DE3628847C2 - Heißkathoden-Ionisationsmanometer - Google Patents

Heißkathoden-Ionisationsmanometer

Info

Publication number
DE3628847C2
DE3628847C2 DE3628847A DE3628847A DE3628847C2 DE 3628847 C2 DE3628847 C2 DE 3628847C2 DE 3628847 A DE3628847 A DE 3628847A DE 3628847 A DE3628847 A DE 3628847A DE 3628847 C2 DE3628847 C2 DE 3628847C2
Authority
DE
Germany
Prior art keywords
cathode
electrode
ionization manometer
manometer according
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3628847A
Other languages
German (de)
English (en)
Other versions
DE3628847A1 (de
Inventor
Guenter Dr Haas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften
Priority to DE3628847A priority Critical patent/DE3628847C2/de
Priority to US07/072,672 priority patent/US4792763A/en
Priority to FR8711553A priority patent/FR2603103B3/fr
Priority to GB8719747A priority patent/GB2195495B/en
Priority to JP1987128142U priority patent/JPH083960Y2/ja
Publication of DE3628847A1 publication Critical patent/DE3628847A1/de
Application granted granted Critical
Publication of DE3628847C2 publication Critical patent/DE3628847C2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electron Sources, Ion Sources (AREA)
DE3628847A 1986-08-25 1986-08-25 Heißkathoden-Ionisationsmanometer Expired - Lifetime DE3628847C2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE3628847A DE3628847C2 (de) 1986-08-25 1986-08-25 Heißkathoden-Ionisationsmanometer
US07/072,672 US4792763A (en) 1986-08-25 1987-07-13 Hot cathode ionization pressure gauge
FR8711553A FR2603103B3 (fr) 1986-08-25 1987-08-13 Manometre a ionisation a cathode chaude
GB8719747A GB2195495B (en) 1986-08-25 1987-08-20 Hot cathode ionization manometer
JP1987128142U JPH083960Y2 (ja) 1986-08-25 1987-08-25 高温カソ−ドイオン化圧力ゲ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3628847A DE3628847C2 (de) 1986-08-25 1986-08-25 Heißkathoden-Ionisationsmanometer

Publications (2)

Publication Number Publication Date
DE3628847A1 DE3628847A1 (de) 1988-03-03
DE3628847C2 true DE3628847C2 (de) 1995-12-14

Family

ID=6308132

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3628847A Expired - Lifetime DE3628847C2 (de) 1986-08-25 1986-08-25 Heißkathoden-Ionisationsmanometer

Country Status (5)

Country Link
US (1) US4792763A (enExample)
JP (1) JPH083960Y2 (enExample)
DE (1) DE3628847C2 (enExample)
FR (1) FR2603103B3 (enExample)
GB (1) GB2195495B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5250906A (en) * 1991-10-17 1993-10-05 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5296817A (en) * 1990-04-11 1994-03-22 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5422573A (en) * 1990-04-11 1995-06-06 Granville-Phillips Company Ionization gauge and method of using and calibrating same
DE4112407A1 (de) * 1991-04-16 1992-10-22 Max Planck Gesellschaft Heisskathoden-ionisationsmanometer
RU2175438C1 (ru) * 2000-06-22 2001-10-27 Дубинов Александр Евгеньевич Способ измерения вакуума
CN104303033B (zh) 2012-02-08 2016-08-24 Mks仪器公司 用于高压操作的电离计
US10242855B1 (en) * 2016-09-21 2019-03-26 The United States of America as requested by the Secretary of the Air Force Detector, system and method for droplet and/or cluster beam spectroscopy
CN114823273A (zh) * 2022-05-07 2022-07-29 合肥工业大学 可用于强磁场环境测量下限较低的高灵敏度热阴极电离规

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2334356A (en) * 1941-05-28 1943-11-16 Rca Corp Vacuum gauge
US2516704A (en) * 1949-06-11 1950-07-25 Collins Radio Co Vacuum gauge of the ionization producing type
DE1498845A1 (de) * 1962-01-31 1969-05-14 Leybold Heraeus Gmbh & Co Kg Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer
US3465189A (en) * 1966-10-13 1969-09-02 Canadian Patents Dev Ionization vacuum gauge with x-ray shielding and ion reflecting means
US3509418A (en) * 1968-05-03 1970-04-28 Philips Corp Ionization manometer including means for modulation of terminal grids
CH477684A (de) * 1968-10-15 1969-08-31 Balzers Patent Beteilig Ag Ionisationsmanometerröhre
US3743876A (en) * 1969-10-07 1973-07-03 Canadian Patents Dev Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode
NL7604569A (nl) * 1976-04-29 1977-11-01 Philips Nv Veldemitterinrichting en werkwijze tot het vormen daarvan.

Also Published As

Publication number Publication date
FR2603103B3 (fr) 1988-11-10
US4792763A (en) 1988-12-20
JPS6347572U (enExample) 1988-03-31
GB8719747D0 (en) 1987-09-30
DE3628847A1 (de) 1988-03-03
JPH083960Y2 (ja) 1996-01-31
GB2195495A (en) 1988-04-07
GB2195495B (en) 1990-11-21
FR2603103A3 (fr) 1988-02-26

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition