DE3716002C2 - Verfahren zur Herstellung eines Siliciumcarbid-Sinterkörpers - Google Patents

Verfahren zur Herstellung eines Siliciumcarbid-Sinterkörpers

Info

Publication number
DE3716002C2
DE3716002C2 DE3716002A DE3716002A DE3716002C2 DE 3716002 C2 DE3716002 C2 DE 3716002C2 DE 3716002 A DE3716002 A DE 3716002A DE 3716002 A DE3716002 A DE 3716002A DE 3716002 C2 DE3716002 C2 DE 3716002C2
Authority
DE
Germany
Prior art keywords
silicon carbide
sintered body
boron
producing
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3716002A
Other languages
German (de)
English (en)
Other versions
DE3716002A1 (de
Inventor
Nobuaki Urasato
Minoru Takamizawa
Akira Hayashida
Hiromi Ohsaki
Jiyunitirow Maruta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of DE3716002A1 publication Critical patent/DE3716002A1/de
Application granted granted Critical
Publication of DE3716002C2 publication Critical patent/DE3716002C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10W99/00—
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE3716002A 1986-06-05 1987-05-13 Verfahren zur Herstellung eines Siliciumcarbid-Sinterkörpers Expired - Fee Related DE3716002C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61130914A JPS62288167A (ja) 1986-06-05 1986-06-05 炭化けい素焼結体の製造方法

Publications (2)

Publication Number Publication Date
DE3716002A1 DE3716002A1 (de) 1987-12-23
DE3716002C2 true DE3716002C2 (de) 1996-07-11

Family

ID=15045688

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3716002A Expired - Fee Related DE3716002C2 (de) 1986-06-05 1987-05-13 Verfahren zur Herstellung eines Siliciumcarbid-Sinterkörpers

Country Status (3)

Country Link
US (1) US5011639A (enExample)
JP (1) JPS62288167A (enExample)
DE (1) DE3716002C2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5571758A (en) * 1993-08-19 1996-11-05 General Electric Company Nitrogen-reacted silicon carbide material
DE19651798A1 (de) * 1996-11-22 1998-06-04 Deutsch Zentr Luft & Raumfahrt Reibeinheit
KR100477184B1 (ko) * 2002-05-17 2005-03-17 휴먼사이언스테크놀러지(주) 티타늄 이온박막을 갖는 탄화규소 소결체의 제조방법
JP4490304B2 (ja) * 2005-02-16 2010-06-23 株式会社ブリヂストン サセプタ
US7700202B2 (en) * 2006-02-16 2010-04-20 Alliant Techsystems Inc. Precursor formulation of a silicon carbide material
US7727919B2 (en) * 2007-10-29 2010-06-01 Saint-Gobain Ceramics & Plastics, Inc. High resistivity silicon carbide
US7989380B2 (en) * 2008-11-26 2011-08-02 Ceradyne, Inc. High resistivity SiC material with B, N and O as the only additions
DE102012012227B4 (de) 2011-06-30 2024-07-18 QSIL Ingenieurkeramik GmbH Herstellung dichter Siliziumcarbid-Sinterkörper mit gezielt einstellbarem elektrischem Widerstand und so erhältliche Siliciumcarbid-Sinterkörper
CN112745124A (zh) * 2020-12-31 2021-05-04 松山湖材料实验室 碳化硅陶瓷制品及其制备方法
FR3122423B3 (fr) * 2021-04-30 2023-09-08 Saint Gobain Ct Recherches Materiau fritte dense de carbure de silicium a tres faible resistivite electrique

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209474A (en) * 1977-08-31 1980-06-24 General Electric Company Process for preparing semiconducting silicon carbide sintered body
US4346049A (en) * 1978-05-01 1982-08-24 Kennecott Corporation Sintered alpha silicon carbide ceramic body having equiaxed microstructure
US4237085A (en) * 1979-03-19 1980-12-02 The Carborundum Company Method of producing a high density silicon carbide product
US4668452A (en) * 1980-02-26 1987-05-26 Ngk Spark Plug Co., Ltd. Process for producing silicon carbide heating elements
JPS57160970A (en) * 1981-03-27 1982-10-04 Omori Mamoru Silicon carbide sintered formed body and manufacture
JPS57209884A (en) * 1981-06-17 1982-12-23 Kobe Steel Ltd Manufacture of high strength silicon carbide sintered body
JPS6046912A (ja) * 1983-08-26 1985-03-14 Shin Etsu Chem Co Ltd 超微粒子状炭化けい素の製造方法

Also Published As

Publication number Publication date
JPS62288167A (ja) 1987-12-15
US5011639A (en) 1991-04-30
DE3716002A1 (de) 1987-12-23
JPH0329023B2 (enExample) 1991-04-22

Similar Documents

Publication Publication Date Title
DE3687817T2 (de) Siliziumcarbidsinterkoerper mit hohem elektrischem widerstand.
EP0114193B1 (de) Keramischer Träger
DE69721565T2 (de) Verfahren zur herstellung eines dichten keramischen werkstückes
DE69911309T2 (de) Siliciumnitridsinterkörper hoher Wärmeleitfähigkeit und Verfahren zum Herstellen desselben
DE2932789C2 (de) Polykristalline transparente Spinelsinterkörper und Verfahren zu deren Herstellung
DE69610673T2 (de) Gesinterte Aluminiumnitridkörper und ihr Herstellungsverfahren
KR100966459B1 (ko) 낮은 ｃｔｅ의 고도로 등방성인 흑연
DE3337630C2 (enExample)
DE69131247T2 (de) Wärmebehandlungsapparate für Halbleiter und hochreine Siliciumcarbidteile für die Apparate und Verfahren zu ihrer Herstellung
DE69530678T2 (de) Aluminiumnitrid-sinterkörper und herstellungsverfahren dafür
DE3716002C2 (de) Verfahren zur Herstellung eines Siliciumcarbid-Sinterkörpers
JPH02149459A (ja) スパッタリングターゲット及びその製造方法
DE3127649A1 (de) Dichtgesinterter siliciumcarbid-keramikkoerper
DE3037209A1 (de) Nickelenthaltende legierung zur verwendung als ofeneinsatzmaterial und ein verfahren zu ihrer waermebehandlung
DE2548740C2 (de) Verfahren zur Herstellung von Körpern aus Siliziumnitrid
DE2627856A1 (de) Gesinterter siliziumkarbid-koerper und verfahren zu dessen herstellung
DE3313836A1 (de) Roehrenbauteile
DE3538631A1 (de) Verfahren zur herstellung von hochfrequenzdielektrikum-keramiken
DE69223528T2 (de) Gesinterter, keramischer Verbundwerkstoff, Verfahren zu seiner Herstellung und denselben nutzender Schieber
DE2700208A1 (de) Polykristalliner siliziumnitrid- koerper und verfahren zu dessen herstellung
DE2923729C2 (enExample)
DE69703944T2 (de) Sinterkörper aus Aluminiumoxid und Verfahren zu ihrer Herstellung
EP0540821A1 (de) Verfahren zur Herstellung von Compositglaspulver beliebiger Körnung aus einem feinkörnigen Mehrkomponentengemisch
DE3874526T2 (de) Targetmaterial zur bildung eines supraleitenden films.
DE68915592T2 (de) Supraleitender Streifen mit internem Stressabsorber.

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee