DE3381128D1 - Verfahren zur herstellung einer isolationszone. - Google Patents

Verfahren zur herstellung einer isolationszone.

Info

Publication number
DE3381128D1
DE3381128D1 DE8383307091T DE3381128T DE3381128D1 DE 3381128 D1 DE3381128 D1 DE 3381128D1 DE 8383307091 T DE8383307091 T DE 8383307091T DE 3381128 T DE3381128 T DE 3381128T DE 3381128 D1 DE3381128 D1 DE 3381128D1
Authority
DE
Germany
Prior art keywords
producing
insulation zone
insulation
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8383307091T
Other languages
English (en)
Inventor
Tetsu Fukano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP57209173A external-priority patent/JPS5999738A/ja
Priority claimed from JP57209172A external-priority patent/JPS5999737A/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3381128D1 publication Critical patent/DE3381128D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/763—Polycrystalline semiconductor regions
DE8383307091T 1982-11-29 1983-11-21 Verfahren zur herstellung einer isolationszone. Expired - Fee Related DE3381128D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP57209173A JPS5999738A (ja) 1982-11-29 1982-11-29 半導体装置の製造方法
JP57209172A JPS5999737A (ja) 1982-11-29 1982-11-29 半導体装置の製造方法

Publications (1)

Publication Number Publication Date
DE3381128D1 true DE3381128D1 (de) 1990-02-22

Family

ID=26517270

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383307091T Expired - Fee Related DE3381128D1 (de) 1982-11-29 1983-11-21 Verfahren zur herstellung einer isolationszone.

Country Status (5)

Country Link
US (1) US4465532A (de)
EP (1) EP0113517B1 (de)
KR (1) KR860001056B1 (de)
CA (1) CA1204525A (de)
DE (1) DE3381128D1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4570325A (en) * 1983-12-16 1986-02-18 Kabushiki Kaisha Toshiba Manufacturing a field oxide region for a semiconductor device
GB8406432D0 (en) * 1984-03-12 1984-04-18 British Telecomm Semiconductor devices
FR2610140B1 (fr) * 1987-01-26 1990-04-20 Commissariat Energie Atomique Circuit integre cmos et procede de fabrication de ses zones d'isolation electrique
US4799990A (en) * 1987-04-30 1989-01-24 Ibm Corporation Method of self-aligning a trench isolation structure to an implanted well region
US5290396A (en) * 1991-06-06 1994-03-01 Lsi Logic Corporation Trench planarization techniques
US5338398A (en) * 1991-03-28 1994-08-16 Applied Materials, Inc. Tungsten silicide etch process selective to photoresist and oxide
US5248625A (en) 1991-06-06 1993-09-28 Lsi Logic Corporation Techniques for forming isolation structures
DE4219592C2 (de) * 1991-06-17 2001-12-06 Gold Star Electronics Verfahren zur Ausbildung eines Graben-Isolationsbereichs mittels einer Reaktionsschicht
FR2683944B1 (fr) * 1991-11-14 1994-02-18 Sgs Thomson Microelectronics Sa Procede de gravure d'un sillon profond.
US5354706A (en) * 1993-03-02 1994-10-11 Lsi Logic Corporation Formation of uniform dimension conductive lines on a semiconductor wafer
US5356828A (en) * 1993-07-01 1994-10-18 Digital Equipment Corporation Method of forming micro-trench isolation regions in the fabrication of semiconductor devices
JPH07193121A (ja) * 1993-12-27 1995-07-28 Toshiba Corp 半導体装置の製造方法
US5880033A (en) * 1996-06-17 1999-03-09 Applied Materials, Inc. Method for etching metal silicide with high selectivity to polysilicon
JP3058112B2 (ja) * 1997-02-27 2000-07-04 日本電気株式会社 半導体装置およびその製造方法
US5960297A (en) * 1997-07-02 1999-09-28 Kabushiki Kaisha Toshiba Shallow trench isolation structure and method of forming the same
US6872322B1 (en) 1997-11-12 2005-03-29 Applied Materials, Inc. Multiple stage process for cleaning process chambers
US6136211A (en) * 1997-11-12 2000-10-24 Applied Materials, Inc. Self-cleaning etch process
US6797188B1 (en) 1997-11-12 2004-09-28 Meihua Shen Self-cleaning process for etching silicon-containing material
US6322714B1 (en) 1997-11-12 2001-11-27 Applied Materials Inc. Process for etching silicon-containing material on substrates
US6527968B1 (en) 2000-03-27 2003-03-04 Applied Materials Inc. Two-stage self-cleaning silicon etch process
US6905800B1 (en) 2000-11-21 2005-06-14 Stephen Yuen Etching a substrate in a process zone
US6852242B2 (en) 2001-02-23 2005-02-08 Zhi-Wen Sun Cleaning of multicompositional etchant residues
KR100792409B1 (ko) * 2004-10-12 2008-01-09 주식회사 하이닉스반도체 텅스텐막을 희생 하드마스크로 이용하는 반도체소자 제조방법
US8118946B2 (en) 2007-11-30 2012-02-21 Wesley George Lau Cleaning process residues from substrate processing chamber components
US8263502B2 (en) * 2008-08-13 2012-09-11 Synos Technology, Inc. Forming substrate structure by filling recesses with deposition material

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2251823A1 (de) * 1972-10-21 1974-05-02 Itt Ind Gmbh Deutsche Halbleiterelement und herstellungsverfahren
US4282647A (en) * 1978-04-04 1981-08-11 Standard Microsystems Corporation Method of fabricating high density refractory metal gate MOS integrated circuits utilizing the gate as a selective diffusion and oxidation mask
JPS5636143A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Manufacture of semiconductor device
DE3023410A1 (de) * 1980-06-23 1982-01-07 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung von mos-strukturen
US4333965A (en) * 1980-09-15 1982-06-08 General Electric Company Method of making integrated circuits
US4373990A (en) * 1981-01-08 1983-02-15 Bell Telephone Laboratories, Incorporated Dry etching aluminum
JPS5848936A (ja) * 1981-09-10 1983-03-23 Fujitsu Ltd 半導体装置の製造方法
JPS5864044A (ja) * 1981-10-14 1983-04-16 Toshiba Corp 半導体装置の製造方法
US4390393A (en) * 1981-11-12 1983-06-28 General Electric Company Method of forming an isolation trench in a semiconductor substrate
US4422897A (en) * 1982-05-25 1983-12-27 Massachusetts Institute Of Technology Process for selectively etching silicon

Also Published As

Publication number Publication date
CA1204525A (en) 1986-05-13
KR840006729A (ko) 1984-12-01
EP0113517A2 (de) 1984-07-18
KR860001056B1 (ko) 1986-08-01
EP0113517B1 (de) 1990-01-17
EP0113517A3 (en) 1986-06-11
US4465532A (en) 1984-08-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee