DE3650059D1 - Photodetektoranordnung zum messen des polarisierungszustands von licht. - Google Patents

Photodetektoranordnung zum messen des polarisierungszustands von licht.

Info

Publication number
DE3650059D1
DE3650059D1 DE3650059T DE3650059T DE3650059D1 DE 3650059 D1 DE3650059 D1 DE 3650059D1 DE 3650059 T DE3650059 T DE 3650059T DE 3650059 T DE3650059 T DE 3650059T DE 3650059 D1 DE3650059 D1 DE 3650059D1
Authority
DE
Germany
Prior art keywords
measuring
light
polarization state
photodetector arrangement
photodetector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3650059T
Other languages
English (en)
Other versions
DE3650059T2 (de
Inventor
Rasheed Azzam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Research Corp Technologies Inc
Original Assignee
Research Corp Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Corp Technologies Inc filed Critical Research Corp Technologies Inc
Application granted granted Critical
Publication of DE3650059D1 publication Critical patent/DE3650059D1/de
Publication of DE3650059T2 publication Critical patent/DE3650059T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
DE3650059T 1985-06-21 1986-06-18 Photodetektoranordnung zum messen des polarisierungszustands von licht. Expired - Lifetime DE3650059T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/747,611 US4681450A (en) 1985-06-21 1985-06-21 Photodetector arrangement for measuring the state of polarization of light
PCT/US1986/001316 WO1986007631A1 (en) 1985-06-21 1986-06-18 Photodetector arrangement for measuring the state of polarization of light

Publications (2)

Publication Number Publication Date
DE3650059D1 true DE3650059D1 (de) 1994-10-13
DE3650059T2 DE3650059T2 (de) 1995-04-27

Family

ID=25005864

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3650059T Expired - Lifetime DE3650059T2 (de) 1985-06-21 1986-06-18 Photodetektoranordnung zum messen des polarisierungszustands von licht.

Country Status (6)

Country Link
US (2) US4681450A (de)
EP (1) EP0233215B1 (de)
JP (1) JPH0778456B2 (de)
CA (1) CA1272042C (de)
DE (1) DE3650059T2 (de)
WO (1) WO1986007631A1 (de)

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US6108091A (en) * 1997-05-28 2000-08-22 Lam Research Corporation Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
US6146248A (en) * 1997-05-28 2000-11-14 Lam Research Corporation Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
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US5815270A (en) * 1997-07-29 1998-09-29 Board Of Supervisors Of Louisiana State University And Agricultural And Mechnical College In-line fiber-optic polarimeter using a fused 1x5 star coupler
US6300954B1 (en) 1997-09-12 2001-10-09 Meiryo Tekunika Kabushiki Kaisha Methods and apparatus for detecting liquid crystal display parameters using stokes parameters
US6134011A (en) * 1997-09-22 2000-10-17 Hdi Instrumentation Optical measurement system using polarized light
JP4629869B2 (ja) 1998-02-20 2011-02-09 ハインズ インスツルメンツ インコーポレイテッド 複屈折特性測定方法および装置
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DE19953527B4 (de) * 1999-11-05 2006-02-02 Schott Ag Verfahren und Vorrichtung zur automatischen Messung der Spannungsdoppelbrechung mit rotierendem Analysator
DE19953528B4 (de) * 1999-11-05 2010-10-07 Schott Ag Vorrichtung und Verfahren zur automatischen Messung der Spannungsdoppelbrechung mit feststehendem Analysator
US6268914B1 (en) 2000-01-14 2001-07-31 Hinds Instruments, Inc. Calibration Process For Birefringence Measurement System
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US6621067B2 (en) * 2000-03-03 2003-09-16 Exfo Electro-Optical Engineering Inc. Polarization independent photodetector device and method of making same
US6373614B1 (en) 2000-08-31 2002-04-16 Cambridge Research Instrumentation Inc. High performance polarization controller and polarization sensor
US6717706B2 (en) * 2000-08-31 2004-04-06 Cambridge Research And Instrumentation, Inc. State of polarization detector
US6795184B1 (en) * 2001-04-06 2004-09-21 J.A. Woollam Co., Inc Odd bounce image rotation system in ellipsometer systems
US6816261B2 (en) * 2001-05-15 2004-11-09 Optellios, Inc. Polarization analysis unit, calibration method and optimization therefor
JP4249608B2 (ja) * 2001-06-18 2009-04-02 ハインズ インスツルメンツ インコーポレイテッド 深紫外波長での複屈折測定
US20030075676A1 (en) * 2001-10-24 2003-04-24 Bernard Ruchet Apparatus for measuring state of polarization of a lightwave
US6674532B2 (en) 2001-11-02 2004-01-06 Vandelden Jay S. Interferometric polarization interrogating filter assembly and method
JP2003294531A (ja) * 2002-03-28 2003-10-15 Anritsu Corp 偏波解析器
US7116419B1 (en) 2002-11-15 2006-10-03 Purdue Research Foundation Wavelength-parallel polarization measurement systems and methods
JP4455024B2 (ja) 2002-12-13 2010-04-21 キヤノン株式会社 複屈折測定装置
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DE10347978B4 (de) * 2003-10-15 2006-03-02 Raylase Ag Polarisationsmeßeinrichtung und Verfahren zur Bestimmung der Polarisation eines Laserstrahls
US7206066B2 (en) * 2004-03-19 2007-04-17 Kla-Tencor Technologies Corporation Reflectance surface analyzer
US7206069B2 (en) * 2004-03-29 2007-04-17 Lucent Technologies Inc. Optical analyzers of polarization properties
US8189193B1 (en) 2004-04-23 2012-05-29 J.A. Woollam Co., Inc. System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
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US20070064572A1 (en) * 2005-07-27 2007-03-22 Polarizonics Corporation Optical data encoding and detection
US7370525B1 (en) 2006-10-31 2008-05-13 Swan International Sensors Pty. Ltd. Inflight ice detection system
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US7800755B1 (en) 2007-07-02 2010-09-21 The United States Of America As Represented By The Secretary Of The Navy High-speed polarimeter having a multi-wavelength source
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DE102013200394A1 (de) * 2013-01-14 2014-07-17 Carl Zeiss Smt Gmbh Polarisationsmessvorrichtung, Lithographieanlage, Messanordnung, und Verfahren zur Polarisationsmessung
US9354118B2 (en) 2014-02-06 2016-05-31 Film Sense, LLC Multiple wavelength ellipsometer system and related method
IL253739B (en) 2017-07-31 2021-01-31 Israel Aerospace Ind Ltd Baldness detector

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Also Published As

Publication number Publication date
JPH0778456B2 (ja) 1995-08-23
EP0233215B1 (de) 1994-09-07
US4725145A (en) 1988-02-16
CA1272042A (en) 1990-07-31
WO1986007631A1 (en) 1986-12-31
EP0233215A4 (de) 1990-01-08
DE3650059T2 (de) 1995-04-27
EP0233215A1 (de) 1987-08-26
CA1272042C (en) 1990-07-31
US4681450A (en) 1987-07-21
JPS63500056A (ja) 1988-01-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition