GB2127042B - Method for removing a titanium nitride film - Google Patents

Method for removing a titanium nitride film

Info

Publication number
GB2127042B
GB2127042B GB08323278A GB8323278A GB2127042B GB 2127042 B GB2127042 B GB 2127042B GB 08323278 A GB08323278 A GB 08323278A GB 8323278 A GB8323278 A GB 8323278A GB 2127042 B GB2127042 B GB 2127042B
Authority
GB
United Kingdom
Prior art keywords
nitride film
titanium nitride
titanium
film
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08323278A
Other versions
GB2127042A (en
GB8323278D0 (en
Inventor
Yoshiyuki Nohara
Tsutomu Noguchi
Kenji Hanai
Toshimitsu Shirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Publication of GB8323278D0 publication Critical patent/GB8323278D0/en
Publication of GB2127042A publication Critical patent/GB2127042A/en
Application granted granted Critical
Publication of GB2127042B publication Critical patent/GB2127042B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
    • C23G1/08—Iron or steel
    • C23G1/085—Iron or steel solutions containing HNO3
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
    • C23G1/08—Iron or steel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
GB08323278A 1982-08-31 1983-08-31 Method for removing a titanium nitride film Expired GB2127042B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57151610A JPS5941479A (en) 1982-08-31 1982-08-31 Removal of titanium nitride film

Publications (3)

Publication Number Publication Date
GB8323278D0 GB8323278D0 (en) 1983-10-05
GB2127042A GB2127042A (en) 1984-04-04
GB2127042B true GB2127042B (en) 1985-12-04

Family

ID=15522292

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08323278A Expired GB2127042B (en) 1982-08-31 1983-08-31 Method for removing a titanium nitride film

Country Status (4)

Country Link
JP (1) JPS5941479A (en)
KR (1) KR840006377A (en)
GB (1) GB2127042B (en)
HK (1) HK88190A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60187681A (en) * 1984-03-06 1985-09-25 Citizen Watch Co Ltd Method for removing hard film
DE4101843C1 (en) * 1991-01-23 1992-04-02 Eifeler Werkzeuge Gmbh, 4000 Duesseldorf, De Hard tool coating for economy - by stripping using tetra:sodium di:phosphate soln. and hydrogen peroxide
DE4110595C1 (en) * 1991-04-02 1992-11-26 Thyssen Edelstahlwerke Ag, 4000 Duesseldorf, De Wet-chemical removal of hard coatings from workpiece surfaces - comprises using hydrogen peroxide soln. stabilised by complex former e.g. potassium-sodium tartrate-tetra:hydrate
JP3264729B2 (en) * 1993-04-23 2002-03-11 シチズン時計株式会社 Stripping method of plating film
JPH09109126A (en) * 1995-10-17 1997-04-28 Ngk Insulators Ltd Recycling method for honeycomb molding mouth piece
CN108588728A (en) * 2018-05-16 2018-09-28 深圳仕上电子科技有限公司 The method for removing workpiece surface film using aqueous solution of nitric acid
JP2021065804A (en) * 2019-10-17 2021-04-30 株式会社平和カーボン Method for removing titanium nitride-containing lump
CN111534825B (en) * 2020-05-14 2022-05-31 富乐德科技发展（大连）有限公司 Process for removing titanium and titanium nitride deposited film of stainless steel part of semiconductor equipment

Also Published As

Publication number Publication date
HK88190A (en) 1990-11-02
JPS5941479A (en) 1984-03-07
GB2127042A (en) 1984-04-04
KR840006377A (en) 1984-11-29
GB8323278D0 (en) 1983-10-05

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20000831