DE3483426D1 - Verfahren zum stromlosen abscheiden von metallen. - Google Patents

Verfahren zum stromlosen abscheiden von metallen.

Info

Publication number
DE3483426D1
DE3483426D1 DE8484115495T DE3483426T DE3483426D1 DE 3483426 D1 DE3483426 D1 DE 3483426D1 DE 8484115495 T DE8484115495 T DE 8484115495T DE 3483426 T DE3483426 T DE 3483426T DE 3483426 D1 DE3483426 D1 DE 3483426D1
Authority
DE
Germany
Prior art keywords
depositing metals
electrically depositing
electrically
metals
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8484115495T
Other languages
German (de)
English (en)
Inventor
Donald Gene Mcbride
Rickert, Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3483426D1 publication Critical patent/DE3483426D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/54—Contact plating, i.e. electroless electrochemical plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
DE8484115495T 1983-12-19 1984-12-14 Verfahren zum stromlosen abscheiden von metallen. Expired - Lifetime DE3483426D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/562,550 US4652345A (en) 1983-12-19 1983-12-19 Method of depositing a metal from an electroless plating solution

Publications (1)

Publication Number Publication Date
DE3483426D1 true DE3483426D1 (de) 1990-11-22

Family

ID=24246735

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484115495T Expired - Lifetime DE3483426D1 (de) 1983-12-19 1984-12-14 Verfahren zum stromlosen abscheiden von metallen.

Country Status (4)

Country Link
US (1) US4652345A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0150402B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS60135577A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3483426D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4751110A (en) * 1986-07-14 1988-06-14 Shipley Company Inc. Radiation attenuation shielding
JPS6326375A (ja) * 1986-07-18 1988-02-03 Nippon Mining Co Ltd 無電解めつき開始方法
US5130168A (en) * 1988-11-22 1992-07-14 Technic, Inc. Electroless gold plating bath and method of using same
FR2649126B1 (fr) * 1989-06-30 1992-04-10 Commissariat Energie Atomique Procede de depot electrochimique sur un support en materiau isolant electrique
US5162079A (en) * 1991-01-28 1992-11-10 Eco-Tec Limited Process and apparatus for control of electroplating bath composition
US5733466A (en) * 1996-02-06 1998-03-31 International Business Machines Corporation Electrolytic method of depositing gold connectors on a printed circuit board
US7264698B2 (en) * 1999-04-13 2007-09-04 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US7438788B2 (en) * 1999-04-13 2008-10-21 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
EP1103634A1 (en) * 1999-11-29 2001-05-30 Interuniversitair Micro-Elektronica Centrum Vzw Method for contact plated copper deposition
EP1103633A1 (en) * 1999-11-29 2001-05-30 Interuniversitair Microelektronica Centrum Vzw Method for copper plating deposition
US6663915B2 (en) * 2000-11-28 2003-12-16 Interuniversitair Microelektronica Centrum Method for copper plating deposition
JP2007154298A (ja) * 2005-12-08 2007-06-21 Tokyo Electron Ltd 無電解めっき装置および無電解めっき方法
JP6462620B2 (ja) * 2016-03-29 2019-01-30 東京エレクトロン株式会社 基板処理装置および基板処理方法
CN110831344B (zh) * 2019-11-20 2021-07-13 江苏上达半导体有限公司 一种第一次化锡和第二次化锡通用的装置的使用方法

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH283826A (de) * 1949-07-22 1952-06-30 Schleicher Alwin Prof Dr Ing H Verfahren zur Ausfällung von Metallen aus metallhaltigen Lösungen.
US2644787A (en) * 1950-01-05 1953-07-07 Eckert Mauchly Comp Corp Electrodeposition of a magnetic coating
US2791556A (en) * 1954-12-13 1957-05-07 Pigeon Jean Apparatus for recovering of silver from photographic processing baths
US3264199A (en) * 1962-06-25 1966-08-02 Ford Motor Co Electroless plating of metals
GB1004380A (en) * 1962-11-21 1965-09-15 Ici Australia Ltd Electrochemical cells and manufacture of electrodes therefor
US3303111A (en) * 1963-08-12 1967-02-07 Arthur L Peach Electro-electroless plating method
US3367792A (en) * 1963-09-16 1968-02-06 Dow Chemical Co Electroless plating on nonconducting surfaces
US3389060A (en) * 1964-06-15 1968-06-18 Gen Motors Corp Method of indium coating metallic articles
US3394068A (en) * 1965-02-12 1968-07-23 Ritter Pfaudler Corp Electrodialysis of pickle liquor using sequestrants
FR1566445A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1968-02-29 1969-05-09
US3764503A (en) * 1972-01-19 1973-10-09 Dart Ind Inc Electrodialysis regeneration of metal containing acid solutions
FI61209C (fi) * 1973-08-03 1982-06-10 Parel Sa Elektrokemisk cell
US3933605A (en) * 1973-11-12 1976-01-20 United States Steel Corporation Non-polluting pickling method
FR2252416A1 (en) * 1973-11-22 1975-06-20 Prototech Co Electrodeposition of metals esp. copper - using hydrogen anode out of contact with metal contg. electrolyte, to prevent fouling of anode
US3880730A (en) * 1974-03-21 1975-04-29 Atomic Energy Commission Electro-galvanic gold plating process
JPS5819752B2 (ja) * 1974-03-30 1983-04-19 カガクギジユツチヨウ キンゾクザイリヨウギジユツケンキユウシヨチヨウ ドウデンカイホウ
US3994789A (en) * 1974-10-02 1976-11-30 Progressive Scientific Associates, Inc. Galvanic cementation process
GB1555334A (en) * 1975-06-13 1979-11-07 Imi Ltd Electrodeposition cell
US4111722A (en) * 1976-02-09 1978-09-05 Oxy Metal Industries Corporation Tannin treatment of aluminum with a fluoride cleaner
US4033837A (en) * 1976-02-24 1977-07-05 Olin Corporation Plated metallic cathode
US4101395A (en) * 1976-08-30 1978-07-18 Tokuyama Soda Kabushiki Kaisha Cathode-structure for electrolysis
US4142950A (en) * 1977-11-10 1979-03-06 Basf Wyandotte Corporation Apparatus and process for electrolysis using a cation-permselective membrane and turbulence inducing means
JPS55118059A (en) * 1979-03-05 1980-09-10 Canon Inc Developing method
DE3012168A1 (de) * 1980-03-27 1981-10-01 Schering Ag Berlin Und Bergkamen, 1000 Berlin Verfahren zur galvanischen abscheidung von kupferniederschlaegen
US4295951A (en) * 1980-05-14 1981-10-20 Hooker Chemicals & Plastics Corp. Film-coated cathodes for halate cells
US4310405A (en) * 1980-09-23 1982-01-12 Bell Telephone Laboratories, Incorporated Device for the photoelectrochemical generation of hydrogen at p-type semiconductor electrodes

Also Published As

Publication number Publication date
JPS60135577A (ja) 1985-07-18
US4652345A (en) 1987-03-24
EP0150402B1 (en) 1990-10-17
JPH0227434B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-18
EP0150402A1 (en) 1985-08-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee