FR2603103B3 - Manometre a ionisation a cathode chaude - Google Patents
Manometre a ionisation a cathode chaudeInfo
- Publication number
- FR2603103B3 FR2603103B3 FR8711553A FR8711553A FR2603103B3 FR 2603103 B3 FR2603103 B3 FR 2603103B3 FR 8711553 A FR8711553 A FR 8711553A FR 8711553 A FR8711553 A FR 8711553A FR 2603103 B3 FR2603103 B3 FR 2603103B3
- Authority
- FR
- France
- Prior art keywords
- hot cathode
- cathode ionization
- ionization manometer
- manometer
- hot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3628847A DE3628847C2 (de) | 1986-08-25 | 1986-08-25 | Heißkathoden-Ionisationsmanometer |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2603103A3 FR2603103A3 (fr) | 1988-02-26 |
FR2603103B3 true FR2603103B3 (fr) | 1988-11-10 |
Family
ID=6308132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8711553A Expired FR2603103B3 (fr) | 1986-08-25 | 1987-08-13 | Manometre a ionisation a cathode chaude |
Country Status (5)
Country | Link |
---|---|
US (1) | US4792763A (fr) |
JP (1) | JPH083960Y2 (fr) |
DE (1) | DE3628847C2 (fr) |
FR (1) | FR2603103B3 (fr) |
GB (1) | GB2195495B (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5250906A (en) * | 1991-10-17 | 1993-10-05 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
US5296817A (en) * | 1990-04-11 | 1994-03-22 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
US5422573A (en) * | 1990-04-11 | 1995-06-06 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
DE4112407A1 (de) * | 1991-04-16 | 1992-10-22 | Max Planck Gesellschaft | Heisskathoden-ionisationsmanometer |
US9593996B2 (en) | 2012-02-08 | 2017-03-14 | Mks Instruments, Inc. | Ionization gauge for high pressure operation |
US10242855B1 (en) * | 2016-09-21 | 2019-03-26 | The United States of America as requested by the Secretary of the Air Force | Detector, system and method for droplet and/or cluster beam spectroscopy |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2334356A (en) * | 1941-05-28 | 1943-11-16 | Rca Corp | Vacuum gauge |
US2516704A (en) * | 1949-06-11 | 1950-07-25 | Collins Radio Co | Vacuum gauge of the ionization producing type |
DE1498845A1 (de) * | 1962-01-31 | 1969-05-14 | Leybold Heraeus Gmbh & Co Kg | Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer |
US3465189A (en) * | 1966-10-13 | 1969-09-02 | Canadian Patents Dev | Ionization vacuum gauge with x-ray shielding and ion reflecting means |
US3509418A (en) * | 1968-05-03 | 1970-04-28 | Philips Corp | Ionization manometer including means for modulation of terminal grids |
CH477684A (de) * | 1968-10-15 | 1969-08-31 | Balzers Patent Beteilig Ag | Ionisationsmanometerröhre |
US3743876A (en) * | 1969-10-07 | 1973-07-03 | Canadian Patents Dev | Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode |
NL7604569A (nl) * | 1976-04-29 | 1977-11-01 | Philips Nv | Veldemitterinrichting en werkwijze tot het vormen daarvan. |
-
1986
- 1986-08-25 DE DE3628847A patent/DE3628847C2/de not_active Expired - Lifetime
-
1987
- 1987-07-13 US US07/072,672 patent/US4792763A/en not_active Expired - Lifetime
- 1987-08-13 FR FR8711553A patent/FR2603103B3/fr not_active Expired
- 1987-08-20 GB GB8719747A patent/GB2195495B/en not_active Expired - Lifetime
- 1987-08-25 JP JP1987128142U patent/JPH083960Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB2195495B (en) | 1990-11-21 |
DE3628847C2 (de) | 1995-12-14 |
FR2603103A3 (fr) | 1988-02-26 |
DE3628847A1 (de) | 1988-03-03 |
GB2195495A (en) | 1988-04-07 |
JPH083960Y2 (ja) | 1996-01-31 |
JPS6347572U (fr) | 1988-03-31 |
US4792763A (en) | 1988-12-20 |
GB8719747D0 (en) | 1987-09-30 |
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