DE3434583C2 - - Google Patents
Info
- Publication number
- DE3434583C2 DE3434583C2 DE3434583A DE3434583A DE3434583C2 DE 3434583 C2 DE3434583 C2 DE 3434583C2 DE 3434583 A DE3434583 A DE 3434583A DE 3434583 A DE3434583 A DE 3434583A DE 3434583 C2 DE3434583 C2 DE 3434583C2
- Authority
- DE
- Germany
- Prior art keywords
- coating
- substrate
- sio2
- mgf2
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 64
- 238000000576 coating method Methods 0.000 claims description 56
- 239000000758 substrate Substances 0.000 claims description 56
- 239000011248 coating agent Substances 0.000 claims description 50
- 239000006117 anti-reflective coating Substances 0.000 claims description 34
- 230000003287 optical effect Effects 0.000 claims description 32
- 229910052681 coesite Inorganic materials 0.000 claims description 31
- 229910052906 cristobalite Inorganic materials 0.000 claims description 31
- 239000000377 silicon dioxide Substances 0.000 claims description 31
- 235000012239 silicon dioxide Nutrition 0.000 claims description 31
- 229910052682 stishovite Inorganic materials 0.000 claims description 31
- 229910052905 tridymite Inorganic materials 0.000 claims description 31
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 27
- 239000000203 mixture Substances 0.000 claims description 21
- 239000004925 Acrylic resin Substances 0.000 claims description 9
- 229920000178 Acrylic resin Polymers 0.000 claims description 9
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000004033 plastic Substances 0.000 claims description 8
- 229920003023 plastic Polymers 0.000 claims description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 6
- 229910020187 CeF3 Inorganic materials 0.000 claims description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 4
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- 229910017557 NdF3 Inorganic materials 0.000 claims 1
- -1 PbF3 Inorganic materials 0.000 claims 1
- 239000004793 Polystyrene Substances 0.000 claims 1
- 229910009973 Ti2O3 Inorganic materials 0.000 claims 1
- 229920001893 acrylonitrile styrene Polymers 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 229910052593 corundum Inorganic materials 0.000 claims 1
- 229910001610 cryolite Inorganic materials 0.000 claims 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Inorganic materials [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims 1
- 239000004417 polycarbonate Substances 0.000 claims 1
- 229920000515 polycarbonate Polymers 0.000 claims 1
- 229920002223 polystyrene Polymers 0.000 claims 1
- SCUZVMOVTVSBLE-UHFFFAOYSA-N prop-2-enenitrile;styrene Chemical compound C=CC#N.C=CC1=CC=CC=C1 SCUZVMOVTVSBLE-UHFFFAOYSA-N 0.000 claims 1
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Inorganic materials [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- GQUJEMVIKWQAEH-UHFFFAOYSA-N titanium(III) oxide Chemical compound O=[Ti]O[Ti]=O GQUJEMVIKWQAEH-UHFFFAOYSA-N 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 43
- 239000000463 material Substances 0.000 description 32
- 238000001704 evaporation Methods 0.000 description 25
- 230000008020 evaporation Effects 0.000 description 24
- 230000003595 spectral effect Effects 0.000 description 21
- 238000012360 testing method Methods 0.000 description 13
- 238000007738 vacuum evaporation Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 238000007740 vapor deposition Methods 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- 238000010884 ion-beam technique Methods 0.000 description 7
- 239000002356 single layer Substances 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 230000005260 alpha ray Effects 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910004369 ThO2 Inorganic materials 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
- C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/29—Mixtures
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31507—Of polycarbonate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31667—Next to addition polymer from unsaturated monomers, or aldehyde or ketone condensation product
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58173848A JPH0642003B2 (ja) | 1983-09-20 | 1983-09-20 | 光学部品の反射防止膜とその形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3434583A1 DE3434583A1 (de) | 1985-04-11 |
| DE3434583C2 true DE3434583C2 (en, 2012) | 1990-07-12 |
Family
ID=15968275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3434583A Granted DE3434583A1 (de) | 1983-09-20 | 1984-09-20 | Reflexvermindernde beschichtung fuer ein optisches bauteil und verfahren zu ihrer ausbildung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4599272A (en, 2012) |
| JP (1) | JPH0642003B2 (en, 2012) |
| DE (1) | DE3434583A1 (en, 2012) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61117503A (ja) * | 1984-11-14 | 1986-06-04 | Shinku Kikai Kogyo Kk | フツ化物被膜の形成方法 |
| WO1986006304A1 (fr) * | 1985-04-30 | 1986-11-06 | Nambu Electric Co., Ltd. | Appareil de conditionnement d'oeufs |
| US5080688A (en) * | 1985-12-20 | 1992-01-14 | Cohen Michael L | Colored plastic lens reducing visual noise for VDT viewers |
| US4911546A (en) * | 1985-12-20 | 1990-03-27 | Cohen Michael L | Lens reducing visual noise for VDT viewers |
| FR2598520B1 (fr) * | 1986-01-21 | 1994-01-28 | Seiko Epson Corp | Pellicule protectrice minerale |
| US5783299A (en) * | 1986-01-21 | 1998-07-21 | Seiko Epson Corporation | Polarizer plate with anti-stain layer |
| US4783373A (en) * | 1986-04-18 | 1988-11-08 | Optical Coating Laboratory, Inc. | Article with thin film coating having an enhanced emissivity and reduced absorption of radiant energy |
| DE3786835T2 (de) * | 1986-05-29 | 1994-02-24 | Sumitomo Chemical Co | Nicht-reflektierende Scheibe für eine Anzeigeeinheit. |
| US5759643A (en) * | 1987-01-16 | 1998-06-02 | Seiko Epson Corporation | Polarizing plate and method of production |
| US4815962A (en) * | 1987-12-11 | 1989-03-28 | Polaroid Corporation | Process for coating synthetic optical substrates |
| US4980220A (en) * | 1988-01-25 | 1990-12-25 | Phillips Petroleum Company | Iridescent plastics and process for producing the same |
| JPH01273001A (ja) * | 1988-04-25 | 1989-10-31 | Olympus Optical Co Ltd | 合成樹脂製光学部品の反射防止膜 |
| AU652220B2 (en) * | 1991-02-15 | 1994-08-18 | Toray Industries, Inc. | Plastic optical articles |
| JPH0643304A (ja) * | 1992-07-24 | 1994-02-18 | Nikon Corp | 反射防止膜及び反射防止膜付き光学部品 |
| US5747152A (en) * | 1993-12-02 | 1998-05-05 | Dai Nippon Printing Co., Ltd. | Transparent functional membrane containing functional ultrafine particles, transparent functional film, and process for producing the same |
| FR2727107B1 (fr) * | 1994-11-21 | 1996-12-27 | Saint Gobain Vitrage | Vitrage muni d'au moins une couche mince et son procede d'obtention |
| US5662395A (en) * | 1995-06-07 | 1997-09-02 | Nova Solutions, Inc. | Underdesk computer desk structure with antireflecting viewing window |
| WO1997008357A1 (en) * | 1995-08-30 | 1997-03-06 | Nashua Corporation | Anti-reflective coating |
| US5902634A (en) * | 1996-01-17 | 1999-05-11 | Courtaulds Performance Films | Permeable solar control film |
| FR2745284B1 (fr) * | 1996-02-22 | 1998-04-30 | Saint Gobain Vitrage | Substrat transparent muni d'un revetement de couches minces |
| US6172812B1 (en) | 1997-01-27 | 2001-01-09 | Peter D. Haaland | Anti-reflection coatings and coated articles |
| BR9714213A (pt) * | 1997-01-27 | 2000-02-29 | Peter D Haaland | Revestimentos, processos e aparelho para reduzir a reflexão de substratos ópticos. |
| CN1130575C (zh) * | 1997-05-16 | 2003-12-10 | 保谷株式会社 | 具有抗反射膜的塑料光学器件以及用来使抗反射膜的厚度均一的机构 |
| US5993898A (en) * | 1997-05-19 | 1999-11-30 | Nikon Corporation | Fabrication method and structure for multilayer optical anti-reflection coating, and optical component and optical system using multilayer optical anti-reflection coating |
| EP0945254B1 (en) * | 1998-03-17 | 2004-12-22 | Chi Mei Optoelectronics Corporation | Material comprising an anti-reflective coating on a flexible glass substrate |
| JP3533950B2 (ja) * | 1998-08-07 | 2004-06-07 | トヨタ自動車株式会社 | 非線形光学シリカ薄膜の製造方法及び非線形光学シリカ素子 |
| CA2281265C (en) * | 1998-09-22 | 2003-12-16 | Toyota Jidosha Kabushiki Kaisha | Method for manufacturing a nonlinear optical thin film |
| WO2000039626A1 (en) * | 1998-12-31 | 2000-07-06 | Optical Coating Laboratory, Inc. | Wavelength selective optical switch |
| US6582823B1 (en) | 1999-04-30 | 2003-06-24 | North Carolina State University | Wear-resistant polymeric articles and methods of making the same |
| JP2001295032A (ja) * | 2000-02-10 | 2001-10-26 | Itochu Fine Chemical Corp | 光学複合薄膜の形成方法およびそれを用いた光学物品 |
| US6532112B2 (en) * | 2001-04-18 | 2003-03-11 | Applied Vacuum Coating Technologies Co., Ltd. | Anti-reflection conducting coating |
| US6942924B2 (en) * | 2001-10-31 | 2005-09-13 | Chemat Technology, Inc. | Radiation-curable anti-reflective coating system |
| US7059335B2 (en) * | 2002-01-31 | 2006-06-13 | Novartis Ag | Process for treating moulds or mould halves for the production of ophthalmic lenses |
| US20040005416A1 (en) * | 2002-07-03 | 2004-01-08 | Cosmos Vacuum Technology Corporation | Method for making an anti-reflection coating on a substrate for the production of a polarizer |
| DE102004027842A1 (de) * | 2004-06-08 | 2006-01-12 | Institut für Neue Materialien Gemeinnützige GmbH | Abrieb- und kratzfeste Beschichtungen mit niedriger Brechzahl auf einem Substrat |
| JP2009007636A (ja) * | 2007-06-28 | 2009-01-15 | Sony Corp | 低屈折率膜及びその成膜方法、並びに反射防止膜 |
| US20100101937A1 (en) * | 2008-10-29 | 2010-04-29 | Applied Vacuum Coating Technologies Co., Ltd. | Method of fabricating transparent conductive film |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2490263A (en) * | 1943-01-20 | 1949-12-06 | Libbey Owens Ford Glass Co | Method of producing low light reflecting films on glass surfaces |
| US2641954A (en) * | 1950-05-06 | 1953-06-16 | Eastman Kodak Co | Protective coatings for optical elements and methods for applying them |
| US3356522A (en) * | 1964-02-10 | 1967-12-05 | Mc Donnell Douglas Corp | Polycarbonate film containing an antireflection coating |
| US3356523A (en) * | 1964-02-10 | 1967-12-05 | Mc Donnell Douglas Corp | Polystyrene film containing an antireflection coating |
| US3958042A (en) * | 1971-04-05 | 1976-05-18 | Agency Of Industrial Science & Technology | Method for manufacture of reflection-proof film |
| US3804491A (en) * | 1971-08-16 | 1974-04-16 | Olympus Optical Co | Multilayer reflection proof film |
| US3984581A (en) * | 1973-02-28 | 1976-10-05 | Carl Zeiss-Stiftung | Method for the production of anti-reflection coatings on optical elements made of transparent organic polymers |
| DE2457474C3 (de) * | 1974-12-05 | 1978-10-19 | Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln | Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper |
| JPS5226237A (en) * | 1975-08-25 | 1977-02-26 | Ulvac Corp | Process for treating the surface of a lens made of synthesized plastics |
| US4108751A (en) * | 1977-06-06 | 1978-08-22 | King William J | Ion beam implantation-sputtering |
| US4168113A (en) * | 1977-07-05 | 1979-09-18 | American Optical Corporation | Glass lens with ion-exchanged antireflection coating and process for manufacture thereof |
| JPS5565239A (en) * | 1978-11-10 | 1980-05-16 | Nippon Kogaku Kk <Nikon> | Method of forming film of titanium oxide on plastic base plate |
| US4310614A (en) * | 1979-03-19 | 1982-01-12 | Xerox Corporation | Method and apparatus for pretreating and depositing thin films on substrates |
| GB2051511A (en) * | 1979-06-18 | 1981-01-14 | Ibm | Stabilized oscillators |
-
1983
- 1983-09-20 JP JP58173848A patent/JPH0642003B2/ja not_active Expired - Lifetime
-
1984
- 1984-09-07 US US06/648,729 patent/US4599272A/en not_active Expired - Lifetime
- 1984-09-20 DE DE3434583A patent/DE3434583A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0642003B2 (ja) | 1994-06-01 |
| US4599272A (en) | 1986-07-08 |
| JPS6064301A (ja) | 1985-04-12 |
| DE3434583A1 (de) | 1985-04-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8331 | Complete revocation |