DE3727901A1 - Zerstaeubungskathode nach dem magnetronprinzip - Google Patents

Zerstaeubungskathode nach dem magnetronprinzip

Info

Publication number
DE3727901A1
DE3727901A1 DE19873727901 DE3727901A DE3727901A1 DE 3727901 A1 DE3727901 A1 DE 3727901A1 DE 19873727901 DE19873727901 DE 19873727901 DE 3727901 A DE3727901 A DE 3727901A DE 3727901 A1 DE3727901 A1 DE 3727901A1
Authority
DE
Germany
Prior art keywords
electromagnet
sputtering cathode
magnet
cathode according
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19873727901
Other languages
German (de)
English (en)
Other versions
DE3727901C2 (enExample
Inventor
Bernd Wolf
Peter Dipl Phys Dr Wirz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE19873727901 priority Critical patent/DE3727901A1/de
Priority to US07/111,207 priority patent/US4810346A/en
Publication of DE3727901A1 publication Critical patent/DE3727901A1/de
Application granted granted Critical
Publication of DE3727901C2 publication Critical patent/DE3727901C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE19873727901 1987-08-21 1987-08-21 Zerstaeubungskathode nach dem magnetronprinzip Granted DE3727901A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19873727901 DE3727901A1 (de) 1987-08-21 1987-08-21 Zerstaeubungskathode nach dem magnetronprinzip
US07/111,207 US4810346A (en) 1987-08-21 1987-10-21 Magnetron type sputtering cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19873727901 DE3727901A1 (de) 1987-08-21 1987-08-21 Zerstaeubungskathode nach dem magnetronprinzip

Publications (2)

Publication Number Publication Date
DE3727901A1 true DE3727901A1 (de) 1989-03-02
DE3727901C2 DE3727901C2 (enExample) 1992-11-26

Family

ID=6334189

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19873727901 Granted DE3727901A1 (de) 1987-08-21 1987-08-21 Zerstaeubungskathode nach dem magnetronprinzip

Country Status (2)

Country Link
US (1) US4810346A (enExample)
DE (1) DE3727901A1 (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3908252A1 (de) * 1989-03-14 1990-09-20 Leybold Ag Zerstaeubungskathode nach dem magnetron-prinzip
EP0461525A1 (de) * 1990-06-13 1991-12-18 Leybold Aktiengesellschaft Verfahren und Vorrichtung zum Beschichten von Substraten mittels einer Magnetronkatode
EP0482891A3 (en) * 1990-10-22 1992-06-17 Varian Associates, Inc. High vacuum magnetron sputter source
DE4137483A1 (de) * 1991-11-14 1993-05-19 Leybold Ag Kathode zum beschichten eines substrats
EP0549854A1 (de) * 1991-12-28 1993-07-07 Leybold Aktiengesellschaft Kathode zum Beschichten eines Substrats
US5482610A (en) * 1991-11-14 1996-01-09 Leybold Aktiengesellschaft Cathode for coating a substrate
DE10234858A1 (de) * 2002-07-31 2004-02-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Einrichtung zur Erzeugung einer Magnetron-Entladung
WO2004013374A3 (de) * 2002-07-31 2004-12-09 Fraunhofer Ges Forschung Einrichtung und verfahren zum beschichten von substraten

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4971674A (en) * 1986-08-06 1990-11-20 Ube Industries, Ltd. Magnetron sputtering method and apparatus
US4957605A (en) * 1989-04-17 1990-09-18 Materials Research Corporation Method and apparatus for sputter coating stepped wafers
US5126028A (en) * 1989-04-17 1992-06-30 Materials Research Corporation Sputter coating process control method and apparatus
DE3929695C2 (de) * 1989-09-07 1996-12-19 Leybold Ag Vorrichtung zum Beschichten eines Substrats
US5182001A (en) * 1990-06-13 1993-01-26 Leybold Aktiengesellschaft Process for coating substrates by means of a magnetron cathode
WO1992017621A1 (en) * 1991-04-04 1992-10-15 Conner Peripherals, Inc. Apparatus and method for high throughput sputtering
US5262028A (en) * 1992-06-01 1993-11-16 Sierra Applied Sciences, Inc. Planar magnetron sputtering magnet assembly
US5630916A (en) * 1993-03-02 1997-05-20 Cvc Products, Inc. Magnetic orienting device for thin film deposition and method of use
DE4329155A1 (de) * 1993-08-30 1995-03-02 Bloesch W Ag Magnetfeldkathode
JP3403550B2 (ja) * 1995-06-29 2003-05-06 松下電器産業株式会社 スパッタリング装置とスパッタリング方法
US5705044A (en) * 1995-08-07 1998-01-06 Akashic Memories Corporation Modular sputtering machine having batch processing and serial thin film sputtering
US5830336A (en) * 1995-12-05 1998-11-03 Minnesota Mining And Manufacturing Company Sputtering of lithium
DE19747923C2 (de) * 1997-10-30 2002-09-12 Leybold Systems Gmbh Sputterkathode
US6106682A (en) * 1998-05-22 2000-08-22 Cvc Products, Inc. Thin-film processing electromagnet for low-skew magnetic orientation
US6042707A (en) * 1998-05-22 2000-03-28 Cvc Products, Inc. Multiple-coil electromagnet for magnetically orienting thin films
US5980707A (en) * 1998-12-18 1999-11-09 Sierra Applied Sciences, Inc. Apparatus and method for a magnetron cathode with moving magnet assembly
US6290825B1 (en) * 1999-02-12 2001-09-18 Applied Materials, Inc. High-density plasma source for ionized metal deposition
US6306265B1 (en) 1999-02-12 2001-10-23 Applied Materials, Inc. High-density plasma for ionized metal deposition capable of exciting a plasma wave
US6497802B2 (en) 1999-02-12 2002-12-24 Applied Materials, Inc. Self ionized plasma sputtering
US6183614B1 (en) 1999-02-12 2001-02-06 Applied Materials, Inc. Rotating sputter magnetron assembly
US7226049B2 (en) * 2003-06-06 2007-06-05 Xerox Corporation Universal flexible plural printer to plural finisher sheet integration system
EP1873809A1 (en) * 2006-06-26 2008-01-02 M2 Engineering AB (publ) Sputtering device
CN101796213B (zh) * 2007-08-30 2012-07-11 皇家飞利浦电子股份有限公司 溅射系统
US9782949B2 (en) 2008-05-30 2017-10-10 Corning Incorporated Glass laminated articles and layered articles
KR20140004785A (ko) * 2011-05-30 2014-01-13 히타치 긴조쿠 가부시키가이샤 레이스트랙 형상의 마그네트론 스퍼터링용 자장 발생 장치
US8685214B1 (en) 2011-09-30 2014-04-01 WD Media, LLC Magnetic shunting pads for optimizing target erosion in sputtering processes
US9347129B2 (en) 2011-12-09 2016-05-24 Seagate Technology Llc Interchangeable magnet pack
US10573500B2 (en) 2011-12-09 2020-02-25 Seagate Technology Llc Interchangeable magnet pack
CN103556122B (zh) * 2013-10-23 2017-01-18 苏州矩阵光电有限公司 一种自适应磁场调整型磁控溅射镀膜设备及其镀膜方法
KR101924143B1 (ko) * 2017-03-31 2018-11-30 한국알박(주) 자석 구조체, 자석 유닛 및 이를 포함하는 마그네트론 스퍼터링 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2920780A1 (de) * 1978-08-21 1980-03-06 Vac Tec Syst Zerstaeubungsvorrichtung mit magnetischer verstaerkung
DE3009836A1 (de) * 1979-03-19 1980-09-25 Delbar Products Verfahren und vorrichtung zum verlaengern der nutzungsdauer von zerstaeubungskathoden
US4401539A (en) * 1981-01-30 1983-08-30 Hitachi, Ltd. Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3884793A (en) * 1971-09-07 1975-05-20 Telic Corp Electrode type glow discharge apparatus
DE3047113A1 (de) * 1980-12-13 1982-07-29 Leybold-Heraeus GmbH, 5000 Köln Katodenanordnung und regelverfahren fuer katodenzerstaeubungsanlagen mit einem magnetsystem zur erhoehung der zerstaeubungsrate
US4444635A (en) * 1981-07-22 1984-04-24 Hitachi, Ltd. Film forming method
JPS59208072A (ja) * 1983-05-12 1984-11-26 Matsushita Electric Ind Co Ltd スパツタリング装置
DE3442206A1 (de) * 1983-12-05 1985-07-11 Leybold-Heraeus GmbH, 5000 Köln Magnetronkatode zum zerstaeuben ferromagnetischer targets
EP0144838B1 (de) * 1983-12-05 1989-10-11 Leybold Aktiengesellschaft Magnetronkatode zum Zerstäuben ferromagnetischer Targets
JPH06114194A (ja) * 1992-10-06 1994-04-26 Matsushita Electric Ind Co Ltd 電気寝具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2920780A1 (de) * 1978-08-21 1980-03-06 Vac Tec Syst Zerstaeubungsvorrichtung mit magnetischer verstaerkung
DE3009836A1 (de) * 1979-03-19 1980-09-25 Delbar Products Verfahren und vorrichtung zum verlaengern der nutzungsdauer von zerstaeubungskathoden
US4401539A (en) * 1981-01-30 1983-08-30 Hitachi, Ltd. Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3908252A1 (de) * 1989-03-14 1990-09-20 Leybold Ag Zerstaeubungskathode nach dem magnetron-prinzip
EP0461525A1 (de) * 1990-06-13 1991-12-18 Leybold Aktiengesellschaft Verfahren und Vorrichtung zum Beschichten von Substraten mittels einer Magnetronkatode
EP0482891A3 (en) * 1990-10-22 1992-06-17 Varian Associates, Inc. High vacuum magnetron sputter source
DE4137483A1 (de) * 1991-11-14 1993-05-19 Leybold Ag Kathode zum beschichten eines substrats
US5482610A (en) * 1991-11-14 1996-01-09 Leybold Aktiengesellschaft Cathode for coating a substrate
EP0549854A1 (de) * 1991-12-28 1993-07-07 Leybold Aktiengesellschaft Kathode zum Beschichten eines Substrats
DE10234858A1 (de) * 2002-07-31 2004-02-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Einrichtung zur Erzeugung einer Magnetron-Entladung
WO2004013374A3 (de) * 2002-07-31 2004-12-09 Fraunhofer Ges Forschung Einrichtung und verfahren zum beschichten von substraten

Also Published As

Publication number Publication date
US4810346A (en) 1989-03-07
DE3727901C2 (enExample) 1992-11-26

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8339 Ceased/non-payment of the annual fee