DE3586854D1 - Ionenimplantation zur verbreiterung der verbotenen zone des emitters in bipolaren transistoren. - Google Patents

Ionenimplantation zur verbreiterung der verbotenen zone des emitters in bipolaren transistoren.

Info

Publication number
DE3586854D1
DE3586854D1 DE8585401386T DE3586854T DE3586854D1 DE 3586854 D1 DE3586854 D1 DE 3586854D1 DE 8585401386 T DE8585401386 T DE 8585401386T DE 3586854 T DE3586854 T DE 3586854T DE 3586854 D1 DE3586854 D1 DE 3586854D1
Authority
DE
Germany
Prior art keywords
widening
emitter
ion implantation
bipolar transistors
forbidden zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585401386T
Other languages
English (en)
Other versions
DE3586854T2 (de
Inventor
Kranti Anand
Robert J Strain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Semiconductor Corp filed Critical Fairchild Semiconductor Corp
Application granted granted Critical
Publication of DE3586854D1 publication Critical patent/DE3586854D1/de
Publication of DE3586854T2 publication Critical patent/DE3586854T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table further characterised by the doping material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73—Bipolar junction transistors
    • H01L29/737—Hetero-junction transistors
    • H01L29/7371—Vertical transistors
    • H01L29/7375—Vertical transistors having an emitter comprising one or more non-monocrystalline elements of group IV, e.g. amorphous silicon, alloys comprising group IV elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Bipolar Transistors (AREA)
DE8585401386T 1984-07-11 1985-07-09 Ionenimplantation zur verbreiterung der verbotenen zone des emitters in bipolaren transistoren. Expired - Fee Related DE3586854T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/629,576 US4559696A (en) 1984-07-11 1984-07-11 Ion implantation to increase emitter energy gap in bipolar transistors

Publications (2)

Publication Number Publication Date
DE3586854D1 true DE3586854D1 (de) 1993-01-07
DE3586854T2 DE3586854T2 (de) 1993-05-13

Family

ID=24523572

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585401386T Expired - Fee Related DE3586854T2 (de) 1984-07-11 1985-07-09 Ionenimplantation zur verbreiterung der verbotenen zone des emitters in bipolaren transistoren.

Country Status (5)

Country Link
US (1) US4559696A (de)
EP (1) EP0168325B1 (de)
JP (1) JPS6164164A (de)
CA (1) CA1224280A (de)
DE (1) DE3586854T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62219636A (ja) * 1986-03-20 1987-09-26 Hitachi Ltd 半導体装置
US4821082A (en) * 1987-10-30 1989-04-11 International Business Machines Corporation Heterojunction bipolar transistor with substantially aligned energy levels
US4983534A (en) * 1988-01-05 1991-01-08 Nec Corporation Semiconductor device and method of manufacturing the same
EP0390606A3 (de) * 1989-03-31 1991-10-09 Canon Kabushiki Kaisha Halbleitervorrichtung mit einem hinsichtlich des Emittorgebietes und/oder der Basiselektrode verbesserten Transistor
US5185276A (en) * 1990-01-31 1993-02-09 International Business Machines Corporation Method for improving low temperature current gain of bipolar transistors
EP0581369B1 (de) * 1992-07-24 1998-01-28 Koninklijke Philips Electronics N.V. Verfahren zur Herstellung einer Halbleiteranordnung mit durch Implantation mit einer Kohlenstoff-Halogenverbindung erhaltenem Heteroübergang
EP0632502B1 (de) * 1993-06-28 1999-03-17 Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno Bipolar-Leistungstransistor mit hoher Kollektor-Durchbrucksspannung und Verfahren zu seiner Herstellung
US5360986A (en) * 1993-10-05 1994-11-01 Motorola, Inc. Carbon doped silicon semiconductor device having a narrowed bandgap characteristic and method
JPH1079506A (ja) * 1996-02-07 1998-03-24 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
US6358807B1 (en) * 2000-02-15 2002-03-19 Agere Systems Guardian Corp. Bipolar semiconductor device and method of forming same having reduced transient enhanced diffusion
US6682992B2 (en) * 2002-05-15 2004-01-27 International Business Machines Corporation Method of controlling grain size in a polysilicon layer and in semiconductor devices having polysilicon structures
KR100806788B1 (ko) * 2006-08-23 2008-02-27 동부일렉트로닉스 주식회사 플래시 메모리 소자 및 그 제조 방법
US11094806B2 (en) 2017-12-29 2021-08-17 Texas Instruments Incorporated Fabricating transistors with implanting dopants at first and second dosages in the collector region to form the base region

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2569347A (en) * 1948-06-26 1951-09-25 Bell Telephone Labor Inc Circuit element utilizing semiconductive material
JPS5527474B2 (de) * 1971-12-17 1980-07-21
DE2507366C3 (de) * 1975-02-20 1980-06-26 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Unterdrückung parasitärer Schaltungselemente
US4178190A (en) * 1975-06-30 1979-12-11 Rca Corporation Method of making a bipolar transistor with high-low emitter impurity concentration
CA1136773A (en) * 1978-08-14 1982-11-30 Norikazu Ohuchi Semiconductor device
JPS59106154A (ja) * 1982-12-10 1984-06-19 Hitachi Ltd 半導体装置

Also Published As

Publication number Publication date
US4559696A (en) 1985-12-24
CA1224280A (en) 1987-07-14
JPS6164164A (ja) 1986-04-02
EP0168325A3 (en) 1988-01-20
EP0168325B1 (de) 1992-11-25
DE3586854T2 (de) 1993-05-13
EP0168325A2 (de) 1986-01-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee