DE3677045D1 - P-i-n-photodiode mit niedrigem leckstrom. - Google Patents
P-i-n-photodiode mit niedrigem leckstrom.Info
- Publication number
- DE3677045D1 DE3677045D1 DE8686200725T DE3677045T DE3677045D1 DE 3677045 D1 DE3677045 D1 DE 3677045D1 DE 8686200725 T DE8686200725 T DE 8686200725T DE 3677045 T DE3677045 T DE 3677045T DE 3677045 D1 DE3677045 D1 DE 3677045D1
- Authority
- DE
- Germany
- Prior art keywords
- photodiode
- low leakage
- leakage
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8506753A FR2581482B1 (fr) | 1985-05-03 | 1985-05-03 | Photodiode pin a faible courant de fuite |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3677045D1 true DE3677045D1 (de) | 1991-02-28 |
Family
ID=9318932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686200725T Expired - Lifetime DE3677045D1 (de) | 1985-05-03 | 1986-04-29 | P-i-n-photodiode mit niedrigem leckstrom. |
Country Status (5)
Country | Link |
---|---|
US (2) | US4904608A (de) |
EP (1) | EP0201127B1 (de) |
JP (1) | JPH0770750B2 (de) |
DE (1) | DE3677045D1 (de) |
FR (1) | FR2581482B1 (de) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69032669T2 (de) * | 1989-02-27 | 1999-06-10 | Nippon Telegraph And Telephone Corp., Tokio/Tokyo | Verfahren zur Ansteuerung eines räumlichen Lichtmodulators |
US5223704A (en) * | 1992-03-31 | 1993-06-29 | At&T Bell Laboratories | Planar buried quantum well photodetector |
FR2701602B1 (fr) * | 1993-02-12 | 1995-03-31 | Thomson Csf | Détecteur thermique comprenant un isolant thermique en polymère expansé. |
JP3270278B2 (ja) * | 1994-12-15 | 2002-04-02 | 東芝電子エンジニアリング株式会社 | 半導体装置及びその製造方法 |
US6326649B1 (en) | 1999-01-13 | 2001-12-04 | Agere Systems, Inc. | Pin photodiode having a wide bandwidth |
AU2996400A (en) * | 1999-03-01 | 2000-09-21 | Sensors Unlimited Inc. | Doped structures for improved ingaas performance in imaging devices |
JP4084958B2 (ja) * | 2002-05-24 | 2008-04-30 | 日本オプネクスト株式会社 | 半導体受光装置の製造方法 |
US20040000675A1 (en) * | 2002-05-24 | 2004-01-01 | Opnext Japan, Inc. | Method for manufacturing avalanche photodiodes, avalanche photodiode, optical receiver module and optical receiving apparatus |
US6815790B2 (en) * | 2003-01-10 | 2004-11-09 | Rapiscan, Inc. | Position sensing detector for the detection of light within two dimensions |
US7468503B2 (en) * | 2003-05-02 | 2008-12-23 | Picometrix, Llc | Pin photodetector with mini-mesa contact layer |
US7256470B2 (en) * | 2005-03-16 | 2007-08-14 | Udt Sensors, Inc. | Photodiode with controlled current leakage |
US8519503B2 (en) * | 2006-06-05 | 2013-08-27 | Osi Optoelectronics, Inc. | High speed backside illuminated, front side contact photodiode array |
US7656001B2 (en) * | 2006-11-01 | 2010-02-02 | Udt Sensors, Inc. | Front-side illuminated, back-side contact double-sided PN-junction photodiode arrays |
US7057254B2 (en) * | 2003-05-05 | 2006-06-06 | Udt Sensors, Inc. | Front illuminated back side contact thin wafer detectors |
US7655999B2 (en) * | 2006-09-15 | 2010-02-02 | Udt Sensors, Inc. | High density photodiodes |
US8120023B2 (en) | 2006-06-05 | 2012-02-21 | Udt Sensors, Inc. | Low crosstalk, front-side illuminated, back-side contact photodiode array |
US7279731B1 (en) * | 2006-05-15 | 2007-10-09 | Udt Sensors, Inc. | Edge illuminated photodiodes |
US8164151B2 (en) * | 2007-05-07 | 2012-04-24 | Osi Optoelectronics, Inc. | Thin active layer fishbone photodiode and method of manufacturing the same |
US8035183B2 (en) * | 2003-05-05 | 2011-10-11 | Udt Sensors, Inc. | Photodiodes with PN junction on both front and back sides |
US8686529B2 (en) * | 2010-01-19 | 2014-04-01 | Osi Optoelectronics, Inc. | Wavelength sensitive sensor photodiodes |
US7709921B2 (en) | 2008-08-27 | 2010-05-04 | Udt Sensors, Inc. | Photodiode and photodiode array with improved performance characteristics |
US7242069B2 (en) * | 2003-05-05 | 2007-07-10 | Udt Sensors, Inc. | Thin wafer detectors with improved radiation damage and crosstalk characteristics |
US7880258B2 (en) * | 2003-05-05 | 2011-02-01 | Udt Sensors, Inc. | Thin wafer detectors with improved radiation damage and crosstalk characteristics |
US7576369B2 (en) * | 2005-10-25 | 2009-08-18 | Udt Sensors, Inc. | Deep diffused thin photodiodes |
US7259377B2 (en) * | 2005-12-15 | 2007-08-21 | General Electric Company | Diode design to reduce the effects of radiation damage |
US9178092B2 (en) | 2006-11-01 | 2015-11-03 | Osi Optoelectronics, Inc. | Front-side illuminated, back-side contact double-sided PN-junction photodiode arrays |
US7863647B1 (en) * | 2007-03-19 | 2011-01-04 | Northrop Grumman Systems Corporation | SiC avalanche photodiode with improved edge termination |
KR100927417B1 (ko) * | 2007-09-27 | 2009-11-19 | 삼성전기주식회사 | 노이즈를 저감시키기 위한 핑거 타입 포토다이오드 및 그제조방법 |
US20100053802A1 (en) * | 2008-08-27 | 2010-03-04 | Masaki Yamashita | Low Power Disk-Drive Motor Driver |
US8415713B2 (en) * | 2008-02-25 | 2013-04-09 | National Institute Of Advanced Industrial Science And Technology | Photo-field effect transistor and its production method |
US7868428B2 (en) * | 2008-03-14 | 2011-01-11 | M/A-Com Technology Solutions Holdings, Inc. | PIN diode with improved power limiting |
WO2010031011A2 (en) | 2008-09-15 | 2010-03-18 | Udt Sensors, Inc. | Thin active layer fishbone photodiode with a shallow n+ layer and method of manufacturing the same |
US8530933B2 (en) * | 2008-10-10 | 2013-09-10 | National Institute Of Advanced Industrial Science And Technology | Photo transistor |
US8072041B2 (en) * | 2009-04-08 | 2011-12-06 | Finisar Corporation | Passivated optical detectors with full protection layer |
US8399909B2 (en) | 2009-05-12 | 2013-03-19 | Osi Optoelectronics, Inc. | Tetra-lateral position sensing detector |
JP5942068B2 (ja) | 2010-01-25 | 2016-06-29 | アイアールスペック株式会社 | 化合物半導体受光素子アレイ |
US9425341B2 (en) * | 2012-10-08 | 2016-08-23 | Agency For Science, Technology And Research | P-I-N photodiode with dopant diffusion barrier layer |
US8912615B2 (en) | 2013-01-24 | 2014-12-16 | Osi Optoelectronics, Inc. | Shallow junction photodiode for detecting short wavelength light |
JP6115890B2 (ja) * | 2013-09-13 | 2017-04-19 | 住友電気工業株式会社 | 受光素子、その製造方法、および光センサ装置 |
EP3050128A4 (de) | 2013-09-25 | 2017-04-05 | Princeton Infrared Technologies, Inc. | Rauscharmes ingaas-fotodiodenarray |
EP3586365A1 (de) | 2017-02-23 | 2020-01-01 | IRIS Industries SA | Kurzwelleninfrarotdetektoranordnung und verfahren zur herstellung davon |
CN110176507B (zh) * | 2019-05-31 | 2020-08-14 | 厦门市三安集成电路有限公司 | 一种台面pin的钝化结构和光电二极管及其制备方法 |
US11742309B2 (en) * | 2020-08-21 | 2023-08-29 | Micron Technology, Inc. | Bump coplanarity for semiconductor device assembly and methods of manufacturing the same |
US11532759B2 (en) * | 2021-01-27 | 2022-12-20 | Taiwan Semiconductor Manufacturing Company Limited | Capping structures for germanium-containing photovoltaic components and methods of forming the same |
CN117476816B (zh) * | 2023-12-28 | 2024-03-26 | 苏州焜原光电有限公司 | 分子束外延生长InGaAs/InP的界面处理方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3886579A (en) * | 1972-07-28 | 1975-05-27 | Hitachi Ltd | Avalanche photodiode |
US4258375A (en) * | 1979-04-09 | 1981-03-24 | Massachusetts Institute Of Technology | Gax In1-x Asy P1-y /InP Avalanche photodiode and method for its fabrication |
DE3172668D1 (en) * | 1980-07-08 | 1985-11-21 | Fujitsu Ltd | Avalanche photodiodes |
JPS5793584A (en) * | 1980-12-02 | 1982-06-10 | Fujitsu Ltd | Semiconductor photoreceiving element |
JPS5793585A (en) * | 1980-12-02 | 1982-06-10 | Fujitsu Ltd | Semiconductor photoreceiving element |
GB8322235D0 (en) * | 1983-08-18 | 1983-09-21 | Standard Telephones Cables Ltd | Photodetector |
US4651187A (en) * | 1984-03-22 | 1987-03-17 | Nec Corporation | Avalanche photodiode |
US4586066A (en) * | 1984-04-10 | 1986-04-29 | Rca Inc. | Avalanche photodetector |
JPS611064A (ja) * | 1984-05-31 | 1986-01-07 | Fujitsu Ltd | 半導体受光装置 |
-
1985
- 1985-05-03 FR FR8506753A patent/FR2581482B1/fr not_active Expired
-
1986
- 1986-04-29 DE DE8686200725T patent/DE3677045D1/de not_active Expired - Lifetime
- 1986-04-29 EP EP86200725A patent/EP0201127B1/de not_active Expired - Lifetime
- 1986-04-30 JP JP61098399A patent/JPH0770750B2/ja not_active Expired - Lifetime
-
1989
- 1989-01-17 US US07/297,821 patent/US4904608A/en not_active Expired - Lifetime
- 1989-01-17 US US07/298,201 patent/US4999696A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0201127B1 (de) | 1991-01-23 |
FR2581482B1 (fr) | 1987-07-10 |
US4999696A (en) | 1991-03-12 |
FR2581482A1 (fr) | 1986-11-07 |
JPS61255075A (ja) | 1986-11-12 |
JPH0770750B2 (ja) | 1995-07-31 |
EP0201127A1 (de) | 1986-11-12 |
US4904608A (en) | 1990-02-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N |
|
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |