DE3371917D1 - Gas flow in plasma treatment processes - Google Patents
Gas flow in plasma treatment processesInfo
- Publication number
- DE3371917D1 DE3371917D1 DE8383301604T DE3371917T DE3371917D1 DE 3371917 D1 DE3371917 D1 DE 3371917D1 DE 8383301604 T DE8383301604 T DE 8383301604T DE 3371917 T DE3371917 T DE 3371917T DE 3371917 D1 DE3371917 D1 DE 3371917D1
- Authority
- DE
- Germany
- Prior art keywords
- gas flow
- plasma treatment
- treatment processes
- processes
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Treatment Of Fiber Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5299282A JPS58170536A (ja) | 1982-03-31 | 1982-03-31 | プラズマ処理方法及びその装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3371917D1 true DE3371917D1 (en) | 1987-07-09 |
Family
ID=12930413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383301604T Expired DE3371917D1 (en) | 1982-03-31 | 1983-03-22 | Gas flow in plasma treatment processes |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0090586B1 (de) |
JP (1) | JPS58170536A (de) |
DE (1) | DE3371917D1 (de) |
IE (1) | IE54233B1 (de) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU548915B2 (en) * | 1983-02-25 | 1986-01-09 | Toyota Jidosha Kabushiki Kaisha | Plasma treatment |
JPS6016424A (ja) * | 1983-07-08 | 1985-01-28 | Fujitsu Ltd | マイクロ波プラズマ処理方法及びその装置 |
DE3429899A1 (de) * | 1983-08-16 | 1985-03-07 | Canon K.K., Tokio/Tokyo | Verfahren zur bildung eines abscheidungsfilms |
US4759947A (en) * | 1984-10-08 | 1988-07-26 | Canon Kabushiki Kaisha | Method for forming deposition film using Si compound and active species from carbon and halogen compound |
JPS6188528A (ja) * | 1984-10-08 | 1986-05-06 | Fujitsu Ltd | エツチング装置 |
JPH0236276Y2 (de) * | 1985-01-10 | 1990-10-03 | ||
US4717585A (en) * | 1985-02-09 | 1988-01-05 | Canon Kabushiki Kaisha | Process for forming deposited film |
US4716048A (en) * | 1985-02-12 | 1987-12-29 | Canon Kabushiki Kaisha | Process for forming deposited film |
US4772486A (en) * | 1985-02-18 | 1988-09-20 | Canon Kabushiki Kaisha | Process for forming a deposited film |
JPS61189626A (ja) * | 1985-02-18 | 1986-08-23 | Canon Inc | 堆積膜形成法 |
US4726963A (en) * | 1985-02-19 | 1988-02-23 | Canon Kabushiki Kaisha | Process for forming deposited film |
US4818563A (en) * | 1985-02-21 | 1989-04-04 | Canon Kabushiki Kaisha | Process for forming deposited film |
US5244698A (en) * | 1985-02-21 | 1993-09-14 | Canon Kabushiki Kaisha | Process for forming deposited film |
US4853251A (en) * | 1985-02-22 | 1989-08-01 | Canon Kabushiki Kaisha | Process for forming deposited film including carbon as a constituent element |
US4801468A (en) * | 1985-02-25 | 1989-01-31 | Canon Kabushiki Kaisha | Process for forming deposited film |
US4595452A (en) * | 1985-03-11 | 1986-06-17 | Oerlikon-Buhrle U.S.A. Inc. | Method and apparatus for plasma etching |
JP2537175B2 (ja) * | 1985-03-27 | 1996-09-25 | キヤノン株式会社 | 機能性堆積膜の製造装置 |
JPS61222534A (ja) * | 1985-03-28 | 1986-10-03 | Anelva Corp | 表面処理方法および装置 |
JP2635021B2 (ja) * | 1985-09-26 | 1997-07-30 | 宣夫 御子柴 | 堆積膜形成法及びこれに用いる装置 |
US4812325A (en) * | 1985-10-23 | 1989-03-14 | Canon Kabushiki Kaisha | Method for forming a deposited film |
US4818564A (en) * | 1985-10-23 | 1989-04-04 | Canon Kabushiki Kaisha | Method for forming deposited film |
JPS62136871A (ja) * | 1985-12-11 | 1987-06-19 | Canon Inc | 光センサ−、その製造方法及びその製造装置 |
JPS62136885A (ja) * | 1985-12-11 | 1987-06-19 | Canon Inc | 光起電力素子、その製造方法及びその製造装置 |
JPH0645886B2 (ja) * | 1985-12-16 | 1994-06-15 | キヤノン株式会社 | 堆積膜形成法 |
JPH0647727B2 (ja) * | 1985-12-24 | 1994-06-22 | キヤノン株式会社 | 堆積膜形成法 |
JPH0647730B2 (ja) * | 1985-12-25 | 1994-06-22 | キヤノン株式会社 | 堆積膜形成法 |
JPH0651906B2 (ja) * | 1985-12-25 | 1994-07-06 | キヤノン株式会社 | 堆積膜形成法 |
US5391232A (en) * | 1985-12-26 | 1995-02-21 | Canon Kabushiki Kaisha | Device for forming a deposited film |
JPH0651909B2 (ja) * | 1985-12-28 | 1994-07-06 | キヤノン株式会社 | 薄膜多層構造の形成方法 |
US5322568A (en) * | 1985-12-28 | 1994-06-21 | Canon Kabushiki Kaisha | Apparatus for forming deposited film |
JPH084070B2 (ja) * | 1985-12-28 | 1996-01-17 | キヤノン株式会社 | 薄膜半導体素子及びその形成法 |
JPH0651908B2 (ja) * | 1985-12-28 | 1994-07-06 | キヤノン株式会社 | 薄膜多層構造の形成方法 |
GB2185758B (en) * | 1985-12-28 | 1990-09-05 | Canon Kk | Method for forming deposited film |
JP2566914B2 (ja) * | 1985-12-28 | 1996-12-25 | キヤノン株式会社 | 薄膜半導体素子及びその形成法 |
JPH084071B2 (ja) * | 1985-12-28 | 1996-01-17 | キヤノン株式会社 | 堆積膜形成法 |
US5366554A (en) * | 1986-01-14 | 1994-11-22 | Canon Kabushiki Kaisha | Device for forming a deposited film |
JPH0685394B2 (ja) * | 1986-01-27 | 1994-10-26 | キヤノン株式会社 | 堆積膜形成装置 |
US4800173A (en) * | 1986-02-20 | 1989-01-24 | Canon Kabushiki Kaisha | Process for preparing Si or Ge epitaxial film using fluorine oxidant |
JPH0666268B2 (ja) * | 1986-06-18 | 1994-08-24 | 日本電気株式会社 | マイクロ波プラズマcvd装置 |
JPH0777211B2 (ja) * | 1987-08-19 | 1995-08-16 | 富士通株式会社 | アッシング方法 |
JPH07101685B2 (ja) * | 1989-01-26 | 1995-11-01 | 富士通株式会社 | マイクロ波プラズマ処理装置 |
JPH0749792Y2 (ja) * | 1989-01-31 | 1995-11-13 | 富士通株式会社 | マイクロ波プラズマ処理装置 |
US4943345A (en) * | 1989-03-23 | 1990-07-24 | Board Of Trustees Operating Michigan State University | Plasma reactor apparatus and method for treating a substrate |
FR2653633B1 (fr) * | 1989-10-19 | 1991-12-20 | Commissariat Energie Atomique | Dispositif de traitement chimique assiste par un plasma de diffusion. |
EP0462730A1 (de) * | 1990-06-18 | 1991-12-27 | AT&T Corp. | Verfahren und Vorrichtung zur Herstellung planarer Schichten für integrierte Schaltungen |
EP0653500A1 (de) * | 1993-11-12 | 1995-05-17 | International Business Machines Corporation | Reaktor zur CVD-Beschichtung mit verbesserter Gleichmässigkeit der Filmdicke |
US5643394A (en) * | 1994-09-16 | 1997-07-01 | Applied Materials, Inc. | Gas injection slit nozzle for a plasma process reactor |
US5746875A (en) * | 1994-09-16 | 1998-05-05 | Applied Materials, Inc. | Gas injection slit nozzle for a plasma process reactor |
US5653806A (en) * | 1995-03-10 | 1997-08-05 | Advanced Technology Materials, Inc. | Showerhead-type discharge assembly for delivery of source reagent vapor to a substrate, and CVD process utilizing same |
US5741363A (en) * | 1996-03-22 | 1998-04-21 | Advanced Technology Materials, Inc. | Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition |
US6499426B1 (en) | 1999-12-10 | 2002-12-31 | Saint-Gobain Industrial Ceramics, Inc. | System and method for coating non-planar surfaces of objects with diamond film |
US8057633B2 (en) * | 2006-03-28 | 2011-11-15 | Tokyo Electron Limited | Post-etch treatment system for removing residue on a substrate |
JP5837793B2 (ja) | 2010-11-30 | 2015-12-24 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及び基板処理装置のバッフル構造 |
JP6060242B2 (ja) * | 2010-11-30 | 2017-01-11 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及びバッフル構造 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1159012A (en) * | 1980-05-02 | 1983-12-20 | Seitaro Matsuo | Plasma deposition apparatus |
-
1982
- 1982-03-31 JP JP5299282A patent/JPS58170536A/ja active Granted
-
1983
- 1983-03-22 DE DE8383301604T patent/DE3371917D1/de not_active Expired
- 1983-03-22 EP EP83301604A patent/EP0090586B1/de not_active Expired
- 1983-03-31 IE IE74783A patent/IE54233B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0090586A1 (de) | 1983-10-05 |
EP0090586B1 (de) | 1987-06-03 |
IE830747L (en) | 1983-09-30 |
JPS58170536A (ja) | 1983-10-07 |
JPS621534B2 (de) | 1987-01-14 |
IE54233B1 (en) | 1989-07-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |