DE3227516A1 - Drucksensor - Google Patents
DrucksensorInfo
- Publication number
- DE3227516A1 DE3227516A1 DE19823227516 DE3227516A DE3227516A1 DE 3227516 A1 DE3227516 A1 DE 3227516A1 DE 19823227516 DE19823227516 DE 19823227516 DE 3227516 A DE3227516 A DE 3227516A DE 3227516 A1 DE3227516 A1 DE 3227516A1
- Authority
- DE
- Germany
- Prior art keywords
- substrate plate
- pressure
- housing
- diaphragm
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 19
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 210000003298 dental enamel Anatomy 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 239000002775 capsule Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- -1 GaAs halide Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/007—Transmitting or indicating the displacement of flexible diaphragms using variations in inductance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
- G01L9/0085—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in inductance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/14—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S73/00—Measuring and testing
- Y10S73/03—Hall effect
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19823227516 DE3227516A1 (de) | 1982-03-08 | 1982-07-23 | Drucksensor |
| EP19830101608 EP0088270B1 (de) | 1982-03-08 | 1983-02-19 | Drucksensor |
| US06/468,396 US4487074A (en) | 1982-03-08 | 1983-02-22 | Pressure sensor with a hall element circuit |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3208243 | 1982-03-08 | ||
| DE19823227516 DE3227516A1 (de) | 1982-03-08 | 1982-07-23 | Drucksensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3227516A1 true DE3227516A1 (de) | 1983-09-22 |
| DE3227516C2 DE3227516C2 (enExample) | 1987-09-03 |
Family
ID=25800134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19823227516 Granted DE3227516A1 (de) | 1982-03-08 | 1982-07-23 | Drucksensor |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4487074A (enExample) |
| EP (1) | EP0088270B1 (enExample) |
| DE (1) | DE3227516A1 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3720373C1 (de) * | 1987-06-19 | 1988-05-26 | Bochumer Eisen Heintzmann | Druckaufnehmer |
| EP0300833A1 (en) * | 1987-07-24 | 1989-01-25 | Pall Europe Limited | Differential pressure indication in fluid flow units |
| DE4425225A1 (de) * | 1994-07-16 | 1996-01-18 | Dungs Karl Gmbh & Co | Vorrichtung zum Prüfen der Dichtheit von Ventilen in einer Fluidstrecke |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5987334A (ja) * | 1982-11-10 | 1984-05-19 | Nippon Furnace Kogyo Kaisha Ltd | 燃焼又は反応を伴う流れ場における流体流れのシュミレ−タ |
| GB8412981D0 (en) * | 1984-05-21 | 1984-06-27 | Nat Nuclear Corp Ltd | Sensing methods and devices |
| US4581944A (en) * | 1985-03-18 | 1986-04-15 | Controls Company Of America | Electronic flow transducer assembly |
| US4606229A (en) * | 1985-04-01 | 1986-08-19 | Johnson Service Company | Differential pressure transmitter |
| US4745811A (en) * | 1985-10-28 | 1988-05-24 | Span Instruments, Inc. | Pressure monitoring apparatus having a Hall-effect detector |
| DE8612317U1 (de) * | 1986-05-05 | 1987-09-03 | KMK-Sensortechnik GmbH & Co, 8122 Penzberg | Druckaufnehmer |
| US5069221A (en) * | 1987-12-30 | 1991-12-03 | Densa Limited | Displacement sensor and medical apparatus |
| US4936148A (en) * | 1988-10-17 | 1990-06-26 | Anent Systems Corporation | Hall effect pressure transducer |
| GB2247316A (en) * | 1990-07-21 | 1992-02-26 | Bailey & Mackey Limited | Pressure sensor utilising Hall-effect device |
| DE4219338A1 (de) * | 1991-07-01 | 1993-01-14 | Landis & Gyr Betriebs Ag | Sensor zur erfassung nichtelektrischer zustandsgroessen |
| US5705751A (en) * | 1995-06-07 | 1998-01-06 | Setra Systems, Inc. | Magnetic diaphragm pressure transducer with magnetic field shield |
| FR2764693B1 (fr) * | 1997-06-13 | 1999-08-27 | Jaeger Regulation | Capteur de mesure de pression |
| EP1058103A3 (de) * | 1999-05-11 | 2001-11-21 | Mannesmann VDO Aktiengesellschaft | Mechano-elektrischer Drucksensor mit magnetfeldempfindlichen Detektor |
| US6279403B1 (en) | 1999-10-22 | 2001-08-28 | Henlex, Inc. | Differential pressure triggering device |
| US20110301569A1 (en) | 2001-01-20 | 2011-12-08 | Gordon Wayne Dyer | Methods and apparatus for the CVCS |
| US6607360B2 (en) * | 2001-07-17 | 2003-08-19 | Itt Industries Flojet | Constant pressure pump controller system |
| WO2004001805A2 (en) * | 2002-06-21 | 2003-12-31 | California Institute Of Technology | Sensors based on giant planar hall effect in dilute magnetic semiconductors |
| DE102008022465A1 (de) * | 2007-05-12 | 2008-11-13 | Marquardt Gmbh | Sensor |
| WO2009056315A1 (de) * | 2007-10-30 | 2009-05-07 | Preh Gmbh | Sensoranordnung mit einer magnetfeldquelle und einem magnetfeldsensor |
| DE102011119323B4 (de) * | 2010-11-29 | 2025-01-16 | Marquardt Mechatronik Gmbh | Sensor |
| DE102014005399A1 (de) * | 2013-04-24 | 2014-10-30 | Marquardt Mechatronik Gmbh | Anordnung zur Füllstandsmessung |
| US20230288278A1 (en) * | 2020-07-31 | 2023-09-14 | Hewlett-Packard Development Company, L.P. | Pressure sensing |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2842140A1 (de) * | 1978-09-28 | 1980-04-10 | Bosch Gmbh Robert | Mechanisch-elektrischer druckwandler |
| DE2946515A1 (de) * | 1979-11-17 | 1981-05-27 | Robert Bosch Gmbh, 7000 Stuttgart | Druckgeber mit hall-ic |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3326719A (en) * | 1963-11-07 | 1967-06-20 | Exxon Research Engineering Co | Metal coating process |
| US3297418A (en) * | 1964-04-24 | 1967-01-10 | Firestone Stanley | Magnetic thin film element and method of manufacture |
| US3575054A (en) * | 1969-03-12 | 1971-04-13 | United Aircraft Corp | Pressure sensing device |
| US3922388A (en) * | 1971-03-02 | 1975-11-25 | Honeywell Inc | Method of making an encapsulated thick film resistor and associated encapsulated conductors for use in an electrical circuit |
| IT1012728B (it) * | 1974-05-22 | 1977-03-10 | Mecanique Ind Int | Dispositivo per trasmettere a distanza segnali di pressione |
| FR2331009A1 (fr) * | 1975-11-04 | 1977-06-03 | Texas Instruments France | Capteur de pression asservi |
| SU667839A1 (ru) * | 1976-09-27 | 1979-06-15 | Предприятие П/Я Р-6378 | Датчик давлени |
| US4104607A (en) * | 1977-03-14 | 1978-08-01 | The United States Of America As Represented By The Secretary Of The Navy | Zero temperature coefficient of resistance bi-film resistor |
| US4165653A (en) * | 1978-07-27 | 1979-08-28 | Mcgraw-Edison Company | Signal ratio indicator |
| DE2932336A1 (de) * | 1979-08-09 | 1981-02-26 | Bosch Gmbh Robert | Steuereinrichtung zur zuendzeitpunktbestimmung und kraftstoffzumessung fuer eine brennkraftmaschine |
| US4371837A (en) * | 1979-11-13 | 1983-02-01 | American Can Company | Temperature compensated input power and output offset circuits for a hall effect transducer |
| US4254395A (en) * | 1979-12-26 | 1981-03-03 | Robert Bosch Gmbh | Electromechanical force converter for measuring gas pressure |
-
1982
- 1982-07-23 DE DE19823227516 patent/DE3227516A1/de active Granted
-
1983
- 1983-02-19 EP EP19830101608 patent/EP0088270B1/de not_active Expired
- 1983-02-22 US US06/468,396 patent/US4487074A/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2842140A1 (de) * | 1978-09-28 | 1980-04-10 | Bosch Gmbh Robert | Mechanisch-elektrischer druckwandler |
| DE2946515A1 (de) * | 1979-11-17 | 1981-05-27 | Robert Bosch Gmbh, 7000 Stuttgart | Druckgeber mit hall-ic |
Non-Patent Citations (1)
| Title |
|---|
| Siemens Forsch. u. Entw. Ber. Bd. 10, (1981) Nr. 2, S. 83-90 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3720373C1 (de) * | 1987-06-19 | 1988-05-26 | Bochumer Eisen Heintzmann | Druckaufnehmer |
| US4843886A (en) * | 1987-06-19 | 1989-07-04 | Bochumer Eisenhutte Heinzmann GmbH & Co., KG | Pressure measuring device |
| EP0300833A1 (en) * | 1987-07-24 | 1989-01-25 | Pall Europe Limited | Differential pressure indication in fluid flow units |
| DE4425225A1 (de) * | 1994-07-16 | 1996-01-18 | Dungs Karl Gmbh & Co | Vorrichtung zum Prüfen der Dichtheit von Ventilen in einer Fluidstrecke |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0088270A2 (de) | 1983-09-14 |
| US4487074A (en) | 1984-12-11 |
| EP0088270B1 (de) | 1989-11-08 |
| DE3227516C2 (enExample) | 1987-09-03 |
| EP0088270A3 (en) | 1984-09-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8120 | Willingness to grant licences paragraph 23 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |