DE3141643C2 - - Google Patents
Info
- Publication number
- DE3141643C2 DE3141643C2 DE3141643A DE3141643A DE3141643C2 DE 3141643 C2 DE3141643 C2 DE 3141643C2 DE 3141643 A DE3141643 A DE 3141643A DE 3141643 A DE3141643 A DE 3141643A DE 3141643 C2 DE3141643 C2 DE 3141643C2
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor
- plates
- arrangement according
- semiconductor wafer
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 61
- 235000012431 wafers Nutrition 0.000 claims description 30
- 229920005989 resin Polymers 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- -1 polytetrafluoroethylene Polymers 0.000 claims description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 5
- 239000002775 capsule Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 18
- 239000003822 epoxy resin Substances 0.000 description 10
- 229920000647 polyepoxide Polymers 0.000 description 10
- 238000002161 passivation Methods 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3737—Organic materials with or without a thermoconductive filler
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4093—Snap-on arrangements, e.g. clips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8034892 | 1980-10-30 | ||
GB8117292 | 1981-06-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3141643A1 DE3141643A1 (de) | 1982-08-19 |
DE3141643C2 true DE3141643C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-27 |
Family
ID=26277367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19813141643 Granted DE3141643A1 (de) | 1980-10-30 | 1981-10-16 | Mit einem kuehlkoerper ausgestatteter hochleistungs-halbleiteraufbau und verfahren zu seiner herstellung |
Country Status (2)
Country | Link |
---|---|
US (1) | US4538171A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
DE (1) | DE3141643A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0100626A3 (en) * | 1982-07-29 | 1985-11-06 | LUCAS INDUSTRIES public limited company | Semi-conductor assembly |
US4603344A (en) * | 1984-07-30 | 1986-07-29 | Sundstrand Corporation | Rotating rectifier assembly |
US4806814A (en) * | 1987-11-16 | 1989-02-21 | Sundstrand Corporation | Half-wave rotary rectifier assembly |
US4827165A (en) * | 1987-11-16 | 1989-05-02 | Sundstrand Corporation | Integrated diode package |
US5239199A (en) * | 1991-01-14 | 1993-08-24 | Texas Instruments Incorporated | Vertical lead-on-chip package |
DE19903875C2 (de) * | 1999-02-01 | 2001-11-29 | Semikron Elektronik Gmbh | Leistungshalbleiterschaltungsanordnung, insbesondere Stromumrichter, in Druckkontaktierung |
US9345169B1 (en) | 2014-11-18 | 2016-05-17 | International Business Machines Corporation | Liquid-cooled heat sink assemblies |
US9865522B2 (en) | 2014-11-18 | 2018-01-09 | International Business Machines Corporation | Composite heat sink structures |
US10265812B2 (en) | 2015-08-12 | 2019-04-23 | International Business Machines Corporation | Liquid-cooled, composite heat sink assemblies |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2461087A (en) * | 1945-07-31 | 1949-02-08 | Union Switch & Signal Co | Alternating electric current rectifier of the dry surface contact type |
US2825014A (en) * | 1953-11-30 | 1958-02-25 | Philips Corp | Semi-conductor device |
NL96864C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1954-01-14 | 1900-01-01 | ||
US3264531A (en) * | 1962-03-29 | 1966-08-02 | Jr Donald C Dickson | Rectifier assembly comprising series stacked pn-junction rectifiers |
US3373335A (en) * | 1964-12-22 | 1968-03-12 | Electronic Devices Inc | Stacked assembly of rectifier units incorporating shunt capacitors |
US3437887A (en) * | 1966-06-03 | 1969-04-08 | Westinghouse Electric Corp | Flat package encapsulation of electrical devices |
US3651383A (en) * | 1970-02-05 | 1972-03-21 | Gen Electric | Unitary high power semiconductor subassembly suitable for mounting on a separable heat sink |
DE2022616A1 (de) * | 1970-05-08 | 1971-11-25 | Semikron Gleichrichterbau | Scheibenfoermiges Halbleiter-Bauelement |
DE2042494A1 (en) * | 1970-08-27 | 1972-03-02 | Licentia Gmbh | Heat conducting pastes - mixture of zinc oxide and low viscosity epoxide esp for transistorised equipment |
JPS5372465A (en) * | 1976-12-08 | 1978-06-27 | Mitsubishi Electric Corp | Mounting method of semiconductor to radiator |
US4099201A (en) * | 1977-04-11 | 1978-07-04 | General Electric Company | Semiconductor rectifier assembly having an insulating material therein that evolves gases when exposed to an arc |
US4326238A (en) * | 1977-12-28 | 1982-04-20 | Fujitsu Limited | Electronic circuit packages |
-
1981
- 1981-10-09 US US06/310,255 patent/US4538171A/en not_active Expired - Fee Related
- 1981-10-16 DE DE19813141643 patent/DE3141643A1/de active Granted
Also Published As
Publication number | Publication date |
---|---|
DE3141643A1 (de) | 1982-08-19 |
US4538171A (en) | 1985-08-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
8128 | New person/name/address of the agent |
Representative=s name: PFENNING, J., DIPL.-ING. MEINIG, K., DIPL.-PHYS., |
|
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |