DE3476676D1 - Polishing composition based on cerium and process for making it - Google Patents
Polishing composition based on cerium and process for making itInfo
- Publication number
- DE3476676D1 DE3476676D1 DE8484401495T DE3476676T DE3476676D1 DE 3476676 D1 DE3476676 D1 DE 3476676D1 DE 8484401495 T DE8484401495 T DE 8484401495T DE 3476676 T DE3476676 T DE 3476676T DE 3476676 D1 DE3476676 D1 DE 3476676D1
- Authority
- DE
- Germany
- Prior art keywords
- cerium
- making
- polishing composition
- composition based
- crystalline phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Catalysts (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8312519A FR2549846B1 (fr) | 1983-07-29 | 1983-07-29 | Nouvelle composition de polissage a base de cerium et son procede de fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3476676D1 true DE3476676D1 (en) | 1989-03-16 |
Family
ID=9291218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484401495T Expired DE3476676D1 (en) | 1983-07-29 | 1984-07-16 | Polishing composition based on cerium and process for making it |
Country Status (8)
Country | Link |
---|---|
US (1) | US4601755A (de) |
EP (1) | EP0133102B1 (de) |
JP (1) | JPS6035393B2 (de) |
AT (1) | ATE40712T1 (de) |
AU (1) | AU574086B2 (de) |
BR (1) | BR8403754A (de) |
DE (1) | DE3476676D1 (de) |
FR (1) | FR2549846B1 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2583034A1 (fr) * | 1985-06-10 | 1986-12-12 | Rhone Poulenc Spec Chim | Nouvel oxyde cerique, son procede de fabrication et ses applications |
US4769046A (en) * | 1985-07-25 | 1988-09-06 | Fujimi Kanmazai Kogyo Kabushiki Kaisha Of Japan | Process for polishing surface of memory hard disc |
JPS6225187A (ja) * | 1985-07-25 | 1987-02-03 | Fujimi Kenmazai Kogyo Kk | メモリ−ハ−ドデイスクの研磨用組成物 |
FR2604443A1 (fr) * | 1986-09-26 | 1988-04-01 | Rhone Poulenc Chimie | Composition de polissage a base de cerium destinee au polissage des verres organiques |
JPH0650196B2 (ja) * | 1986-11-05 | 1994-06-29 | 松下電器産業株式会社 | 太陽熱利用給湯装置 |
FR2617153B1 (fr) * | 1987-06-26 | 1991-04-05 | Rhone Poulenc Chimie | Procede d'obtention d'un oxyde cerique et oxyde cerique a nouvelles caracteristiques morphologiques |
FR2617154B1 (fr) * | 1987-06-29 | 1990-11-30 | Rhone Poulenc Chimie | Procede d'obtention d'oxyde cerique et oxyde cerique a nouvelles caracteristiques morphologiques |
ES2024666B3 (es) * | 1987-06-29 | 1992-03-01 | Rhone-Poulenc Chimie | Procedimiento para la obtencion de un oxido cerico. |
FR2624519A1 (fr) * | 1987-12-09 | 1989-06-16 | Rhone Poulenc Chimie | Composition de polissage perfectionnee a base de cerium et son procede de preparation |
US4839339A (en) * | 1988-02-25 | 1989-06-13 | The United States Of America As Represented By The United States Department Of Energy | Superconductor precursor mixtures made by precipitation method |
FR2631630B1 (fr) * | 1988-05-18 | 1990-08-31 | Rhone Poulenc Chimie | Abrasifs a base de terres rares |
US5114437A (en) * | 1990-08-28 | 1992-05-19 | Sumitomo Chemical Co., Ltd. | Polishing composition for metallic material |
US5106394A (en) * | 1990-10-01 | 1992-04-21 | The United States Of America As Represented By The Secretary Of The Navy | Fiber optic polishing system |
US5264010A (en) * | 1992-04-27 | 1993-11-23 | Rodel, Inc. | Compositions and methods for polishing and planarizing surfaces |
US5382272A (en) * | 1993-09-03 | 1995-01-17 | Rodel, Inc. | Activated polishing compositions |
US5725413A (en) * | 1994-05-06 | 1998-03-10 | Board Of Trustees Of The University Of Arkansas | Apparatus for and method of polishing and planarizing polycrystalline diamonds, and polished and planarized polycrystalline diamonds and products made therefrom |
JP3359479B2 (ja) * | 1995-11-07 | 2002-12-24 | 三井金属鉱業株式会社 | 研磨材、その製造方法及び研磨方法 |
KR100360787B1 (ko) * | 1996-02-07 | 2003-01-29 | 히다치 가세고교 가부시끼가이샤 | 산화세륨연마제,반도체칩및반도체장치,그들의제조법및기판의연마법 |
US5897675A (en) * | 1996-04-26 | 1999-04-27 | Degussa Aktiengesellschaft | Cerium oxide-metal/metalloid oxide mixture |
US5958288A (en) * | 1996-11-26 | 1999-09-28 | Cabot Corporation | Composition and slurry useful for metal CMP |
JP3602670B2 (ja) * | 1996-12-25 | 2004-12-15 | セイミケミカル株式会社 | セリウム系研磨材の製造方法 |
JPH11181403A (ja) * | 1997-12-18 | 1999-07-06 | Hitachi Chem Co Ltd | 酸化セリウム研磨剤及び基板の研磨法 |
US5989301A (en) | 1998-02-18 | 1999-11-23 | Saint-Gobain Industrial Ceramics, Inc. | Optical polishing formulation |
JP3520963B2 (ja) | 1998-06-09 | 2004-04-19 | 中部電力株式会社 | 蚊の誘殺器又は捕獲器 |
JP3992402B2 (ja) * | 1999-05-25 | 2007-10-17 | 株式会社コーセー | 金属酸化物固溶酸化セリウムからなる紫外線遮断剤並びにそれを配合した樹脂組成物及び化粧料 |
US6238450B1 (en) | 1999-06-16 | 2001-05-29 | Saint-Gobain Industrial Ceramics, Inc. | Ceria powder |
US6454821B1 (en) | 2000-06-21 | 2002-09-24 | Praxair S. T. Technology, Inc. | Polishing composition and method |
US6437336B1 (en) | 2000-08-15 | 2002-08-20 | Crismatec | Scintillator crystals and their applications and manufacturing process |
US7887714B2 (en) | 2000-12-25 | 2011-02-15 | Nissan Chemical Industries, Ltd. | Cerium oxide sol and abrasive |
AU2002359356A1 (en) * | 2001-11-16 | 2003-06-10 | Ferro Corporation | Particles for use in cmp slurries and method for producing them |
US20060032836A1 (en) * | 2001-11-16 | 2006-02-16 | Ferro Corporation | Methods of controlling the properties of abrasive particles for use in chemical-mechanical polishing slurries |
US7666239B2 (en) * | 2001-11-16 | 2010-02-23 | Ferro Corporation | Hydrothermal synthesis of cerium-titanium oxide for use in CMP |
US6596042B1 (en) | 2001-11-16 | 2003-07-22 | Ferro Corporation | Method of forming particles for use in chemical-mechanical polishing slurries and the particles formed by the process |
KR101276026B1 (ko) * | 2005-12-16 | 2013-06-19 | 제이에스알 가부시끼가이샤 | 화학 기계 연마용 수계 분산체 및 화학 기계 연마 방법, 및 화학 기계 연마용 수계 분산체를 제조하기 위한 키트 |
US8727833B2 (en) * | 2009-04-15 | 2014-05-20 | Rhodia (China) Co., Ltd. | Cerium-based particle composition and the preparation thereof |
CN103361030A (zh) * | 2013-07-23 | 2013-10-23 | 内蒙古科技大学 | 一种含镨超细高精密度稀土抛光粉及其制备方法 |
CN104312441B (zh) * | 2014-10-29 | 2017-11-10 | 安阳方圆研磨材料有限责任公司 | 硅铈抛光液及其制备方法 |
JP6694653B2 (ja) * | 2017-04-10 | 2020-05-20 | 信越化学工業株式会社 | 合成石英ガラス基板用研磨剤及びその製造方法並びに合成石英ガラス基板の研磨方法 |
JP7071495B2 (ja) | 2017-11-15 | 2022-05-19 | サン-ゴバン セラミックス アンド プラスティクス,インコーポレイティド | 材料除去操作を行うための組成物及びその形成方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3262766A (en) * | 1963-11-21 | 1966-07-26 | Grace W R & Co | Rare-earth oxides for polishing glass |
FR1535239A (fr) * | 1966-08-30 | 1968-08-02 | Thorium Ltd | Poudre à polir contenant de la silice en fines particules |
US3768989A (en) * | 1968-08-19 | 1973-10-30 | N Goetzinger | Process for the preparation of a rare earth oxide polishing composition |
US4102939A (en) * | 1976-11-08 | 1978-07-25 | Phillips Petroleum Company | Olefin disproportionation over silica-rare earth metal oxide catalysts |
US4162921A (en) * | 1977-01-05 | 1979-07-31 | Firsov Vitaly M | Glass-crystalline material and method of producing same |
FR2472601A1 (fr) * | 1979-12-27 | 1981-07-03 | Rhone Poulenc Ind | Procede de fabrication de compositions de polissage a base de cerium |
-
1983
- 1983-07-29 FR FR8312519A patent/FR2549846B1/fr not_active Expired
-
1984
- 1984-07-16 AT AT84401495T patent/ATE40712T1/de not_active IP Right Cessation
- 1984-07-16 EP EP84401495A patent/EP0133102B1/de not_active Expired
- 1984-07-16 DE DE8484401495T patent/DE3476676D1/de not_active Expired
- 1984-07-25 JP JP59153308A patent/JPS6035393B2/ja not_active Expired
- 1984-07-25 AU AU31132/84A patent/AU574086B2/en not_active Ceased
- 1984-07-27 BR BR8403754A patent/BR8403754A/pt unknown
- 1984-07-30 US US06/635,828 patent/US4601755A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
BR8403754A (pt) | 1985-07-02 |
AU574086B2 (en) | 1988-06-30 |
US4601755A (en) | 1986-07-22 |
EP0133102A1 (de) | 1985-02-13 |
AU3113284A (en) | 1985-01-31 |
EP0133102B1 (de) | 1989-02-08 |
JPS6044577A (ja) | 1985-03-09 |
FR2549846B1 (fr) | 1986-12-26 |
ATE40712T1 (de) | 1989-02-15 |
FR2549846A1 (fr) | 1985-02-01 |
JPS6035393B2 (ja) | 1985-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |