DE3105934C2 - - Google Patents

Info

Publication number
DE3105934C2
DE3105934C2 DE19813105934 DE3105934A DE3105934C2 DE 3105934 C2 DE3105934 C2 DE 3105934C2 DE 19813105934 DE19813105934 DE 19813105934 DE 3105934 A DE3105934 A DE 3105934A DE 3105934 C2 DE3105934 C2 DE 3105934C2
Authority
DE
Germany
Prior art keywords
light
film
absorbing
base material
zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19813105934
Other languages
German (de)
English (en)
Other versions
DE3105934A1 (de
Inventor
Mikio Utsunomiya Tochigi Jp Kenmochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Manufacturing Co Ltd
Original Assignee
Mitutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Manufacturing Co Ltd filed Critical Mitutoyo Manufacturing Co Ltd
Publication of DE3105934A1 publication Critical patent/DE3105934A1/de
Application granted granted Critical
Publication of DE3105934C2 publication Critical patent/DE3105934C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B1/00—Measuring instruments characterised by the selection of material therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/02—Rulers with scales or marks for direct reading
    • G01B3/04—Rulers with scales or marks for direct reading rigid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • ing And Chemical Polishing (AREA)
DE19813105934 1980-02-22 1981-02-18 Metallskala und verfahren zu ihrer herstellung Granted DE3105934A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2139380A JPS56118606A (en) 1980-02-22 1980-02-22 Metal scale and manufacture thereof

Publications (2)

Publication Number Publication Date
DE3105934A1 DE3105934A1 (de) 1982-01-07
DE3105934C2 true DE3105934C2 (el) 1991-07-18

Family

ID=12053811

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813105934 Granted DE3105934A1 (de) 1980-02-22 1981-02-18 Metallskala und verfahren zu ihrer herstellung

Country Status (3)

Country Link
JP (1) JPS56118606A (el)
DE (1) DE3105934A1 (el)
GB (1) GB2072850B (el)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118912U (ja) * 1984-01-18 1985-08-12 アルプス電気株式会社 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル
JPS61102915U (el) * 1984-12-12 1986-07-01
JPS61197510U (el) * 1985-05-31 1986-12-10
GB2188426A (en) * 1986-03-26 1987-09-30 Digital Building Systems Limit Quantity surveying instrument
JPH04208810A (ja) * 1990-12-03 1992-07-30 Omron Corp 変位信号出力装置
US5963330A (en) * 1996-11-13 1999-10-05 Dr. Johannes Heidenhain Gmbh Optical position measuring device
GB2339910A (en) * 1998-07-17 2000-02-09 Ab Automotive Electronics Ltd Position determining system for a vehicle seat
DE19937023A1 (de) * 1999-08-05 2001-02-08 Heidenhain Gmbh Dr Johannes Reflexions-Maßverkörperung und Verfahren zur Herstellung einer Reflexions-Maßverkörperung
JP2006337321A (ja) * 2005-06-06 2006-12-14 Mitsutoyo Corp 光学スケール、及び、その製造方法
US20150160041A1 (en) * 2011-12-28 2015-06-11 Nikon Corporation Encoder, manufacturing method of encore scale manufacturing method of encoder, and driving apparatus
JP6425875B2 (ja) * 2013-06-14 2018-11-21 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR638014A (fr) * 1926-07-10 1928-05-14 Comp Generale Electricite Procédé pour l'obtention de couches de nickel à partir des tôles composées de couches alternantes de nickel et de cuivre
DE902713C (de) * 1950-02-28 1955-11-17 Wenczler & Heidenhain Verfahren zum Aufbringen von Kopien auf beliebiges Material
DE1217637B (de) * 1961-01-04 1966-05-26 Philips Nv Vorrichtung zum Messen von Verschiebungen
DE1278124B (de) * 1965-09-02 1968-09-19 Leitz Ernst Gmbh Verfahren zur Herstellung von Teilungen, Messmarken, Gittern u. dgl.
CH460365A (de) * 1966-12-08 1968-07-31 Wild Heerbrugg Ag Auf einem optischen Träger aufgebrachte lichtundurchlässige und reflexionsfreie Beschichtung
DE1798372A1 (de) * 1967-03-28 1972-08-10 Rudolph Dietbert Dipl Phys Verfahren zur Herstellung von Reflexions- und Transmissionsgittern
AT284483B (de) * 1967-08-10 1970-09-10 Wenczler & Heidenhain Geätzte Meßteilung und Verfahren zu deren Herstellung
US3878391A (en) * 1973-12-17 1975-04-15 Westinghouse Electric Corp Radiometric pulse initiator having a reflective patterned drum
DE3316144A1 (de) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Verfahren und vorrichtung zum messen des ausmasses einer bewegung

Also Published As

Publication number Publication date
JPH0377442B2 (el) 1991-12-10
GB2072850A (en) 1981-10-07
DE3105934A1 (de) 1982-01-07
JPS56118606A (en) 1981-09-17
GB2072850B (en) 1984-02-29

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8125 Change of the main classification

Ipc: G01D 13/02

D2 Grant after examination
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8305 Restricted maintenance of patent after opposition
D4 Patent maintained restricted
8339 Ceased/non-payment of the annual fee