DE3572215D1 - Corrugated diaphragm for a pressure transducer - Google Patents
Corrugated diaphragm for a pressure transducerInfo
- Publication number
- DE3572215D1 DE3572215D1 DE8585400005T DE3572215T DE3572215D1 DE 3572215 D1 DE3572215 D1 DE 3572215D1 DE 8585400005 T DE8585400005 T DE 8585400005T DE 3572215 T DE3572215 T DE 3572215T DE 3572215 D1 DE3572215 D1 DE 3572215D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure transducer
- corrugated diaphragm
- corrugated
- diaphragm
- transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J3/00—Diaphragms; Bellows; Bellows pistons
- F16J3/02—Diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Diaphragms And Bellows (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8400166A FR2557947B1 (fr) | 1984-01-06 | 1984-01-06 | Diaphragme ondule pour capteur de pression |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3572215D1 true DE3572215D1 (en) | 1989-09-14 |
Family
ID=9299886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585400005T Expired DE3572215D1 (en) | 1984-01-06 | 1985-01-04 | Corrugated diaphragm for a pressure transducer |
Country Status (5)
Country | Link |
---|---|
US (1) | US4809589A (de) |
EP (1) | EP0149568B1 (de) |
JP (1) | JPS60227141A (de) |
DE (1) | DE3572215D1 (de) |
FR (1) | FR2557947B1 (de) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5140733A (en) * | 1988-05-25 | 1992-08-25 | Tatsuta Electric Wire & Cable Co., Ltd. | Method of fixing flange to peripheral edge of a disc spring |
JPH02290522A (ja) * | 1989-02-20 | 1990-11-30 | Tatsuta Electric Wire & Cable Co Ltd | 圧力検出装置 |
JPH02290523A (ja) * | 1989-02-20 | 1990-11-30 | Tatsuta Electric Wire & Cable Co Ltd | 圧力検出装置 |
US5064165A (en) * | 1989-04-07 | 1991-11-12 | Ic Sensors, Inc. | Semiconductor transducer or actuator utilizing corrugated supports |
US5022271A (en) * | 1989-12-12 | 1991-06-11 | Hannon Jr Dewey | Pressure sensing device for pipes |
JP2524233B2 (ja) * | 1989-12-28 | 1996-08-14 | タツタ電線株式会社 | 圧力センサ― |
JP2524234B2 (ja) * | 1989-12-28 | 1996-08-14 | タツタ電線株式会社 | 圧力センサ― |
JP2524231B2 (ja) * | 1989-12-28 | 1996-08-14 | タツタ電線株式会社 | 圧力センサ― |
JP2524232B2 (ja) * | 1989-12-28 | 1996-08-14 | タツタ電線株式会社 | 圧力センサ― |
JPH03225239A (ja) * | 1990-01-30 | 1991-10-04 | Tatsuta Electric Wire & Cable Co Ltd | 圧力検出装置 |
JP2524235B2 (ja) * | 1990-01-30 | 1996-08-14 | タツタ電線株式会社 | 圧力検出装置 |
JP2524238B2 (ja) * | 1990-01-30 | 1996-08-14 | タツタ電線株式会社 | 圧力検出装置 |
JPH03225238A (ja) * | 1990-01-30 | 1991-10-04 | Tatsuta Electric Wire & Cable Co Ltd | 圧力検出装置 |
JP2524237B2 (ja) * | 1990-01-30 | 1996-08-14 | タツタ電線株式会社 | 圧力検出装置 |
JP2524236B2 (ja) * | 1990-01-30 | 1996-08-14 | タツタ電線株式会社 | 圧力検出装置 |
US5072617A (en) * | 1990-10-30 | 1991-12-17 | The United States Of America As Represented By The United States Department Of Energy | Fiber-optic liquid level sensor |
US6158712A (en) * | 1998-10-16 | 2000-12-12 | Agilent Technologies, Inc. | Multilayer integrated assembly having an integral microminiature valve |
EP1061293B1 (de) * | 1999-06-17 | 2004-08-18 | Helmut Heidrich | Strukturausrichtung von Membranen |
DE10058274A1 (de) * | 2000-11-23 | 2002-05-29 | Alfa Laval Flow Gmbh | Membran mit strukturierter Oberfläche |
US20030183888A1 (en) * | 2002-03-28 | 2003-10-02 | Eyal Bar-Sadeh | Corrugated diaphragm |
US6932107B2 (en) * | 2003-06-24 | 2005-08-23 | Flow Control Industries, Inc. | Flow control valves |
CN1894526A (zh) | 2003-10-17 | 2007-01-10 | 松德沃技术公司 | 故障保险气动致动阀 |
CH713839B1 (de) * | 2004-02-25 | 2018-11-30 | Sauter Ag | Membrane. |
EP2021892B1 (de) * | 2006-04-27 | 2013-02-20 | Sko Flo Industries, Inc. | Stromventil |
US8104397B2 (en) * | 2008-09-30 | 2012-01-31 | M&Fc Holding, Llc | Gas metering diaphragm |
WO2011005286A1 (en) * | 2009-06-22 | 2011-01-13 | Lansinoh Laboratories, Inc. | Breast milk collection apparatus and components thereof |
WO2011019702A1 (en) | 2009-08-13 | 2011-02-17 | Analog Devices, Inc. | Mems in-plane resonators |
EP3534128A3 (de) | 2009-08-13 | 2020-01-08 | Teleflex Life Sciences Unlimited Company | Druckanzeiger |
US8631700B2 (en) | 2010-11-05 | 2014-01-21 | Analog Devices, Inc. | Resonating sensor with mechanical constraints |
US8616056B2 (en) | 2010-11-05 | 2013-12-31 | Analog Devices, Inc. | BAW gyroscope with bottom electrode |
US9091544B2 (en) | 2010-11-05 | 2015-07-28 | Analog Devices, Inc. | XY-axis shell-type gyroscopes with reduced cross-talk sensitivity and/or mode matching |
WO2012075226A1 (en) | 2010-12-01 | 2012-06-07 | Analog Devices, Inc. | Apparatus and method for anchoring electrodes in mems devices |
US9039976B2 (en) | 2011-01-31 | 2015-05-26 | Analog Devices, Inc. | MEMS sensors with closed nodal anchors for operation in an in-plane contour mode |
BR112013019613A2 (pt) | 2011-02-02 | 2017-03-21 | Berg John | via aérea artificial melhorada. |
US9709595B2 (en) | 2013-11-14 | 2017-07-18 | Analog Devices, Inc. | Method and apparatus for detecting linear and rotational movement |
US9599471B2 (en) | 2013-11-14 | 2017-03-21 | Analog Devices, Inc. | Dual use of a ring structure as gyroscope and accelerometer |
US10746548B2 (en) | 2014-11-04 | 2020-08-18 | Analog Devices, Inc. | Ring gyroscope structural features |
US9869552B2 (en) * | 2015-03-20 | 2018-01-16 | Analog Devices, Inc. | Gyroscope that compensates for fluctuations in sensitivity |
US11656077B2 (en) | 2019-01-31 | 2023-05-23 | Analog Devices, Inc. | Pseudo-extensional mode MEMS ring gyroscope |
DE102020120448A1 (de) | 2020-08-03 | 2022-02-03 | Carl Freudenberg Kg | Membran und Trennkolben, der eine solche Membran umfasst |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US56694A (en) * | 1866-07-31 | Improvement in steam-gages | ||
FR524721A (fr) * | 1920-02-14 | 1921-09-09 | Zaverio Reviglio Della Veneria | Perfectionnements dans les manomètres à membrane |
GB749551A (en) * | 1953-11-18 | 1956-05-30 | Eric Lionel Hutchings | Improvements in or relating to expansible devices having at least one diaphragm-like member |
US2874569A (en) * | 1955-04-05 | 1959-02-24 | American Meter Co | Gas meter diaphragm |
FR1474157A (fr) * | 1966-02-09 | 1967-03-24 | Prec Mecanique Labinal | Perfectionnements apportés aux appareils à membrane déformable |
DE1936618A1 (de) * | 1968-07-19 | 1970-01-22 | Honeywell Inc | Membran |
US4434203A (en) * | 1980-10-27 | 1984-02-28 | Setra Systems, Inc. | Diaphragm |
US4375182A (en) * | 1980-10-31 | 1983-03-01 | Z John R | Ultra-sensitive diaphragm with dual stress-relief structures |
-
1984
- 1984-01-06 FR FR8400166A patent/FR2557947B1/fr not_active Expired
-
1985
- 1985-01-04 EP EP85400005A patent/EP0149568B1/de not_active Expired
- 1985-01-04 DE DE8585400005T patent/DE3572215D1/de not_active Expired
- 1985-01-07 JP JP60000737A patent/JPS60227141A/ja active Pending
-
1987
- 1987-02-13 US US07/015,536 patent/US4809589A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS60227141A (ja) | 1985-11-12 |
EP0149568A3 (en) | 1985-08-21 |
FR2557947A1 (fr) | 1985-07-12 |
EP0149568B1 (de) | 1989-08-09 |
EP0149568A2 (de) | 1985-07-24 |
US4809589A (en) | 1989-03-07 |
FR2557947B1 (fr) | 1988-04-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3572215D1 (en) | Corrugated diaphragm for a pressure transducer | |
GB2165652B (en) | Absolute pressure transducer | |
EP0202786A3 (en) | Piezoresistive pressure transducer | |
ZA852233B (en) | Linearized capacitive pressure transducer | |
AU560245B2 (en) | Silicon-glass-silicon capacitive pressure transducer | |
DE3263468D1 (en) | Capacitive pressure transducer | |
IL72736A0 (en) | Surface-area pressure transducers | |
IL79282A0 (en) | Pressure transducer | |
GB2112605B (en) | A capacitive transducer | |
AU561275B2 (en) | Monitoring a pressure sensor | |
EP0176786A3 (en) | Transducer for a surface acoustic wave arrangement | |
GB2118724B (en) | Pressure transducer | |
GB2196738B (en) | A displacement transducer | |
GB2114742B (en) | Pressure transducer | |
GB8413650D0 (en) | Photoelectric pressure transducer | |
DE3666735D1 (en) | Pressure transducer | |
HK31191A (en) | Diaphragm pressure transducers | |
AU561630B2 (en) | Adjustable tangent assembly for a diaphragm gasmeter | |
SG72289G (en) | Connection for a pressure pipe | |
DE3562961D1 (en) | Pressure transducer for a pressure switch or regulator | |
EP0292333A3 (en) | Pressure transducer assembly | |
GB8414416D0 (en) | Pressure transducer | |
DE3163148D1 (en) | Pressure transducer for a rotating implement | |
GB8512877D0 (en) | Pressure transducer | |
PL248004A2 (en) | Pressure difference transducer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |