DE3163983D1 - Process for the removal of boron from silicon by zone-melting with a reactive plasma - Google Patents

Process for the removal of boron from silicon by zone-melting with a reactive plasma

Info

Publication number
DE3163983D1
DE3163983D1 DE8181401228T DE3163983T DE3163983D1 DE 3163983 D1 DE3163983 D1 DE 3163983D1 DE 8181401228 T DE8181401228 T DE 8181401228T DE 3163983 T DE3163983 T DE 3163983T DE 3163983 D1 DE3163983 D1 DE 3163983D1
Authority
DE
Germany
Prior art keywords
boron
melting
zone
silicon
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181401228T
Other languages
German (de)
English (en)
Inventor
Jacques Amouroux
Daniel Morvan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electricite de France SA
Original Assignee
Electricite de France SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electricite de France SA filed Critical Electricite de France SA
Application granted granted Critical
Publication of DE3163983D1 publication Critical patent/DE3163983D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/22—Heating of the molten zone by irradiation or electric discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE8181401228T 1980-08-01 1981-07-29 Process for the removal of boron from silicon by zone-melting with a reactive plasma Expired DE3163983D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8017120A FR2487808A1 (fr) 1980-08-01 1980-08-01 Procede et dispositif d'elimination du bore dans le silicium par fusion de zone sous plasma reactif

Publications (1)

Publication Number Publication Date
DE3163983D1 true DE3163983D1 (en) 1984-07-12

Family

ID=9244831

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181401228T Expired DE3163983D1 (en) 1980-08-01 1981-07-29 Process for the removal of boron from silicon by zone-melting with a reactive plasma

Country Status (4)

Country Link
US (1) US4399116A (enExample)
EP (1) EP0045689B1 (enExample)
DE (1) DE3163983D1 (enExample)
FR (1) FR2487808A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2585690B1 (fr) * 1985-07-31 1987-09-25 Rhone Poulenc Spec Chim Procede de purification sous plasma de silicium divise
FR2594856A1 (fr) * 1986-02-27 1987-08-28 Photowatt Int Procede d'obtention de cristaux de silicium pour applications photovoltaiques
DE3760173D1 (en) * 1987-01-08 1989-06-29 Rhone Poulenc Chimie Process for the plasma purification of divided silicon
GB8915448D0 (en) * 1989-07-06 1989-08-23 Herbert Nigel Portable viscometer
JP3000109B2 (ja) * 1990-09-20 2000-01-17 株式会社住友シチックス尼崎 高純度シリコン鋳塊の製造方法
DE4105910A1 (de) * 1991-02-26 1992-08-27 Bayer Ag Verfahren zur herstellung von metallfolien sowie deren verwendung
RU94036650A (ru) * 1994-09-28 1996-08-27 Г.С. Бурханов Способ бестигельной зонной плавки для выращивания кристаллических слитков и устройство для его осуществления
US5759360A (en) * 1995-03-13 1998-06-02 Applied Materials, Inc. Wafer clean sputtering process
FR2772741B1 (fr) * 1997-12-19 2000-03-10 Centre Nat Rech Scient Procede et installation d'affinage du silicium
RU2159213C2 (ru) * 1999-02-25 2000-11-20 Абдюханов Мансур Абдрахманович Способ очистки кремния и устройство для его осуществления

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA625027A (en) * 1961-08-01 K. Herglotz Heribert Process for purifying silicon
BE548227A (enExample) * 1955-07-22
FR1469486A (fr) * 1964-09-15 1967-02-17 Gen Trustee Company Inc Purification du silicium
DE2608965A1 (de) * 1976-03-04 1977-09-08 Wacker Chemitronic Verfahren zur bestimmung des donatorgehaltes von hochreinem polykristallinem silicium fuer halbleiterzwecke
FR2438499A1 (fr) * 1978-10-13 1980-05-09 Anvar Procede de purification et d'elaboration de cristaux par fusion de zone utilisant un jet de plasma et installation correspondante

Also Published As

Publication number Publication date
FR2487808B1 (enExample) 1984-11-02
FR2487808A1 (fr) 1982-02-05
US4399116A (en) 1983-08-16
EP0045689A1 (fr) 1982-02-10
EP0045689B1 (fr) 1984-06-06

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee