method of growing single crystal of compound semiconductor |
US5611856A (en) * | 1994-05-19 | 1997-03-18 | Lockheed Sanders, Inc. | Method for growing crystals |
KR100246712B1 (ko) * | 1994-06-02 | 2000-03-15 | 구마모토 마사히로 | 화합물 단결정의 제조방법 및 제조장치 |
JP3648703B2 (ja) * | 2000-01-07 | 2005-05-18 | 株式会社日鉱マテリアルズ | 化合物半導体単結晶の製造方法 |
JP2002249399A (ja) * | 2001-02-21 | 2002-09-06 | Murata Mfg Co Ltd | 単結晶の製造方法および単結晶 |
US20150023866A1 (en) * | 2013-07-22 | 2015-01-22 | Rubicon Technology, Inc. | Method and system of producing large oxide crystals from a melt |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1217926B (de) * | 1963-08-17 | 1966-06-02 | Siemens Ag | Verfahren zum Vermeiden von Streifen in Metall- oder Halbleiterkristallen |
FR2320773A1 (fr) * | 1973-12-14 | 1977-03-11 | Radiotechnique Compelec | Procede de fabrication de lingots monocristallins |
FR2255949B1 (de) * | 1973-12-28 | 1976-10-08 | Radiotechnique Compelec | |
US4096025A (en) * | 1974-02-21 | 1978-06-20 | The United States Of America As Represented By The Secretary Of The Army | Method of orienting seed crystals in a melt, and product obtained thereby |
US4050905A (en) * | 1975-05-27 | 1977-09-27 | The Harshaw Chemical Company | Growth of doped crystals |
US4412577A (en) * | 1982-01-27 | 1983-11-01 | United Technologies Corporation | Control of seed melt-back during directional solidification of metals |
-
1987
- 1987-10-26 US US07/113,546 patent/US4853066A/en not_active Expired - Fee Related
- 1987-11-02 DE DE87309668T patent/DE3785638T2/de not_active Expired - Fee Related
- 1987-11-02 EP EP87309668A patent/EP0266227B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0266227B1 (de) | 1993-04-28 |
EP0266227A3 (en) | 1990-02-07 |
EP0266227A2 (de) | 1988-05-04 |
DE3785638T2 (de) | 1993-11-18 |
US4853066A (en) | 1989-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |