DE3273372D1 - Clutch assembly for removing a severed wafer from an ingot - Google Patents
Clutch assembly for removing a severed wafer from an ingotInfo
- Publication number
- DE3273372D1 DE3273372D1 DE8282305945T DE3273372T DE3273372D1 DE 3273372 D1 DE3273372 D1 DE 3273372D1 DE 8282305945 T DE8282305945 T DE 8282305945T DE 3273372 T DE3273372 T DE 3273372T DE 3273372 D1 DE3273372 D1 DE 3273372D1
- Authority
- DE
- Germany
- Prior art keywords
- ingot
- clutch assembly
- severed
- wafer
- severed wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
- B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
- B23Q7/047—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers the gripper supporting the workpiece during machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06320097 US4420909B2 (en) | 1981-11-10 | 1981-11-10 | Wafering system |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3273372D1 true DE3273372D1 (en) | 1986-10-23 |
Family
ID=23244880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8282305945T Expired DE3273372D1 (en) | 1981-11-10 | 1982-11-09 | Clutch assembly for removing a severed wafer from an ingot |
Country Status (4)
Country | Link |
---|---|
US (1) | US4420909B2 (de) |
EP (1) | EP0079744B1 (de) |
JP (3) | JPS5887830A (de) |
DE (1) | DE3273372D1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4602854A (en) * | 1985-02-25 | 1986-07-29 | At&T Technologies, Inc. | Polyhedral ring mirrors and their manufacture |
JPS6213305A (ja) * | 1985-07-12 | 1987-01-22 | 株式会社日立製作所 | ワ−ク回転式切断法およびその装置 |
US4667650A (en) * | 1985-11-21 | 1987-05-26 | Pq Corporation | Mounting beam for preparing wafers |
EP0242489B1 (de) * | 1986-04-17 | 1991-07-10 | Maschinenfabrik Meyer & Burger AG | Verfahren zum Trennen eines Stabes in Teilstücke, Trennschleifmaschine zur Durchführung dieses Verfahrens und Verwendung dieser Trennschleifmaschine |
US4903681A (en) * | 1987-02-24 | 1990-02-27 | Tokyo Seimitus Co., Ltd. | Method and apparatus for cutting a cylindrical material |
US4899719A (en) * | 1987-07-31 | 1990-02-13 | Mitsubishi Kinsoku Kabushiki Kaisha | Apparatus for collecting wafers |
JP2623604B2 (ja) * | 1987-10-21 | 1997-06-25 | 三菱マテリアル株式会社 | スライサの切断送り装置 |
DE3737540C1 (de) * | 1987-11-05 | 1989-06-22 | Mueller Georg Nuernberg | Verfahren und Maschine zum Herstellen von Ronden mit zumindest einer planen Oberflaeche |
US4819387A (en) * | 1987-12-16 | 1989-04-11 | Motorola, Inc. | Method of slicing semiconductor crystal |
US5025593A (en) * | 1988-01-18 | 1991-06-25 | Mazda Motor Corporation | Slicing machine and control method thereof |
US5111622A (en) * | 1989-05-18 | 1992-05-12 | Silicon Technology Corporation | Slicing and grinding system for a wafer slicing machine |
US4974578A (en) * | 1989-08-17 | 1990-12-04 | Silicon Technology Corporation | Housing for mounting a spindle of an internal diameter saw blade |
JPH0695504B2 (ja) * | 1989-10-31 | 1994-11-24 | 直江津電子工業株式会社 | ウエハ枚葉式内周刃2分割切断装置におけるウエハ供給回収装置 |
US5189843A (en) * | 1990-08-30 | 1993-03-02 | Silicon Technology Corporation | Wafer slicing and grinding machine and a method of slicing and grinding wafers |
US5148797A (en) * | 1991-03-14 | 1992-09-22 | Silicon Technology Corporation | Mounting for an internal diameter saw blade |
US5243960A (en) * | 1991-12-31 | 1993-09-14 | Stone Panels, Inc. | Apparatus for cutting stone laminate panels |
US5427644A (en) * | 1993-01-11 | 1995-06-27 | Tokyo Seimitsu Co., Ltd. | Method of manufacturing semiconductor wafer and system therefor |
JP2823493B2 (ja) * | 1993-01-18 | 1998-11-11 | トーヨーエイテック株式会社 | スライシング装置のブレード撓み検出方法及び装置並びにブレード撓み制御装置 |
JP2943673B2 (ja) * | 1995-10-31 | 1999-08-30 | 日本電気株式会社 | 半導体基板の製造装置及び製造方法 |
EP0964333A1 (de) | 1998-06-10 | 1999-12-15 | Sun Microsystems, Inc. | Betriebsmittelverwaltung |
EP0964332B1 (de) * | 1998-06-10 | 2005-10-12 | Sun Microsystems, Inc. | Verfahren und Vorrichtung zum Zeitplanen von Prozessen für Betriebsmittelzuteilung |
DE19950068B4 (de) * | 1999-10-16 | 2006-03-02 | Schmid Technology Systems Gmbh | Verfahren und Vorrichtung zum Vereinzeln und Ablösen von Substratscheiben |
KR100889242B1 (ko) * | 2006-05-15 | 2009-03-17 | 주식회사 엘지화학 | 방수기능을 구비한 bms |
DE102009047027B3 (de) * | 2009-11-23 | 2011-07-28 | J. Schmalz GmbH, 72293 | Vorrichtung zum Herstellen von Materialscheiben |
CN105374730B (zh) * | 2015-10-23 | 2018-03-27 | 河北晶龙阳光设备有限公司 | 一种用于太阳能电池片转篮的机械手及其双机头转运装置 |
CN105500541B (zh) * | 2015-12-31 | 2017-09-29 | 天津朗誉科技发展有限公司 | 一种硅棒晶体翻转系统 |
JP6938087B2 (ja) * | 2017-09-21 | 2021-09-22 | 株式会社ディスコ | 切削ブレードの装着機構 |
CN115050680B (zh) * | 2022-08-16 | 2022-10-28 | 江苏邑文微电子科技有限公司 | 晶圆盒快速定位装置和方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3039235A (en) * | 1961-01-31 | 1962-06-19 | Hamco Mach & Elect Co | Cutting apparatus |
DE1148480B (de) * | 1961-07-13 | 1963-05-09 | Siemens Ag | Einrichtung zum Zersaegen von Koerpern aus sproedem Material in Scheiben, insbesondere von stabfoermigen Halbleiterkristallen |
US3577861A (en) * | 1969-04-07 | 1971-05-11 | Kayex Corp | Transfer device for cutting apparatus |
GB1319768A (en) * | 1969-10-29 | 1973-06-06 | Caplin Eng Co Ltd | Machine tool for cutting a workpiece |
JPS5029171A (de) * | 1973-07-17 | 1975-03-25 | ||
JPS51126033A (en) * | 1975-04-25 | 1976-11-02 | Hitachi Ltd | Wafer collection device for slicer |
JPS5244671A (en) * | 1975-10-06 | 1977-04-07 | Mitsubishi Electric Corp | Circuit for detecting quantity of electricity |
JPS5632507Y2 (de) * | 1976-07-30 | 1981-08-03 | ||
JPS53139686U (de) * | 1977-04-09 | 1978-11-04 | ||
JPS5646529A (en) * | 1979-09-21 | 1981-04-27 | Citizen Watch Co Ltd | Wafer chuck |
-
1981
- 1981-11-10 US US06320097 patent/US4420909B2/en not_active Expired - Lifetime
-
1982
- 1982-11-09 DE DE8282305945T patent/DE3273372D1/de not_active Expired
- 1982-11-09 EP EP82305945A patent/EP0079744B1/de not_active Expired
- 1982-11-10 JP JP57198318A patent/JPS5887830A/ja active Granted
-
1989
- 1989-03-06 JP JP1053587A patent/JPH01264806A/ja active Pending
-
1991
- 1991-12-24 JP JP35708891A patent/JP2601594B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4420909A (en) | 1983-12-20 |
JPH06143250A (ja) | 1994-05-24 |
JPH01264806A (ja) | 1989-10-23 |
EP0079744A2 (de) | 1983-05-25 |
US4420909B1 (de) | 1989-11-14 |
EP0079744A3 (en) | 1984-09-05 |
EP0079744B1 (de) | 1986-09-17 |
US4420909B2 (en) | 1997-06-10 |
JPH0247324B2 (de) | 1990-10-19 |
JP2601594B2 (ja) | 1997-04-16 |
JPS5887830A (ja) | 1983-05-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee | ||
8380 | Miscellaneous part iii |
Free format text: IN HEFT 46/88, SEITE 10824, SP.3: DIE VEROEFFENTLICHUNG IST ZU STREICHEN |
|
8339 | Ceased/non-payment of the annual fee |