DE3687041D1 - Maskenanordnung fuer vakuumbeschichtungsvorrichtungen. - Google Patents

Maskenanordnung fuer vakuumbeschichtungsvorrichtungen.

Info

Publication number
DE3687041D1
DE3687041D1 DE8686115835T DE3687041T DE3687041D1 DE 3687041 D1 DE3687041 D1 DE 3687041D1 DE 8686115835 T DE8686115835 T DE 8686115835T DE 3687041 T DE3687041 T DE 3687041T DE 3687041 D1 DE3687041 D1 DE 3687041D1
Authority
DE
Germany
Prior art keywords
vacuum coating
coating devices
mask arrangement
mask
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686115835T
Other languages
English (en)
Other versions
DE3687041T2 (de
Inventor
Katsuki Sagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Publication of DE3687041D1 publication Critical patent/DE3687041D1/de
Application granted granted Critical
Publication of DE3687041T2 publication Critical patent/DE3687041T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
DE8686115835T 1985-11-15 1986-11-14 Maskenanordnung fuer vakuumbeschichtungsvorrichtungen. Expired - Lifetime DE3687041T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60257017A JPS62116761A (ja) 1985-11-15 1985-11-15 マスキング装置

Publications (2)

Publication Number Publication Date
DE3687041D1 true DE3687041D1 (de) 1992-12-03
DE3687041T2 DE3687041T2 (de) 1993-03-25

Family

ID=17300574

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686115835T Expired - Lifetime DE3687041T2 (de) 1985-11-15 1986-11-14 Maskenanordnung fuer vakuumbeschichtungsvorrichtungen.

Country Status (4)

Country Link
US (1) US4745878A (de)
EP (1) EP0229914B1 (de)
JP (1) JPS62116761A (de)
DE (1) DE3687041T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4128340C2 (de) * 1991-08-27 1999-09-23 Leybold Ag Zerstäubungskathodenanordnung nach dem Magnetron-Prinzip für die Beschichtung einer kreisringförmigen Beschichtungsfläche
US5268085A (en) * 1992-04-24 1993-12-07 Itt Corporation Self-aligned sputter deposition masking device and method
DE4302851A1 (de) * 1993-02-02 1994-08-04 Leybold Ag Vorrichtung zum Anbringen und/oder Entfernen einer Maske an einem Substrat
DE4307382A1 (de) * 1993-03-09 1994-09-15 Leybold Ag Maske zum Abdecken des radial äußeren Bereichs einer scheibenförmigen Substratoberfläche
JP3398452B2 (ja) * 1994-01-19 2003-04-21 株式会社ソニー・ディスクテクノロジー スパッタリング装置
JPH08273207A (ja) * 1995-01-31 1996-10-18 Canon Inc 光情報記録媒体搬送用キヤリア、該キヤリアを用いた光情報記録媒体の製造方法及び製造装置
US5938891A (en) * 1996-02-27 1999-08-17 Origin Electric Company, Limited Disk bonding system
JPH1021586A (ja) * 1996-07-02 1998-01-23 Sony Corp Ｄｃスパッタリング装置
US5736194A (en) * 1996-11-05 1998-04-07 Federal-Hoffman, Inc. Method and apparatus for masking
TW422743B (en) * 1999-12-09 2001-02-21 Hon Hai Prec Ind Co Ltd Masking tool for painting the case of electronic devices
US6645299B2 (en) * 2001-09-18 2003-11-11 General Electric Company Method and assembly for masking
EP1388592B1 (de) * 2002-07-31 2010-08-25 Hilmar Bode Verfahren und Vorrichtung zur Isolierung eines Oberflächenbereichs eines Werkstücks
US7600471B2 (en) * 2005-05-10 2009-10-13 Westby Ronald K Hand proofer tool
US8720335B2 (en) * 2007-04-24 2014-05-13 Probity Engineering, Llc Offset hand proofer tool
WO2010014619A2 (en) 2008-07-28 2010-02-04 Integrity Engineering, Inc. Improvements to flexographic proofing tools and methods
TWI458557B (zh) * 2009-11-26 2014-11-01 Hon Hai Prec Ind Co Ltd 噴塗遮蔽結構及採用該結構之噴塗遮蔽方法
CN102166553A (zh) * 2011-05-02 2011-08-31 苏州工业园区高登威科技有限公司 用于转轴喷油机构的防护装置
GB2493525A (en) * 2011-08-06 2013-02-13 Ceram Res Ltd Applying coating material to part of an article
US9579680B2 (en) * 2013-01-31 2017-02-28 Wki Holding Company, Inc. Self-centering magnetic masking system
CN109225712B (zh) * 2017-05-31 2020-08-28 宁波方太厨具有限公司 吸油烟机集烟罩喷涂遮挡夹具
CN110819939B (zh) * 2019-11-25 2024-07-05 西安北方光电科技防务有限公司 一种光学零件环带真空镀膜工装
CN111647847B (zh) * 2020-07-30 2022-10-28 京东方科技集团股份有限公司 掩膜板、蒸镀装置及蒸镀方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3768440A (en) * 1972-07-25 1973-10-30 Gam Rad Stain system for membrane filters
US3897324A (en) * 1973-06-25 1975-07-29 Honeywell Inc Material deposition masking for microcircuit structures
JPS57173134A (en) * 1981-04-20 1982-10-25 Shogo Nagao Manufacture of thin reinforced plastic film
JPS59185051A (ja) * 1983-03-31 1984-10-20 Matsushita Electric Ind Co Ltd デイジタル信号記録再生デイスクの製造装置
JPS59200761A (ja) * 1983-04-28 1984-11-14 Toshiba Corp スパツタリングタ−ゲツト支持装置
JPS60150245A (ja) * 1984-01-13 1985-08-07 Matsushita Electric Ind Co Ltd ディジタル信号記録再生ディスクの製造方法

Also Published As

Publication number Publication date
JPS62116761A (ja) 1987-05-28
US4745878A (en) 1988-05-24
EP0229914A2 (de) 1987-07-29
JPH0373627B2 (de) 1991-11-22
DE3687041T2 (de) 1993-03-25
EP0229914A3 (en) 1988-09-28
EP0229914B1 (de) 1992-10-28

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Legal Events

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8364 No opposition during term of opposition