IT1254004B - Manometro di ionizzazione a catodo caldo - Google Patents
Manometro di ionizzazione a catodo caldoInfo
- Publication number
- IT1254004B IT1254004B ITRM920278A ITRM920278A IT1254004B IT 1254004 B IT1254004 B IT 1254004B IT RM920278 A ITRM920278 A IT RM920278A IT RM920278 A ITRM920278 A IT RM920278A IT 1254004 B IT1254004 B IT 1254004B
- Authority
- IT
- Italy
- Prior art keywords
- electrode
- flat
- pressure gauge
- hot cathode
- cathode ionization
- Prior art date
Links
- 230000001133 acceleration Effects 0.000 abstract 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Oggetto dell'invenzione è un manometro di ionizzazione a catodo caldo con i seguenti elettrodi disposti a distanza reciproca nella sequenza indicata lungo un asse (A):a) un catodo termoionico (10) il quale presenta una parte intermedia attiva (10a) e parti di supporto laterali (10b, l0c);b) un elettrodo di controllo piano simile a diaframma (12),e) un elettrodo d'accelerazione piano (14) e d) un elettrodo collettore di ioni piano (16),e con una piastra di base (20), su cui sano montati l'elettrodo di controllo (12), l'elettrodo d'accelerazione (14) e l'elettrodo collettore di ioni (16) in ogni caso attraverso un mezzo di supporto che si estende perpendicolarmente alla parte principale dell'elettrodo in questione ed attraverso un bullone di raccordo (36, 30, 32) collegato al mezzo di supporto, in cui i bulloni di raccordo sono sempre supportati per mezzo di basi di materiale ceramico (22, 24, 26, 28) sulla piastra di base (20).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4112407A DE4112407A1 (de) | 1991-04-16 | 1991-04-16 | Heisskathoden-ionisationsmanometer |
Publications (3)
Publication Number | Publication Date |
---|---|
ITRM920278A0 ITRM920278A0 (it) | 1992-04-15 |
ITRM920278A1 ITRM920278A1 (it) | 1993-10-15 |
IT1254004B true IT1254004B (it) | 1995-09-05 |
Family
ID=6429706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITRM920278A IT1254004B (it) | 1991-04-16 | 1992-04-15 | Manometro di ionizzazione a catodo caldo |
Country Status (6)
Country | Link |
---|---|
US (2) | US5300890A (it) |
JP (1) | JP3177292B2 (it) |
DE (2) | DE4112407A1 (it) |
FR (1) | FR2685126B3 (it) |
GB (1) | GB2255442B (it) |
IT (1) | IT1254004B (it) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7207224B2 (en) * | 2005-06-10 | 2007-04-24 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
US7418869B2 (en) * | 2005-06-10 | 2008-09-02 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
KR100844513B1 (ko) | 2006-04-14 | 2008-07-08 | 한국표준과학연구원 | 탄소나노튜브의 전계효과를 이용한 압력센서 |
JP6131113B2 (ja) * | 2013-06-13 | 2017-05-17 | キヤノンアネルバ株式会社 | 冷陰極電離真空計及び内壁保護部材 |
US10605687B2 (en) * | 2016-02-29 | 2020-03-31 | General Electric Company | Spark gap device and method of measurement of X-ray tube vacuum pressure |
CN112555113B (zh) * | 2020-11-06 | 2022-06-14 | 兰州空间技术物理研究所 | 一种离子推力器栅极组件一体化绝缘结构 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3743876A (en) * | 1969-10-07 | 1973-07-03 | Canadian Patents Dev | Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode |
US3839655A (en) * | 1973-08-24 | 1974-10-01 | Varian Associates | Bayard-alpert vacuum ionization tube |
US3891882A (en) * | 1974-01-03 | 1975-06-24 | Anthony J Barraco | Ionization gauge |
NL181763C (nl) * | 1977-06-02 | 1987-10-16 | Philips Nv | Glimontladingslamp. |
DE3628847C2 (de) * | 1986-08-25 | 1995-12-14 | Max Planck Gesellschaft | Heißkathoden-Ionisationsmanometer |
JPH03206934A (ja) * | 1990-01-09 | 1991-09-10 | Seiko Instr Inc | 熱陰極電離真空計 |
-
1991
- 1991-04-16 DE DE4112407A patent/DE4112407A1/de not_active Withdrawn
- 1991-04-16 DE DE9116476U patent/DE9116476U1/de not_active Expired - Lifetime
-
1992
- 1992-04-10 US US07/866,869 patent/US5300890A/en not_active Expired - Lifetime
- 1992-04-15 IT ITRM920278A patent/IT1254004B/it active
- 1992-04-15 JP JP09563992A patent/JP3177292B2/ja not_active Expired - Fee Related
- 1992-04-15 GB GB9208344A patent/GB2255442B/en not_active Expired - Lifetime
- 1992-04-16 FR FR9204707A patent/FR2685126B3/fr not_active Expired - Lifetime
-
1994
- 1994-02-01 US US08/189,914 patent/US5373240A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5300890A (en) | 1994-04-05 |
JPH05288628A (ja) | 1993-11-02 |
GB2255442B (en) | 1995-03-08 |
ITRM920278A1 (it) | 1993-10-15 |
JP3177292B2 (ja) | 2001-06-18 |
US5373240A (en) | 1994-12-13 |
GB9208344D0 (en) | 1992-06-03 |
DE4112407A1 (de) | 1992-10-22 |
FR2685126B3 (fr) | 1993-11-26 |
GB2255442A (en) | 1992-11-04 |
DE9116476U1 (de) | 1992-12-24 |
FR2685126A3 (fr) | 1993-06-18 |
ITRM920278A0 (it) | 1992-04-15 |
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