ATE530679T1 - Sputtersystem - Google Patents

Sputtersystem

Info

Publication number
ATE530679T1
ATE530679T1 AT08807390T AT08807390T ATE530679T1 AT E530679 T1 ATE530679 T1 AT E530679T1 AT 08807390 T AT08807390 T AT 08807390T AT 08807390 T AT08807390 T AT 08807390T AT E530679 T1 ATE530679 T1 AT E530679T1
Authority
AT
Austria
Prior art keywords
plasma
sputtering
substrate
well
substrate holder
Prior art date
Application number
AT08807390T
Other languages
English (en)
Inventor
Georg Henninger
Berno Hunsche
Konrad Sell
Manfred Ruske
Thomas Diederich
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE530679T1 publication Critical patent/ATE530679T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32678—Electron cyclotron resonance

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
AT08807390T 2007-08-30 2008-08-21 Sputtersystem ATE530679T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07115308 2007-08-30
PCT/IB2008/053354 WO2009027905A2 (en) 2007-08-30 2008-08-21 Sputtering system

Publications (1)

Publication Number Publication Date
ATE530679T1 true ATE530679T1 (de) 2011-11-15

Family

ID=40280797

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08807390T ATE530679T1 (de) 2007-08-30 2008-08-21 Sputtersystem

Country Status (6)

Country Link
US (1) US20110233049A1 (de)
EP (1) EP2188411B1 (de)
JP (1) JP2010538157A (de)
CN (1) CN101796213B (de)
AT (1) ATE530679T1 (de)
WO (1) WO2009027905A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104505327B (zh) * 2014-12-19 2018-03-27 中国科学院嘉兴微电子仪器与设备工程中心 一种应用于等离子体设备的腔室结构及等离子体设备
US10153133B2 (en) 2015-03-23 2018-12-11 Applied Materials, Inc. Plasma reactor having digital control over rotation frequency of a microwave field with direct up-conversion
CN105624624B (zh) * 2016-02-25 2018-02-13 深圳大学 一种ecr等离子体溅射装置及其溅射方法
GB2588932B (en) 2019-11-15 2022-08-24 Dyson Technology Ltd Method and apparatus for sputter deposition of target material to a substrate
GB2588944B (en) 2019-11-15 2022-08-17 Dyson Technology Ltd Method of forming crystalline layer, method of forming a battery half cell
GB2588939B (en) 2019-11-15 2022-12-28 Dyson Technology Ltd Sputter deposition apparatus and method
GB2588935B (en) 2019-11-15 2022-09-07 Dyson Technology Ltd Method and apparatus for sputter deposition of target material to a substrate
GB2588949B (en) * 2019-11-15 2022-09-07 Dyson Technology Ltd Method and apparatus for sputter deposition
GB2588946B (en) 2019-11-15 2022-08-17 Dyson Technology Ltd Method of manufacturing crystalline material from different materials

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3853890T2 (de) * 1987-01-19 1995-10-19 Hitachi Ltd Mit einem Plasma arbeitendes Gerät.
DE3727901A1 (de) * 1987-08-21 1989-03-02 Leybold Ag Zerstaeubungskathode nach dem magnetronprinzip
DE3803355A1 (de) * 1988-02-05 1989-08-17 Leybold Ag Teilchenquelle fuer eine reaktive ionenstrahlaetz- oder plasmadepositionsanlage
DE3920835C2 (de) * 1989-06-24 1997-12-18 Leybold Ag Einrichtung zum Beschichten von Substraten
ATE147890T1 (de) * 1991-05-31 1997-02-15 Deposition Sciences Inc Sputteranlage
US5198725A (en) * 1991-07-12 1993-03-30 Lam Research Corporation Method of producing flat ecr layer in microwave plasma device and apparatus therefor
US5306985A (en) * 1992-07-17 1994-04-26 Sematech, Inc. ECR apparatus with magnetic coil for plasma refractive index control
WO1995000677A1 (en) * 1993-06-17 1995-01-05 Deposition Sciences, Inc. Sputtering device
US6402902B1 (en) * 1995-02-13 2002-06-11 Deposition Sciences, Inc. Apparatus and method for a reliable return current path for sputtering processes
EP0908535B1 (de) * 1997-10-08 2003-07-23 RECHERCHE ET DEVELOPPEMENT DU GROUPE COCKERILL SAMBRE, en abrégé: RD-CS Verfahren zum Reinigen eines Substrats und Vorrichtung zur Durchführung des Verfahrens
JP3735461B2 (ja) * 1998-03-27 2006-01-18 株式会社シンクロン 複合金属の化合物薄膜形成方法及びその薄膜形成装置
DE19824364A1 (de) * 1998-05-30 1999-12-02 Bosch Gmbh Robert Verfahren zum Aufbringen eines Verschleißschutz-Schichtsystems mit optischen Eigenschaften auf Oberflächen
JP2001176698A (ja) * 1999-12-21 2001-06-29 Hitachi Ltd プラズマ処理装置
JP3774353B2 (ja) * 2000-02-25 2006-05-10 株式会社シンクロン 金属化合物薄膜の形成方法およびその形成装置
SE525231C2 (sv) * 2001-06-14 2005-01-11 Chemfilt R & D Ab Förfarande och anordning för att alstra plasma
US6635124B1 (en) * 2002-08-29 2003-10-21 General Electric Company Method of depositing a thermal barrier coating
WO2004027825A2 (en) * 2002-09-19 2004-04-01 Applied Process Technologies, Inc. Beam plasma source
EP1680527B1 (de) * 2003-10-07 2012-03-21 Deposition Sciences, Inc. Vorrichtung und verfahren zur schnellen abscheidung von rutil-titandioxid
US7095179B2 (en) * 2004-02-22 2006-08-22 Zond, Inc. Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
DE112005002056B4 (de) * 2004-08-30 2021-09-23 Ulvac, Inc. Filmformungsvorrichtung
WO2007110323A1 (en) * 2006-03-28 2007-10-04 Nv Bekaert Sa Coating apparatus

Also Published As

Publication number Publication date
EP2188411B1 (de) 2011-10-26
CN101796213B (zh) 2012-07-11
WO2009027905A3 (en) 2009-04-30
EP2188411A2 (de) 2010-05-26
WO2009027905A2 (en) 2009-03-05
JP2010538157A (ja) 2010-12-09
US20110233049A1 (en) 2011-09-29
CN101796213A (zh) 2010-08-04

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Legal Events

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