FR2685126B3 - Manometre d'ionisation a cathode chaude. - Google Patents

Manometre d'ionisation a cathode chaude.

Info

Publication number
FR2685126B3
FR2685126B3 FR9204707A FR9204707A FR2685126B3 FR 2685126 B3 FR2685126 B3 FR 2685126B3 FR 9204707 A FR9204707 A FR 9204707A FR 9204707 A FR9204707 A FR 9204707A FR 2685126 B3 FR2685126 B3 FR 2685126B3
Authority
FR
France
Prior art keywords
hot cathode
cathode ionization
ionization manometer
manometer
hot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9204707A
Other languages
English (en)
Other versions
FR2685126A3 (fr
Inventor
Haas Gunter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Publication of FR2685126A3 publication Critical patent/FR2685126A3/fr
Application granted granted Critical
Publication of FR2685126B3 publication Critical patent/FR2685126B3/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR9204707A 1991-04-16 1992-04-16 Manometre d'ionisation a cathode chaude. Expired - Lifetime FR2685126B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4112407A DE4112407A1 (de) 1991-04-16 1991-04-16 Heisskathoden-ionisationsmanometer

Publications (2)

Publication Number Publication Date
FR2685126A3 FR2685126A3 (fr) 1993-06-18
FR2685126B3 true FR2685126B3 (fr) 1993-11-26

Family

ID=6429706

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9204707A Expired - Lifetime FR2685126B3 (fr) 1991-04-16 1992-04-16 Manometre d'ionisation a cathode chaude.

Country Status (6)

Country Link
US (2) US5300890A (fr)
JP (1) JP3177292B2 (fr)
DE (2) DE4112407A1 (fr)
FR (1) FR2685126B3 (fr)
GB (1) GB2255442B (fr)
IT (1) IT1254004B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7418869B2 (en) * 2005-06-10 2008-09-02 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7207224B2 (en) * 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
KR100844513B1 (ko) 2006-04-14 2008-07-08 한국표준과학연구원 탄소나노튜브의 전계효과를 이용한 압력센서
JP6131113B2 (ja) * 2013-06-13 2017-05-17 キヤノンアネルバ株式会社 冷陰極電離真空計及び内壁保護部材
US10605687B2 (en) * 2016-02-29 2020-03-31 General Electric Company Spark gap device and method of measurement of X-ray tube vacuum pressure
CN112555113B (zh) * 2020-11-06 2022-06-14 兰州空间技术物理研究所 一种离子推力器栅极组件一体化绝缘结构

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743876A (en) * 1969-10-07 1973-07-03 Canadian Patents Dev Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode
US3839655A (en) * 1973-08-24 1974-10-01 Varian Associates Bayard-alpert vacuum ionization tube
US3891882A (en) * 1974-01-03 1975-06-24 Anthony J Barraco Ionization gauge
NL181763C (nl) * 1977-06-02 1987-10-16 Philips Nv Glimontladingslamp.
DE3628847C2 (de) * 1986-08-25 1995-12-14 Max Planck Gesellschaft Heißkathoden-Ionisationsmanometer
JPH03206934A (ja) * 1990-01-09 1991-09-10 Seiko Instr Inc 熱陰極電離真空計

Also Published As

Publication number Publication date
DE9116476U1 (de) 1992-12-24
FR2685126A3 (fr) 1993-06-18
US5373240A (en) 1994-12-13
ITRM920278A0 (it) 1992-04-15
US5300890A (en) 1994-04-05
GB9208344D0 (en) 1992-06-03
GB2255442A (en) 1992-11-04
DE4112407A1 (de) 1992-10-22
ITRM920278A1 (it) 1993-10-15
JPH05288628A (ja) 1993-11-02
GB2255442B (en) 1995-03-08
IT1254004B (it) 1995-09-05
JP3177292B2 (ja) 2001-06-18

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