DE3034175C2 - - Google Patents
Info
- Publication number
- DE3034175C2 DE3034175C2 DE19803034175 DE3034175A DE3034175C2 DE 3034175 C2 DE3034175 C2 DE 3034175C2 DE 19803034175 DE19803034175 DE 19803034175 DE 3034175 A DE3034175 A DE 3034175A DE 3034175 C2 DE3034175 C2 DE 3034175C2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- electrical
- resistance
- properties
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/162—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/165—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed inductors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Chemically Coating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19803034175 DE3034175A1 (de) | 1980-09-11 | 1980-09-11 | Verfahren zur herstellung chemisch abscheidbarer, elektrisch leitfaehiger schichten |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19803034175 DE3034175A1 (de) | 1980-09-11 | 1980-09-11 | Verfahren zur herstellung chemisch abscheidbarer, elektrisch leitfaehiger schichten |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3034175A1 DE3034175A1 (de) | 1982-04-15 |
DE3034175C2 true DE3034175C2 (US06534493-20030318-C00184.png) | 1987-12-23 |
Family
ID=6111652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19803034175 Granted DE3034175A1 (de) | 1980-09-11 | 1980-09-11 | Verfahren zur herstellung chemisch abscheidbarer, elektrisch leitfaehiger schichten |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3034175A1 (US06534493-20030318-C00184.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3935936A1 (de) * | 1988-10-29 | 1990-05-03 | Ngk Insulators Ltd | Verfahren zum herstellen eines detektorelements |
DE19958202A1 (de) * | 1999-12-02 | 2001-07-12 | Infineon Technologies Ag | Verfahren zur Herstellung einer Metallschicht mit einer vorgegebenen Dicke |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4477484A (en) * | 1982-12-10 | 1984-10-16 | International Business Machines Corporation | Electroless plating monitor |
US4756923A (en) * | 1986-07-28 | 1988-07-12 | International Business Machines Corp. | Method of controlling resistivity of plated metal and product formed thereby |
US5270229A (en) * | 1989-03-07 | 1993-12-14 | Matsushita Electric Industrial Co., Ltd. | Thin film semiconductor device and process for producing thereof |
CN105758891B (zh) * | 2015-07-17 | 2019-03-05 | 生益电子股份有限公司 | 一种pcb的性能检测方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD91845A (US06534493-20030318-C00184.png) * | ||||
US2525668A (en) * | 1949-02-05 | 1950-10-10 | Erie Resistor Corp | Method of making electrical condensers |
DE1822766U (de) * | 1960-07-13 | 1960-12-01 | Heraeus Gmbh W C | Vorrichtung zum vakuumbedampfen von baendern. |
US3457637A (en) * | 1967-02-06 | 1969-07-29 | Gen Instrument Corp | Method for trimming cermet resistors |
DE1954582C3 (de) * | 1969-10-30 | 1974-10-03 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Herstellen von Halbleiterbauelementen |
JPS51140560A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Method of monitoring homoepitaxy film thickness |
US4147435A (en) * | 1977-06-30 | 1979-04-03 | International Business Machines Corporation | Interferometric process and apparatus for the measurement of the etch rate of opaque surfaces |
US4141780A (en) * | 1977-12-19 | 1979-02-27 | Rca Corporation | Optically monitoring the thickness of a depositing layer |
-
1980
- 1980-09-11 DE DE19803034175 patent/DE3034175A1/de active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3935936A1 (de) * | 1988-10-29 | 1990-05-03 | Ngk Insulators Ltd | Verfahren zum herstellen eines detektorelements |
DE19958202A1 (de) * | 1999-12-02 | 2001-07-12 | Infineon Technologies Ag | Verfahren zur Herstellung einer Metallschicht mit einer vorgegebenen Dicke |
US6303401B2 (en) | 1999-12-02 | 2001-10-16 | Infineon Technologies Ag | Method for producing a metal layer with a given thickness |
DE19958202C2 (de) * | 1999-12-02 | 2003-08-14 | Infineon Technologies Ag | Verfahren zur Herstellung einer Metallschicht mit einer vorgegebenen Dicke |
Also Published As
Publication number | Publication date |
---|---|
DE3034175A1 (de) | 1982-04-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3705279C2 (de) | Verfahren zur Herstellung von Widerständen in Chip-Form | |
DE69005785T2 (de) | Elektrischer Widerstand in Chip-Bauweise für Oberflächenbestückung und Verfahren zu seiner Herstellung. | |
DE1589480B2 (de) | Leiterplatte für Halbleiteranordnungen und Verfahren zu ihrer Herstellung | |
DE3630393C2 (de) | Widerstandsthermometer | |
DE102006053689A1 (de) | Sensoranordnung | |
DE3034175C2 (US06534493-20030318-C00184.png) | ||
EP0764334B1 (de) | Verfahren zur herstellung von bauelementen auf metallfilmbasis | |
EP0279432B1 (de) | Verfahren zur Herstellung einer stromlos abgeschiedenen, lötbaren Metallschicht | |
DE1807643B2 (de) | Verfahren zur Herstellung einer elektrisch beheizbaren Glasscheibe, insbesondere für Kraftfahrzeuge | |
EP0016263A1 (de) | Dünnschichtwiderstand mit grossem Temperaturkoeffizienten und Verfahren zu dessen Herstellung | |
DE102008016613B4 (de) | Verfahren zur Herstellung eines elektrischen Bauelements mit mindestens einer dielektrischen Schicht und ein elektrisches Bauelement mit mindestens einer dielektrischen Schicht | |
DE1791233B1 (de) | Verfahren zur Herstellung eines Funktionsblocks,insbesondere fuer datenverarbeitende Anlagen | |
DE2513859C2 (de) | Verfahren zum Herstellen eines Kondensator-Widerstands-Netzwerks | |
DE2553763B2 (de) | Verfahren zur Herstellung einer elektronischen Schaltung | |
DE19780905C2 (de) | Widerstand und Verfahren zu seiner Herstellung | |
DE102010020190A1 (de) | Laserstrukturierte Sensoreinheit | |
DE4123249C2 (de) | Verfahren zum Herstellen einer Vielzahl von abgeglichenen metallischen Dünnschicht-Widerstandsstrukturen | |
DE102009033930B4 (de) | Verfahren zum Aufbringen einer Widerstandsschicht in Form eines Edelmetall-Dünnfilms auf ein Substrat und Verfahren zur Herstellung eines Temperaturmessfühlers | |
DE3034877C2 (US06534493-20030318-C00184.png) | ||
DE3518766A1 (de) | Verfahren zur metallisierung eines substrates | |
DE3106354C2 (de) | Halbleitervorrichtung und Verfahren zu ihrer Herstellung | |
DE1915756C3 (de) | Verfahren zur Herstellung dimensionsgenauer Dickfilmstrukturen auf Substraten | |
EP0143071A1 (de) | Verfahren zur Herstellung einer elektrischen Zündvorrichtung, danach hergestellte Zündvorrichtung und deren Verwendung | |
DE3440351A1 (de) | Feuchtigkeitssensor und verfahren zu dessen herstellung | |
DE3524807A1 (de) | Herstellung von duennfilmschaltungen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
8110 | Request for examination paragraph 44 | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |