DE3342995C2 - - Google Patents

Info

Publication number
DE3342995C2
DE3342995C2 DE3342995A DE3342995A DE3342995C2 DE 3342995 C2 DE3342995 C2 DE 3342995C2 DE 3342995 A DE3342995 A DE 3342995A DE 3342995 A DE3342995 A DE 3342995A DE 3342995 C2 DE3342995 C2 DE 3342995C2
Authority
DE
Germany
Prior art keywords
exposure
exposure device
projection system
light
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3342995A
Other languages
German (de)
English (en)
Other versions
DE3342995A1 (de
Inventor
Syuichi Kawasaki Kanagawa Jp Yabu
Hiroshi Tokio/Tokyo Jp Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE3342995A1 publication Critical patent/DE3342995A1/de
Application granted granted Critical
Publication of DE3342995C2 publication Critical patent/DE3342995C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G03F7/70891—Temperature
    • H10P95/00—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
DE19833342995 1982-11-29 1983-11-28 Belichtungsvorrichtung Granted DE3342995A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57208766A JPS5999722A (ja) 1982-11-29 1982-11-29 半導体焼付露光制御方法

Publications (2)

Publication Number Publication Date
DE3342995A1 DE3342995A1 (de) 1984-05-30
DE3342995C2 true DE3342995C2 (enExample) 1990-03-22

Family

ID=16561731

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833342995 Granted DE3342995A1 (de) 1982-11-29 1983-11-28 Belichtungsvorrichtung

Country Status (5)

Country Link
US (1) US4583840A (enExample)
JP (1) JPS5999722A (enExample)
DE (1) DE3342995A1 (enExample)
FR (1) FR2536874B1 (enExample)
GB (1) GB2131187B (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3447488A1 (de) * 1984-10-19 1986-05-07 Canon K.K., Tokio/Tokyo Projektionseinrichtung
JPS61160934A (ja) * 1985-01-10 1986-07-21 Canon Inc 投影光学装置
JPS61183928A (ja) * 1985-02-12 1986-08-16 Nippon Kogaku Kk <Nikon> 投影光学装置
JPS61278141A (ja) * 1985-05-31 1986-12-09 Canon Inc 投影倍率調整方法
JPS62125359A (ja) * 1985-11-27 1987-06-06 Canon Inc 露光装置
JPH0712012B2 (ja) * 1985-12-11 1995-02-08 株式会社ニコン 投影露光装置
US4989031A (en) * 1990-01-29 1991-01-29 Nikon Corporation Projection exposure apparatus
US5883704A (en) * 1995-08-07 1999-03-16 Nikon Corporation Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system
JP3283767B2 (ja) * 1996-10-02 2002-05-20 キヤノン株式会社 露光装置およびデバイス製造方法
JPH10116766A (ja) 1996-10-11 1998-05-06 Canon Inc 露光装置及びデバイス製造方法
DE19752713A1 (de) * 1997-11-28 1999-06-02 Zeiss Carl Fa UV-Optisches System mit reduzierter Alterung
JP3548464B2 (ja) 1999-09-01 2004-07-28 キヤノン株式会社 露光方法及び走査型露光装置
US7513537B2 (en) * 2003-10-22 2009-04-07 Frank's Casing Crew & Rental Tools, Inc. Tubular connection with slotted threads
JP3833209B2 (ja) * 2003-10-24 2006-10-11 キヤノン株式会社 露光装置及びデバイス製造方法
CN101034261B (zh) * 2006-03-09 2010-08-11 中芯国际集成电路制造(上海)有限公司 防止由阻挡处理对光学元件的污染的方法和设备
AU2007254627B2 (en) * 2007-12-21 2010-07-08 Canon Kabushiki Kaisha Geometric parameter measurement of an imaging device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB592034A (en) * 1944-04-26 1947-09-05 Franz Urbach Combined photographic printing and viewing arrangement
US4083634A (en) * 1973-01-16 1978-04-11 Canon Kabushiki Kaisha Pattern exposure apparatus using polychromatic light source
US4011011A (en) * 1973-03-09 1977-03-08 The Perkin-Elmer Corporation Optical projection apparatus
JPS5225576A (en) * 1975-08-22 1977-02-25 Hitachi Ltd Exposure method of photo-resist
US4202623A (en) * 1979-01-08 1980-05-13 The Perkin-Elmer Corporation Temperature compensated alignment system
US4376581A (en) * 1979-12-20 1983-03-15 Censor Patent- Und Versuchs-Anstalt Method of positioning disk-shaped workpieces, preferably semiconductor wafers
JPS56130707A (en) * 1980-03-18 1981-10-13 Canon Inc Photo-printing device
DE3118802A1 (de) * 1980-05-14 1982-02-25 Canon K.K., Tokyo Druckuebertragungsgeraet
US4370054A (en) * 1981-04-02 1983-01-25 Canon Kabushiki Kaisha Projection exposure apparatus
JPS57169244A (en) * 1981-04-13 1982-10-18 Canon Inc Temperature controller for mask and wafer
DD160756A3 (de) * 1981-04-24 1984-02-29 Gudrun Dietz Anordnung zur verbesserung fotochemischer umsetzungsprozesse in fotoresistschichten
JPS58116735A (ja) * 1981-12-29 1983-07-12 Canon Inc 投影焼付方法

Also Published As

Publication number Publication date
US4583840A (en) 1986-04-22
GB8331399D0 (en) 1984-01-04
GB2131187B (en) 1986-07-30
FR2536874A1 (fr) 1984-06-01
FR2536874B1 (fr) 1992-04-30
JPH0141013B2 (enExample) 1989-09-01
GB2131187A (en) 1984-06-13
DE3342995A1 (de) 1984-05-30
JPS5999722A (ja) 1984-06-08

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: G03B 27/72

D2 Grant after examination
8364 No opposition during term of opposition