DE337530T1 - Elektronische versorgung fuer eine ionenpumpe. - Google Patents
Elektronische versorgung fuer eine ionenpumpe.Info
- Publication number
- DE337530T1 DE337530T1 DE198989200709T DE89200709T DE337530T1 DE 337530 T1 DE337530 T1 DE 337530T1 DE 198989200709 T DE198989200709 T DE 198989200709T DE 89200709 T DE89200709 T DE 89200709T DE 337530 T1 DE337530 T1 DE 337530T1
- Authority
- DE
- Germany
- Prior art keywords
- ion pump
- electronic supply
- electronic
- supply
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT67345/88A IT1219207B (it) | 1988-04-14 | 1988-04-14 | Alimentatore elettronico perfezionato per pompa ionica |
Publications (1)
Publication Number | Publication Date |
---|---|
DE337530T1 true DE337530T1 (de) | 1990-02-08 |
Family
ID=11301632
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE89200709T Expired - Lifetime DE68907975T2 (de) | 1988-04-14 | 1989-03-20 | Elektronische Versorgung für eine Ionenpumpe. |
DE198989200709T Pending DE337530T1 (de) | 1988-04-14 | 1989-03-20 | Elektronische versorgung fuer eine ionenpumpe. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE89200709T Expired - Lifetime DE68907975T2 (de) | 1988-04-14 | 1989-03-20 | Elektronische Versorgung für eine Ionenpumpe. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5017836A (de) |
EP (1) | EP0337530B1 (de) |
JP (1) | JPH01307153A (de) |
DE (2) | DE68907975T2 (de) |
IT (1) | IT1219207B (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4237971B4 (de) † | 1992-11-11 | 2004-05-06 | Unaxis Deutschland Holding Gmbh | Vakuumpumpe mit Wandler |
JP4475646B2 (ja) * | 2004-08-27 | 2010-06-09 | キヤノン株式会社 | 画像表示装置 |
US7456465B2 (en) * | 2005-09-30 | 2008-11-25 | Freescale Semiconductor, Inc. | Split gate memory cell and method therefor |
GB2586971B (en) * | 2019-09-06 | 2023-11-01 | Edwards Vacuum Llc | Reducing plasma formation in an ion pump |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB987279A (en) * | 1961-12-15 | 1965-03-24 | Varian Associates | Gas discharge detection apparatus |
US3186632A (en) * | 1963-02-11 | 1965-06-01 | Cons Vacuum Corp | Ionization vacuum pump |
US3429501A (en) * | 1965-08-30 | 1969-02-25 | Bendix Corp | Ion pump |
GB1129557A (en) * | 1966-05-17 | 1968-10-09 | Mullard Ltd | Improvements in or relating to methods of controlling the pump speed of a sputter ion pump |
JPS5854465B2 (ja) * | 1981-06-22 | 1983-12-05 | 東北金属工業株式会社 | イオンポンプ用電源 |
JPS5994912A (ja) * | 1982-11-22 | 1984-05-31 | Toshiba Corp | n次元デイジタルフイルタリング装置 |
IT1179833B (it) * | 1984-11-28 | 1987-09-16 | Varian Spa | Dispositivo elettronico per l alimentazione di una pompa ionica a due tensioni differenziate e per la misura perfezionata della pressione vigente in detta pompa |
JPS6354245U (de) * | 1986-09-26 | 1988-04-12 |
-
1988
- 1988-04-14 IT IT67345/88A patent/IT1219207B/it active
-
1989
- 1989-03-20 DE DE89200709T patent/DE68907975T2/de not_active Expired - Lifetime
- 1989-03-20 EP EP89200709A patent/EP0337530B1/de not_active Expired - Lifetime
- 1989-03-20 DE DE198989200709T patent/DE337530T1/de active Pending
- 1989-03-30 US US07/331,636 patent/US5017836A/en not_active Expired - Lifetime
- 1989-04-01 JP JP1080268A patent/JPH01307153A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
IT1219207B (it) | 1990-05-03 |
EP0337530A3 (en) | 1990-02-07 |
DE68907975D1 (de) | 1993-09-09 |
EP0337530B1 (de) | 1993-08-04 |
EP0337530A2 (de) | 1989-10-18 |
DE68907975T2 (de) | 1993-11-11 |
JPH01307153A (ja) | 1989-12-12 |
JPH0586024B2 (de) | 1993-12-09 |
IT8867345A0 (it) | 1988-04-14 |
US5017836A (en) | 1991-05-21 |
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