FR2585690B1 - Procede de purification sous plasma de silicium divise - Google Patents

Procede de purification sous plasma de silicium divise

Info

Publication number
FR2585690B1
FR2585690B1 FR8511670A FR8511670A FR2585690B1 FR 2585690 B1 FR2585690 B1 FR 2585690B1 FR 8511670 A FR8511670 A FR 8511670A FR 8511670 A FR8511670 A FR 8511670A FR 2585690 B1 FR2585690 B1 FR 2585690B1
Authority
FR
France
Prior art keywords
purification process
divided silicon
plasma purification
silicon plasma
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8511670A
Other languages
English (en)
Other versions
FR2585690A1 (fr
Inventor
Jacques Amouroux
Daniel Morvan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rhone Poulenc Specialites Chimiques
Original Assignee
Rhone Poulenc Specialites Chimiques
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rhone Poulenc Specialites Chimiques filed Critical Rhone Poulenc Specialites Chimiques
Priority to FR8511670A priority Critical patent/FR2585690B1/fr
Priority to JP29172086A priority patent/JPH075288B2/ja
Priority claimed from EP19870400022 external-priority patent/EP0274283B1/fr
Publication of FR2585690A1 publication Critical patent/FR2585690A1/fr
Application granted granted Critical
Publication of FR2585690B1 publication Critical patent/FR2585690B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification
FR8511670A 1985-07-31 1985-07-31 Procede de purification sous plasma de silicium divise Expired FR2585690B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR8511670A FR2585690B1 (fr) 1985-07-31 1985-07-31 Procede de purification sous plasma de silicium divise
JP29172086A JPH075288B2 (ja) 1985-07-31 1986-12-09 分割されたけい素をプラズマの下で精製する方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8511670A FR2585690B1 (fr) 1985-07-31 1985-07-31 Procede de purification sous plasma de silicium divise
EP19870400022 EP0274283B1 (fr) 1987-01-08 1987-01-08 Procédé de purification sous plasma de silicium divisé

Publications (2)

Publication Number Publication Date
FR2585690A1 FR2585690A1 (fr) 1987-02-06
FR2585690B1 true FR2585690B1 (fr) 1987-09-25

Family

ID=26111414

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8511670A Expired FR2585690B1 (fr) 1985-07-31 1985-07-31 Procede de purification sous plasma de silicium divise

Country Status (1)

Country Link
FR (1) FR2585690B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2827592B1 (fr) 2001-07-23 2003-08-22 Invensil Silicium metallurgique de haute purete et procede d'elaboration
FR2944520B1 (fr) 2009-04-17 2011-05-20 Similelt Procede et installation pour la purification du silicium metallurgique.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2438499A1 (fr) * 1978-10-13 1980-05-09 Anvar Procede de purification et d'elaboration de cristaux par fusion de zone utilisant un jet de plasma et installation correspondante
FR2487808A1 (fr) * 1980-08-01 1982-02-05 Electricite De France Procede et dispositif d'elimination du bore dans le silicium par fusion de zone sous plasma reactif
CA1147698A (fr) * 1980-10-15 1983-06-07 Maher I. Boulos Epuration du silicium de qualite metallurgique

Also Published As

Publication number Publication date
FR2585690A1 (fr) 1987-02-06

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Legal Events

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TP Transmission of property