IT8867345A0 - Alimentatore elettronico perfezionato per pompa ionica - Google Patents

Alimentatore elettronico perfezionato per pompa ionica

Info

Publication number
IT8867345A0
IT8867345A0 IT8867345A IT6734588A IT8867345A0 IT 8867345 A0 IT8867345 A0 IT 8867345A0 IT 8867345 A IT8867345 A IT 8867345A IT 6734588 A IT6734588 A IT 6734588A IT 8867345 A0 IT8867345 A0 IT 8867345A0
Authority
IT
Italy
Prior art keywords
power supply
electronic power
ion pump
improved electronic
improved
Prior art date
Application number
IT8867345A
Other languages
English (en)
Other versions
IT1219207B (it
Inventor
Mario Busso
Mauro Audi
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT67345/88A priority Critical patent/IT1219207B/it
Publication of IT8867345A0 publication Critical patent/IT8867345A0/it
Priority to EP89200709A priority patent/EP0337530B1/en
Priority to DE198989200709T priority patent/DE337530T1/de
Priority to DE89200709T priority patent/DE68907975T2/de
Priority to US07/331,636 priority patent/US5017836A/en
Priority to JP1080268A priority patent/JPH01307153A/ja
Application granted granted Critical
Publication of IT1219207B publication Critical patent/IT1219207B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
IT67345/88A 1988-04-14 1988-04-14 Alimentatore elettronico perfezionato per pompa ionica IT1219207B (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT67345/88A IT1219207B (it) 1988-04-14 1988-04-14 Alimentatore elettronico perfezionato per pompa ionica
EP89200709A EP0337530B1 (en) 1988-04-14 1989-03-20 Improved electronic feeder for an ion pump
DE198989200709T DE337530T1 (de) 1988-04-14 1989-03-20 Elektronische versorgung fuer eine ionenpumpe.
DE89200709T DE68907975T2 (de) 1988-04-14 1989-03-20 Elektronische Versorgung für eine Ionenpumpe.
US07/331,636 US5017836A (en) 1988-04-14 1989-03-30 Electronic feeder for an ion pump
JP1080268A JPH01307153A (ja) 1988-04-14 1989-04-01 イオンポンプのための改良された電子給電線

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT67345/88A IT1219207B (it) 1988-04-14 1988-04-14 Alimentatore elettronico perfezionato per pompa ionica

Publications (2)

Publication Number Publication Date
IT8867345A0 true IT8867345A0 (it) 1988-04-14
IT1219207B IT1219207B (it) 1990-05-03

Family

ID=11301632

Family Applications (1)

Application Number Title Priority Date Filing Date
IT67345/88A IT1219207B (it) 1988-04-14 1988-04-14 Alimentatore elettronico perfezionato per pompa ionica

Country Status (5)

Country Link
US (1) US5017836A (it)
EP (1) EP0337530B1 (it)
JP (1) JPH01307153A (it)
DE (2) DE68907975T2 (it)
IT (1) IT1219207B (it)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4237971B4 (de) † 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vakuumpumpe mit Wandler
JP4475646B2 (ja) * 2004-08-27 2010-06-09 キヤノン株式会社 画像表示装置
US7456465B2 (en) * 2005-09-30 2008-11-25 Freescale Semiconductor, Inc. Split gate memory cell and method therefor
GB2586971B (en) * 2019-09-06 2023-11-01 Edwards Vacuum Llc Reducing plasma formation in an ion pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB987279A (en) * 1961-12-15 1965-03-24 Varian Associates Gas discharge detection apparatus
US3186632A (en) * 1963-02-11 1965-06-01 Cons Vacuum Corp Ionization vacuum pump
US3429501A (en) * 1965-08-30 1969-02-25 Bendix Corp Ion pump
GB1129557A (en) * 1966-05-17 1968-10-09 Mullard Ltd Improvements in or relating to methods of controlling the pump speed of a sputter ion pump
JPS5854465B2 (ja) * 1981-06-22 1983-12-05 東北金属工業株式会社 イオンポンプ用電源
JPS5994912A (ja) * 1982-11-22 1984-05-31 Toshiba Corp ｎ次元デイジタルフイルタリング装置
IT1179833B (it) * 1984-11-28 1987-09-16 Varian Spa Dispositivo elettronico per l alimentazione di una pompa ionica a due tensioni differenziate e per la misura perfezionata della pressione vigente in detta pompa
JPS6354245U (it) * 1986-09-26 1988-04-12

Also Published As

Publication number Publication date
DE337530T1 (de) 1990-02-08
US5017836A (en) 1991-05-21
EP0337530A2 (en) 1989-10-18
IT1219207B (it) 1990-05-03
JPH01307153A (ja) 1989-12-12
DE68907975T2 (de) 1993-11-11
DE68907975D1 (de) 1993-09-09
EP0337530A3 (en) 1990-02-07
EP0337530B1 (en) 1993-08-04
JPH0586024B2 (it) 1993-12-09

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TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19990217