DE3377177D1 - Electron beam exposure system - Google Patents

Electron beam exposure system

Info

Publication number
DE3377177D1
DE3377177D1 DE8383305721T DE3377177T DE3377177D1 DE 3377177 D1 DE3377177 D1 DE 3377177D1 DE 8383305721 T DE8383305721 T DE 8383305721T DE 3377177 T DE3377177 T DE 3377177T DE 3377177 D1 DE3377177 D1 DE 3377177D1
Authority
DE
Germany
Prior art keywords
electron beam
beam exposure
exposure system
electron
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383305721T
Other languages
English (en)
Inventor
Hiroshi C O Fujitsu Lim Yasuda
Haruo C O Fujitsu L Tsuchikawa
Junichi C O Fujitsu Limite Kai
Koichi C O Fujitsu L Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3377177D1 publication Critical patent/DE3377177D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control
    • H01J37/3026—Patterning strategy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31761—Patterning strategy
    • H01J2237/31764—Dividing into sub-patterns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31776—Shaped beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)
DE8383305721T 1982-09-27 1983-09-26 Electron beam exposure system Expired DE3377177D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57167919A JPS5957431A (ja) 1982-09-27 1982-09-27 電子ビ−ム露光装置

Publications (1)

Publication Number Publication Date
DE3377177D1 true DE3377177D1 (en) 1988-07-28

Family

ID=15858481

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383305721T Expired DE3377177D1 (en) 1982-09-27 1983-09-26 Electron beam exposure system

Country Status (4)

Country Link
US (1) US4586141A (de)
EP (1) EP0104922B1 (de)
JP (1) JPS5957431A (de)
DE (1) DE3377177D1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4692579A (en) * 1984-05-18 1987-09-08 Hitachi, Ltd. Electron beam lithography apparatus
DE3428802A1 (de) * 1984-08-04 1986-02-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur steuerung des fokussierungszustandes eines abgelenkten elektronenstrahls
JPS6229135A (ja) * 1985-07-29 1987-02-07 Advantest Corp 荷電粒子ビ−ム露光方法及びこの方法を用いた荷電粒子ビ−ム露光装置
JPH0646550B2 (ja) * 1985-08-19 1994-06-15 株式会社東芝 電子ビ−ム定位置照射制御方法および電子ビ−ム定位置照射制御装置
JPS6246518A (ja) * 1985-08-23 1987-02-28 Toshiba Corp 荷電ビ−ム描画方法
JPH0691005B2 (ja) * 1985-12-24 1994-11-14 株式会社東芝 荷電ビ−ム描画方法
JPS63199421A (ja) * 1987-02-16 1988-08-17 Toshiba Corp 荷電ビ−ム描画方法
JPH0622195B2 (ja) * 1987-02-26 1994-03-23 東芝機械株式会社 荷電ビ−ム描画装置
JPH0616405B2 (ja) * 1987-09-02 1994-03-02 株式会社日立製作所 電子顕微鏡
ATE108283T1 (de) * 1988-11-10 1994-07-15 Balzers Hochvakuum Verfahren zur steuerung der verdampfungsratenverteilung eines elektronenstrahls.
JPH03166713A (ja) * 1989-11-27 1991-07-18 Mitsubishi Electric Corp 電子ビーム露光方法
JP3043031B2 (ja) * 1990-06-01 2000-05-22 富士通株式会社 露光データ作成方法，パターン露光装置及びパターン露光方法
US5103101A (en) * 1991-03-04 1992-04-07 Etec Systems, Inc. Multiphase printing for E-beam lithography
US5159201A (en) * 1991-07-26 1992-10-27 International Business Machines Corporation Shape decompositon system and method
US5251140A (en) * 1991-07-26 1993-10-05 International Business Machines Corporation E-beam control data compaction system and method
JP2501726B2 (ja) * 1991-10-08 1996-05-29 インターナショナル・ビジネス・マシーンズ・コーポレイション コンピュ―タ・イメ―ジ生成装置及びデ―タ減縮方法
JP3212360B2 (ja) * 1992-06-16 2001-09-25 株式会社日立製作所 マスクの製造方法、および半導体集積回路装置の製造方法
EP0729642B1 (de) * 1993-12-08 1997-07-02 Leica Lithography Systems Ltd. Verfahren zur bildung eines musters mittels elektronenstrahls
US5506793A (en) * 1994-01-14 1996-04-09 Gerber Systems Corporation Method and apparatus for distortion compensation in an automatic optical inspection system
JP3512954B2 (ja) * 1996-03-06 2004-03-31 富士通株式会社 パターン近接効果補正方法、プログラム、及び装置
US6645677B1 (en) 2000-09-18 2003-11-11 Micronic Laser Systems Ab Dual layer reticle blank and manufacturing process
JP2004193208A (ja) * 2002-12-09 2004-07-08 Canon Inc 情報処理装置
JP2007043078A (ja) * 2005-07-04 2007-02-15 Nuflare Technology Inc 描画装置及び描画方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US31630A (en) * 1861-03-05 Press
US3949228A (en) * 1973-09-19 1976-04-06 Ibm Corporation Method for controlling an electron beam
US4393312A (en) * 1976-02-05 1983-07-12 Bell Telephone Laboratories, Incorporated Variable-spot scanning in an electron beam exposure system
GB1605087A (en) * 1977-05-31 1981-12-16 Rikagaku Kenkyusho Method for shaping a beam of electrically charged particles
US4218621A (en) * 1977-06-15 1980-08-19 Vlsi Technology Research Association Electron beam exposure apparatus
JPS5412675A (en) * 1977-06-30 1979-01-30 Jeol Ltd Electon beam exposure method
US4132898A (en) * 1977-11-01 1979-01-02 Fujitsu Limited Overlapping boundary electron exposure system method and apparatus
US4199689A (en) * 1977-12-21 1980-04-22 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam exposing method and electron beam apparatus
DD134582A1 (de) * 1978-01-19 1979-03-07 Eberhard Hahn Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage
US4243866A (en) * 1979-01-11 1981-01-06 International Business Machines Corporation Method and apparatus for forming a variable size electron beam
JPS5783030A (en) * 1980-11-11 1982-05-24 Fujitsu Ltd Exposure of electron beam
EP0053225B1 (de) * 1980-11-28 1985-03-13 International Business Machines Corporation Elektronenstrahlsystem und Verwendungsverfahren
US4469950A (en) * 1982-03-04 1984-09-04 Varian Associates, Inc. Charged particle beam exposure system utilizing variable line scan

Also Published As

Publication number Publication date
JPS5957431A (ja) 1984-04-03
EP0104922A2 (de) 1984-04-04
EP0104922B1 (de) 1988-06-22
US4586141A (en) 1986-04-29
EP0104922A3 (en) 1985-11-06
JPH0336299B2 (de) 1991-05-31

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Legal Events

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