GB987279A - Gas discharge detection apparatus - Google Patents

Gas discharge detection apparatus

Info

Publication number
GB987279A
GB987279A GB4679462A GB4679462A GB987279A GB 987279 A GB987279 A GB 987279A GB 4679462 A GB4679462 A GB 4679462A GB 4679462 A GB4679462 A GB 4679462A GB 987279 A GB987279 A GB 987279A
Authority
GB
United Kingdom
Prior art keywords
switch
voltage
current
transformer
relay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4679462A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB987279A publication Critical patent/GB987279A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/68Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
    • G01N27/70Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas and measuring current or voltage

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

987,279. Leak detecting apparatus. VARIAN ASSOCIATES. Dec. 11, 1962 [Dec. 15, 1961], No. 46794/62. Heading G1N. A leak detector for a gas discharge device 13 operating at very low pressure within a vacuum tight envelope 14 to be monitored comprises a power supply 12 for the discharge device 13 means 75 (Fig.2) for providing a voltage proportional to the total current drawn by the device 13, means 154 to provide a variable voltage in opposition to the first voltage and means 16 for measuring the difference between the two voltages. In the embodiment shown in Fig. 1 the power supply 12 includes a constant voltage transformer 20 which is bypassed unless the current drawn by the discharge device 13 which is a sputter ion pump is below a certain value when relay 13 opens removing the current from relay 36 and connecting the primary winding of the transformer 34 to the secondary winding of the constant voltage transformer. The current passing through the sputter pump 13 produces a voltage across resistors 75 which is compared with the voltage produced on potentiometers 120, 123 by a long tailed pair 95, 96 giving an indication on meter 135. If an external record is required switch 103 alters the differential amplifier circuit and provides a signal at 145 which has one side earthed for use with external equipment. To operate the device switch 25 is depressed switching in relay 21 which is self holding, and switch 42 is closed short circuiting relay 58. As the sputter pump 13 reduces the pressure the current falls to a steady value which is so low that the constant voltage transformer 20 is switched into the power supply circuit. Switch 42 is now opened so that too large a current through resistor 55 switches relay 58 thus removing the power. Switch 74 is then adjusted to give an indication on meter 67 and then the D.C. voltage source provided by potentiometers 120 and 123 is adjusted in conjunction with sensitivity switch 129 to give a half scale reading on the sensitive meter 135. To test for leaks a gas is now sprayed on the discharge apparatus and any resultant change in equilibrium current is detected on meter 135. If two gases are used, say oxygen and argon, then deflections will occur in opposite directions further improving the sensitivity. It is stated that the detector is useful for the control of the manufacture of discharge devices. The connection of the point 51 to the core of transformer 34 is stated to reduce the effect of transformer leakage currents.
GB4679462A 1961-12-15 1962-12-11 Gas discharge detection apparatus Expired GB987279A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15979661A 1961-12-15 1961-12-15

Publications (1)

Publication Number Publication Date
GB987279A true GB987279A (en) 1965-03-24

Family

ID=22574061

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4679462A Expired GB987279A (en) 1961-12-15 1962-12-11 Gas discharge detection apparatus

Country Status (2)

Country Link
DE (1) DE1473644A1 (en)
GB (1) GB987279A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518532A (en) * 1967-03-10 1970-06-30 Edwards High Vacuum Int Ltd Penning pump power supplies
US5017836A (en) * 1988-04-14 1991-05-21 Varian, S.P.A. Electronic feeder for an ion pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518532A (en) * 1967-03-10 1970-06-30 Edwards High Vacuum Int Ltd Penning pump power supplies
US5017836A (en) * 1988-04-14 1991-05-21 Varian, S.P.A. Electronic feeder for an ion pump

Also Published As

Publication number Publication date
DE1473644A1 (en) 1969-08-07

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