DE3476611D1 - Read only semiconductor memory device and manufacturing method - Google Patents

Read only semiconductor memory device and manufacturing method

Info

Publication number
DE3476611D1
DE3476611D1 DE8484113693T DE3476611T DE3476611D1 DE 3476611 D1 DE3476611 D1 DE 3476611D1 DE 8484113693 T DE8484113693 T DE 8484113693T DE 3476611 T DE3476611 T DE 3476611T DE 3476611 D1 DE3476611 D1 DE 3476611D1
Authority
DE
Germany
Prior art keywords
read
manufacturing
memory device
semiconductor memory
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484113693T
Other languages
English (en)
Inventor
Taira C O Patent Divisio Iwase
Shoji C O Patent Divi Ariizumi
Fujio C O Patent Divis Masuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3476611D1 publication Critical patent/DE3476611D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5226—Via connections in a multilevel interconnection structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/27—ROM only
    • H10B20/30—ROM only having the source region and the drain region on the same level, e.g. lateral transistors
    • H10B20/38—Doping programmed, e.g. mask ROM
    • H10B20/383—Channel doping programmed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/082—Ion implantation FETs/COMs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/109—Memory devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Memories (AREA)
DE8484113693T 1983-11-29 1984-11-13 Read only semiconductor memory device and manufacturing method Expired DE3476611D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58224921A JPS60116167A (ja) 1983-11-29 1983-11-29 半導体記憶装置及びその製造方法

Publications (1)

Publication Number Publication Date
DE3476611D1 true DE3476611D1 (en) 1989-03-09

Family

ID=16821250

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484113693T Expired DE3476611D1 (en) 1983-11-29 1984-11-13 Read only semiconductor memory device and manufacturing method

Country Status (4)

Country Link
US (2) US4649412A (de)
EP (1) EP0145955B1 (de)
JP (1) JPS60116167A (de)
DE (1) DE3476611D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59201461A (ja) * 1983-04-28 1984-11-15 Toshiba Corp 読み出し専用半導体記憶装置およびその製造方法
KR900000065B1 (ko) * 1985-08-13 1990-01-19 가부시끼가이샤 도오시바 독출전용 반도체기억장치와 그 제조방법
US5612557A (en) * 1986-10-27 1997-03-18 Seiko Epson Corporation Semiconductor device having an inter-layer insulating film disposed between two wiring layers
JPH06105773B2 (ja) * 1987-12-22 1994-12-21 株式会社東芝 半導体装置
JP3532325B2 (ja) 1995-07-21 2004-05-31 株式会社東芝 半導体記憶装置
US5538914A (en) * 1995-08-03 1996-07-23 Taiwan Semiconductor Manufacturing Company LDD method of coding mask ROM device and LDD coded mask ROM device produced thereby
KR102492033B1 (ko) * 2018-03-26 2023-01-26 에스케이하이닉스 주식회사 메모리 장치 및 이를 포함하는 메모리 시스템

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3921282A (en) * 1971-02-16 1975-11-25 Texas Instruments Inc Insulated gate field effect transistor circuits and their method of fabrication
US4059826A (en) * 1975-12-29 1977-11-22 Texas Instruments Incorporated Semiconductor memory array with field effect transistors programmable by alteration of threshold voltage
JPS583380B2 (ja) * 1977-03-04 1983-01-21 株式会社日立製作所 半導体装置とその製造方法
US4240097A (en) * 1977-05-31 1980-12-16 Texas Instruments Incorporated Field-effect transistor structure in multilevel polycrystalline silicon
JPS5819144B2 (ja) * 1977-12-02 1983-04-16 株式会社東芝 読み出し専用記憶装置
US4230504B1 (en) * 1978-04-27 1997-03-04 Texas Instruments Inc Method of making implant programmable N-channel rom
US4290184A (en) * 1978-03-20 1981-09-22 Texas Instruments Incorporated Method of making post-metal programmable MOS read only memory
US4268950A (en) * 1978-06-05 1981-05-26 Texas Instruments Incorporated Post-metal ion implant programmable MOS read only memory
US4348804A (en) * 1978-07-12 1982-09-14 Vlsi Technology Research Association Method of fabricating an integrated circuit device utilizing electron beam irradiation and selective oxidation
US4475964A (en) * 1979-02-20 1984-10-09 Tokyo Shibaura Denki Kabushiki Kaisha Method of manufacturing a semiconductor device
US4381201A (en) * 1980-03-11 1983-04-26 Fujitsu Limited Method for production of semiconductor devices
JPS56144572A (en) * 1980-04-10 1981-11-10 Seiko Epson Corp Semiconductor device
JPS56147473A (en) * 1980-04-18 1981-11-16 Nec Corp Read only semiconductor memory
US4398335A (en) * 1980-12-09 1983-08-16 Fairchild Camera & Instrument Corporation Multilayer metal silicide interconnections for integrated circuits
JPS57126147A (en) * 1981-01-28 1982-08-05 Fujitsu Ltd Manufacture of semiconductor device
JPS57130461A (en) * 1981-02-06 1982-08-12 Hitachi Ltd Semiconductor memory storage
US4406349A (en) * 1981-05-19 1983-09-27 Andrew Vilchek Escape apparatus
US4378628A (en) * 1981-08-27 1983-04-05 Bell Telephone Laboratories, Incorporated Cobalt silicide metallization for semiconductor integrated circuits
JPS5873130A (ja) * 1981-10-28 1983-05-02 Toshiba Corp 半導体単結晶の評価装置
JPS5955054A (ja) * 1982-09-24 1984-03-29 Hitachi Ltd 半導体装置の製造方法
US4443930A (en) * 1982-11-30 1984-04-24 Ncr Corporation Manufacturing method of silicide gates and interconnects for integrated circuits
US4617193A (en) * 1983-06-16 1986-10-14 Digital Equipment Corporation Planar interconnect for integrated circuits
US4513494A (en) * 1983-07-19 1985-04-30 American Microsystems, Incorporated Late mask process for programming read only memories
US4451326A (en) * 1983-09-07 1984-05-29 Advanced Micro Devices, Inc. Method for interconnecting metallic layers
US4523372A (en) * 1984-05-07 1985-06-18 Motorola, Inc. Process for fabricating semiconductor device

Also Published As

Publication number Publication date
US4649412A (en) 1987-03-10
EP0145955B1 (de) 1989-02-01
EP0145955A2 (de) 1985-06-26
US4892841A (en) 1990-01-09
EP0145955A3 (en) 1985-07-31
JPS60116167A (ja) 1985-06-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee