DE3211081C2 - - Google Patents
Info
- Publication number
- DE3211081C2 DE3211081C2 DE3211081A DE3211081A DE3211081C2 DE 3211081 C2 DE3211081 C2 DE 3211081C2 DE 3211081 A DE3211081 A DE 3211081A DE 3211081 A DE3211081 A DE 3211081A DE 3211081 C2 DE3211081 C2 DE 3211081C2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- oxygen
- absorption
- bonds
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
- H10F30/15—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors comprising amorphous semiconductors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08214—Silicon-based
- G03G5/08221—Silicon-based comprising one or two silicon based layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photoreceptors In Electrophotography (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56044499A JPS57158650A (en) | 1981-03-25 | 1981-03-25 | Amorphous silicon photoconductor layer |
| JP56044498A JPS57158649A (en) | 1981-03-25 | 1981-03-25 | Amorphous silicon photoconductor layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3211081A1 DE3211081A1 (de) | 1982-11-18 |
| DE3211081C2 true DE3211081C2 (enFirst) | 1990-10-18 |
Family
ID=26384429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19823211081 Granted DE3211081A1 (de) | 1981-03-25 | 1982-03-25 | Lichtempfindliches element |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4409311A (enFirst) |
| DE (1) | DE3211081A1 (enFirst) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4484809B1 (en) * | 1977-12-05 | 1995-04-18 | Plasma Physics Corp | Glow discharge method and apparatus and photoreceptor devices made therewith |
| US4795688A (en) * | 1982-03-16 | 1989-01-03 | Canon Kabushiki Kaisha | Layered photoconductive member comprising amorphous silicon |
| USRE38727E1 (en) * | 1982-08-24 | 2005-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and method of making the same |
| DE3245500A1 (de) * | 1982-12-09 | 1984-06-14 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Elektrofotografisches aufzeichnungsmaterial und verfahren zu seiner herstellung |
| JPS59113447A (ja) * | 1982-12-20 | 1984-06-30 | Canon Inc | 電子写真用光導電部材 |
| JPS6011849A (ja) * | 1983-06-21 | 1985-01-22 | Sanyo Electric Co Ltd | 静電潜像担持体 |
| DE3546544C2 (enFirst) * | 1984-02-28 | 1990-02-15 | Sharp K.K., Osaka, Jp | |
| US5258207A (en) * | 1989-08-31 | 1993-11-02 | Sanyo Electric Co., Ltd. | Amorphous silicon film, its production and photo semiconductor device utilizing such a film |
| DE4027236B4 (de) * | 1989-08-31 | 2005-03-31 | Sanyo Electric Co., Ltd., Moriguchi | Verfahren zur Herstellung von Filmen aus amorphem Silicium und einen solchen Film verwendende Photohalbleiter-Vorrichtung |
| US5278015A (en) * | 1989-08-31 | 1994-01-11 | Sango Electric Co., Ltd. | Amorphous silicon film, its production and photo semiconductor device utilizing such a film |
| US5464721A (en) * | 1992-09-02 | 1995-11-07 | Fuji Xerox Co., Ltd. | Amorphous silicon photoreceptor and electrophotographic process using the same |
| EP0679955B9 (en) * | 1994-04-27 | 2005-01-12 | Canon Kabushiki Kaisha | Electrophotographic light-receiving member and process for its production |
| JP3368109B2 (ja) * | 1995-08-23 | 2003-01-20 | キヤノン株式会社 | 電子写真用光受容部材 |
| JP3862334B2 (ja) | 1995-12-26 | 2006-12-27 | キヤノン株式会社 | 電子写真用光受容部材 |
| JP3976955B2 (ja) | 1999-09-06 | 2007-09-19 | キヤノン株式会社 | 電子写真方法 |
| JP2001343776A (ja) * | 2000-05-30 | 2001-12-14 | Canon Inc | 電子写真方法、ならびにそれに用いる電子写真用光受容部材 |
| US6605405B2 (en) | 2000-07-26 | 2003-08-12 | Canon Kabushiki Kaisha | Electrophotographic method and electrophotographic apparatus |
| DE102006024383A1 (de) * | 2006-05-24 | 2007-11-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur Erhöhung der individuellen Behaglichkeit in einem Flugzeug |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2746967C2 (de) * | 1977-10-19 | 1981-09-24 | Siemens AG, 1000 Berlin und 8000 München | Elektrofotographische Aufzeichnungstrommel |
| AU530905B2 (en) * | 1977-12-22 | 1983-08-04 | Canon Kabushiki Kaisha | Electrophotographic photosensitive member |
| US4217374A (en) * | 1978-03-08 | 1980-08-12 | Energy Conversion Devices, Inc. | Amorphous semiconductors equivalent to crystalline semiconductors |
| US4226898A (en) * | 1978-03-16 | 1980-10-07 | Energy Conversion Devices, Inc. | Amorphous semiconductors equivalent to crystalline semiconductors produced by a glow discharge process |
| JPS54145539A (en) * | 1978-05-04 | 1979-11-13 | Canon Inc | Electrophotographic image forming material |
| JPS5562778A (en) * | 1978-11-02 | 1980-05-12 | Fuji Photo Film Co Ltd | Preparation of photoconductor film |
| JPS55166647A (en) * | 1979-06-15 | 1980-12-25 | Fuji Photo Film Co Ltd | Photoconductive composition and electrophotographic receptor using this |
| JPS56150752A (en) * | 1980-04-25 | 1981-11-21 | Hitachi Ltd | Electrophotographic sensitive film |
| JPS5727263A (en) * | 1980-07-28 | 1982-02-13 | Hitachi Ltd | Electrophotographic photosensitive film |
-
1982
- 1982-03-08 US US06/355,377 patent/US4409311A/en not_active Expired - Lifetime
- 1982-03-25 DE DE19823211081 patent/DE3211081A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3211081A1 (de) | 1982-11-18 |
| US4409311A (en) | 1983-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8127 | New person/name/address of the applicant |
Owner name: MINOLTA CAMERA K.K., OSAKA, JP KAWAMURA, TAKAO, SA |
|
| 8110 | Request for examination paragraph 44 | ||
| 8125 | Change of the main classification |
Ipc: G03G 5/082 |
|
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8331 | Complete revocation |