GB8323278D0 - Removing titanium nitride film - Google Patents
Removing titanium nitride filmInfo
- Publication number
- GB8323278D0 GB8323278D0 GB838323278A GB8323278A GB8323278D0 GB 8323278 D0 GB8323278 D0 GB 8323278D0 GB 838323278 A GB838323278 A GB 838323278A GB 8323278 A GB8323278 A GB 8323278A GB 8323278 D0 GB8323278 D0 GB 8323278D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- nitride film
- titanium nitride
- removing titanium
- film
- titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/085—Iron or steel solutions containing HNO3
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57151610A JPS5941479A (en) | 1982-08-31 | 1982-08-31 | Removal of titanium nitride film |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8323278D0 true GB8323278D0 (en) | 1983-10-05 |
GB2127042A GB2127042A (en) | 1984-04-04 |
GB2127042B GB2127042B (en) | 1985-12-04 |
Family
ID=15522292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08323278A Expired GB2127042B (en) | 1982-08-31 | 1983-08-31 | Method for removing a titanium nitride film |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5941479A (en) |
KR (1) | KR840006377A (en) |
GB (1) | GB2127042B (en) |
HK (1) | HK88190A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60187681A (en) * | 1984-03-06 | 1985-09-25 | Citizen Watch Co Ltd | Method for removing hard film |
DE4101843C1 (en) * | 1991-01-23 | 1992-04-02 | Eifeler Werkzeuge Gmbh, 4000 Duesseldorf, De | Hard tool coating for economy - by stripping using tetra:sodium di:phosphate soln. and hydrogen peroxide |
DE4110595C1 (en) * | 1991-04-02 | 1992-11-26 | Thyssen Edelstahlwerke Ag, 4000 Duesseldorf, De | Wet-chemical removal of hard coatings from workpiece surfaces - comprises using hydrogen peroxide soln. stabilised by complex former e.g. potassium-sodium tartrate-tetra:hydrate |
JP3264729B2 (en) * | 1993-04-23 | 2002-03-11 | シチズン時計株式会社 | Stripping method of plating film |
JPH09109126A (en) * | 1995-10-17 | 1997-04-28 | Ngk Insulators Ltd | Recycling method for honeycomb molding mouth piece |
CN108588728A (en) * | 2018-05-16 | 2018-09-28 | 深圳仕上电子科技有限公司 | The method for removing workpiece surface film using aqueous solution of nitric acid |
JP2021065804A (en) * | 2019-10-17 | 2021-04-30 | 株式会社平和カーボン | Method for removing titanium nitride-containing lump |
CN111534825B (en) * | 2020-05-14 | 2022-05-31 | 富乐德科技发展(大连)有限公司 | Process for removing titanium and titanium nitride deposited film of stainless steel part of semiconductor equipment |
-
1982
- 1982-08-31 JP JP57151610A patent/JPS5941479A/en active Pending
-
1983
- 1983-07-22 KR KR1019830003388A patent/KR840006377A/en not_active Application Discontinuation
- 1983-08-31 GB GB08323278A patent/GB2127042B/en not_active Expired
-
1990
- 1990-10-25 HK HK881/90A patent/HK88190A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
HK88190A (en) | 1990-11-02 |
JPS5941479A (en) | 1984-03-07 |
GB2127042A (en) | 1984-04-04 |
KR840006377A (en) | 1984-11-29 |
GB2127042B (en) | 1985-12-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20000831 |