DE3374788D1 - Processes for manufacturing double refraction plates and double refraction plates made by such processes - Google Patents

Processes for manufacturing double refraction plates and double refraction plates made by such processes

Info

Publication number
DE3374788D1
DE3374788D1 DE8383305352T DE3374788T DE3374788D1 DE 3374788 D1 DE3374788 D1 DE 3374788D1 DE 8383305352 T DE8383305352 T DE 8383305352T DE 3374788 T DE3374788 T DE 3374788T DE 3374788 D1 DE3374788 D1 DE 3374788D1
Authority
DE
Germany
Prior art keywords
processes
double refraction
refraction plates
manufacturing
plates made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383305352T
Other languages
English (en)
Inventor
Toshio C O Patent Departm Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of DE3374788D1 publication Critical patent/DE3374788D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/23—Bi-refringence
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)
  • Surface Treatment Of Optical Elements (AREA)
DE8383305352T 1982-09-14 1983-09-13 Processes for manufacturing double refraction plates and double refraction plates made by such processes Expired DE3374788D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57158808A JPS5949508A (ja) 1982-09-14 1982-09-14 複屈折板の製造方法

Publications (1)

Publication Number Publication Date
DE3374788D1 true DE3374788D1 (en) 1988-01-14

Family

ID=15679806

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383305352T Expired DE3374788D1 (en) 1982-09-14 1983-09-13 Processes for manufacturing double refraction plates and double refraction plates made by such processes

Country Status (4)

Country Link
US (1) US4657350A (de)
EP (1) EP0103485B1 (de)
JP (1) JPS5949508A (de)
DE (1) DE3374788D1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184625A (ja) * 1984-10-02 1986-04-30 Toyota Motor Corp 液晶防眩鏡とその製造方法
US4712881A (en) * 1985-06-21 1987-12-15 The United States Of America As Represented By The Secretary Of The Army Birefringent artificial dielectric structures
JPS63116122A (ja) * 1986-11-04 1988-05-20 Toyota Motor Corp 液晶素子
US4874664A (en) * 1986-11-21 1989-10-17 Toyota Jidosha Kabushiki Kaisha Birefringent plate and manufacturing method for the same
JP2751140B2 (ja) * 1987-02-20 1998-05-18 株式会社 豊田中央研究所 複屈折板の製造方法
JPS6479609A (en) * 1987-09-21 1989-03-24 Technology Network Inc Apparatus for automatically tracking sun
US5245471A (en) * 1991-06-14 1993-09-14 Tdk Corporation Polarizers, polarizer-equipped optical elements, and method of manufacturing the same
US6072629A (en) * 1997-02-26 2000-06-06 Reveo, Inc. Polarizer devices and methods for making the same
JPH11211914A (ja) * 1998-01-21 1999-08-06 Sumitomo Chem Co Ltd 位相差フィルム
US6304316B1 (en) * 1998-10-22 2001-10-16 Anvik Corporation Microlithography system for high-resolution large-area patterning on curved surfaces
US7239447B2 (en) 2001-05-15 2007-07-03 Carl Zeiss Smt Ag Objective with crystal lenses
JP2004526331A (ja) * 2001-05-15 2004-08-26 カール・ツアイス・エスエムテイ・アーゲー フッ化物結晶レンズを含む対物レンズ
DE10123725A1 (de) 2001-05-15 2002-11-21 Zeiss Carl Projektionsbelichtungsanlage der Mikrolithographie, Optisches System und Herstellverfahren
US7292388B2 (en) 2002-05-08 2007-11-06 Carl Zeiss Smt Ag Lens made of a crystalline material
JP4595586B2 (ja) * 2005-02-28 2010-12-08 ソニー株式会社 反射偏光子およびその製造方法、反射偏光子の製造装置ならびに液晶表示装置
JP2007139814A (ja) * 2005-11-14 2007-06-07 Matsushita Electric Ind Co Ltd 位相差素子
US8094270B2 (en) * 2005-12-06 2012-01-10 Jds Uniphase Corporation Thin-film optical retarders
US20080151245A1 (en) * 2006-12-04 2008-06-26 Carl Zeiss Smt Ag method and a device for processing birefringent and/or optically active materials and phase plate
CA2729017A1 (en) * 2008-05-15 2009-11-19 Basf Corporation Method of making thin film structures and compositions thereof
JP2010210707A (ja) * 2009-03-06 2010-09-24 Seiko Epson Corp 偏光素子の製造方法
JP2010230856A (ja) * 2009-03-26 2010-10-14 Fujifilm Corp 偏光変換素子及び偏光照明光学素子並びに液晶プロジェクタ
US8610986B2 (en) * 2009-04-06 2013-12-17 The Board Of Trustees Of The University Of Illinois Mirror arrays for maskless photolithography and image display
JP6105849B2 (ja) 2011-05-16 2017-03-29 デクセリアルズ株式会社 位相差素子
CN114318239B (zh) * 2021-12-30 2022-10-04 中国科学院西安光学精密机械研究所 一种光学斜蒸镀膜用多角度可调镀膜工件架

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2973686A (en) * 1957-10-11 1961-03-07 Gen Precision Inc Apparatus for spectrophotometric monitoring of thin film coatings
US3698946A (en) * 1969-11-21 1972-10-17 Hughes Aircraft Co Transparent conductive coating and process therefor
US3834792A (en) * 1972-04-10 1974-09-10 Ncr Alignment film for a liquid crystal display cell
CH571068A5 (de) * 1973-05-21 1975-12-31 Balzers Patent Beteilig Ag
DE2412729C3 (de) * 1974-03-16 1982-04-29 Leybold-Heraeus GmbH, 5000 Köln Verfahren und Anordnung zur Regelung der Verdampfungsrate und des Schichtaufbaus bei der Erzeugung optisch wirksamer Dünnschichten
US4049338A (en) * 1974-11-19 1977-09-20 Texas Instruments Incorporated Light polarizing material method and apparatus
US4024291A (en) * 1975-06-17 1977-05-17 Leybold-Heraeus Gmbh & Co. Kg Control of vapor deposition
CH604198A5 (de) * 1975-09-02 1978-08-31 Siemens Ag
DE2827258A1 (de) * 1978-06-21 1980-01-03 Siemens Ag Elektrooptische anzeigevorrichtung, insbesondere fluessigkristallanzeige
US4278710A (en) * 1979-08-27 1981-07-14 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for submicron pattern generation
US4281030A (en) * 1980-05-12 1981-07-28 Bell Telephone Laboratories, Incorporated Implantation of vaporized material on melted substrates

Also Published As

Publication number Publication date
EP0103485B1 (de) 1987-12-02
US4657350A (en) 1987-04-14
EP0103485A1 (de) 1984-03-21
JPS5949508A (ja) 1984-03-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee