DE3003911C2 - Halbleiterschaltungsanordnung mit einem Halbleiterwiderstand - Google Patents
Halbleiterschaltungsanordnung mit einem HalbleiterwiderstandInfo
- Publication number
- DE3003911C2 DE3003911C2 DE3003911A DE3003911A DE3003911C2 DE 3003911 C2 DE3003911 C2 DE 3003911C2 DE 3003911 A DE3003911 A DE 3003911A DE 3003911 A DE3003911 A DE 3003911A DE 3003911 C2 DE3003911 C2 DE 3003911C2
- Authority
- DE
- Germany
- Prior art keywords
- zone
- semiconductor
- conductivity type
- resistance
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims description 22
- 239000004020 conductor Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 8
- 238000005530 etching Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
- H01L27/0823—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only including vertical bipolar transistors only
- H01L27/0825—Combination of vertical direct transistors of the same conductivity type having different characteristics,(e.g. Darlington transistors)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
- H01L27/0744—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common without components of the field effect type
- H01L27/075—Bipolar transistors in combination with diodes, or capacitors, or resistors, e.g. lateral bipolar transistor, and vertical bipolar transistor and resistor
- H01L27/0755—Vertical bipolar transistor in combination with diodes, or capacitors, or resistors
- H01L27/0772—Vertical bipolar transistor in combination with resistors only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/8605—Resistors with PN junctions
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Bipolar Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7903759A FR2449333A1 (fr) | 1979-02-14 | 1979-02-14 | Perfectionnement aux dispositifs semi-conducteurs de type darlington |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3003911A1 DE3003911A1 (de) | 1980-08-21 |
| DE3003911C2 true DE3003911C2 (de) | 1985-07-04 |
Family
ID=9221964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3003911A Expired DE3003911C2 (de) | 1979-02-14 | 1980-02-02 | Halbleiterschaltungsanordnung mit einem Halbleiterwiderstand |
Country Status (10)
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57112027A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
| US4486770A (en) * | 1981-04-27 | 1984-12-04 | General Motors Corporation | Isolated integrated circuit transistor with transient protection |
| FR2505102B1 (fr) * | 1981-04-29 | 1986-01-24 | Radiotechnique Compelec | Amplificateur de type darlington forme d'un transistor a effet de champ et d'un transistor bipolaire, et sa realisation en structure semi-conductrice integree |
| JPS59119733A (ja) * | 1982-12-24 | 1984-07-11 | Toshiba Corp | 半導体装置 |
| JPS6049649U (ja) * | 1983-09-14 | 1985-04-08 | 関西日本電気株式会社 | 半導体装置 |
| US5343071A (en) * | 1993-04-28 | 1994-08-30 | Raytheon Company | Semiconductor structures having dual surface via holes |
| US6469882B1 (en) | 2001-10-31 | 2002-10-22 | General Electric Company | Current transformer initial condition correction |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3624454A (en) * | 1969-09-15 | 1971-11-30 | Gen Motors Corp | Mesa-type semiconductor device |
| US3659160A (en) * | 1970-02-13 | 1972-04-25 | Texas Instruments Inc | Integrated circuit process utilizing orientation dependent silicon etch |
| NL7307527A (US06826419-20041130-M00005.png) * | 1973-05-30 | 1974-12-03 | ||
| US4011580A (en) * | 1973-05-30 | 1977-03-08 | U.S. Philips Corporation | Integrated circuit |
| JPS51126775A (en) * | 1975-04-25 | 1976-11-05 | Iwatsu Electric Co Ltd | Semiconductor unit manufacturing process |
| FR2335957A1 (fr) * | 1975-12-17 | 1977-07-15 | Radiotechnique Compelec | Dispositif semiconducteur monolithique comprenant un pont de redressement |
| JPS5925389B2 (ja) * | 1976-02-04 | 1984-06-16 | 三菱電機株式会社 | 半導体装置 |
| US4057894A (en) * | 1976-02-09 | 1977-11-15 | Rca Corporation | Controllably valued resistor |
| US4118728A (en) * | 1976-09-03 | 1978-10-03 | Fairchild Camera And Instrument Corporation | Integrated circuit structures utilizing conductive buried regions |
| FR2374743A1 (fr) * | 1976-12-20 | 1978-07-13 | Radiotechnique Compelec | Transistor multicouche a emetteur compose |
| FR2377706A1 (fr) * | 1977-01-12 | 1978-08-11 | Radiotechnique Compelec | Dispositif semi-conducteur integre du type darlington et son procede de fabrication |
| NL184185C (nl) * | 1978-04-07 | 1989-05-01 | Philips Nv | Darlingtonschakeling met een geintegreerde halfgeleiderdiode. |
-
1979
- 1979-02-14 FR FR7903759A patent/FR2449333A1/fr active Granted
-
1980
- 1980-02-02 DE DE3003911A patent/DE3003911C2/de not_active Expired
- 1980-02-08 AU AU55368/80A patent/AU5536880A/en not_active Abandoned
- 1980-02-11 IE IE800257A patent/IE800257L/xx unknown
- 1980-02-11 US US06/120,414 patent/US4360822A/en not_active Expired - Lifetime
- 1980-02-11 IT IT19838/80A patent/IT1140550B/it active
- 1980-02-11 NL NL8000830A patent/NL8000830A/nl not_active Application Discontinuation
- 1980-02-11 SE SE8001042A patent/SE8001042L/xx unknown
- 1980-02-11 GB GB8004450A patent/GB2043342B/en not_active Expired
- 1980-02-13 JP JP1560880A patent/JPS55111160A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2449333A1 (fr) | 1980-09-12 |
| US4360822A (en) | 1982-11-23 |
| JPS55111160A (en) | 1980-08-27 |
| DE3003911A1 (de) | 1980-08-21 |
| AU5536880A (en) | 1980-08-21 |
| FR2449333B1 (US06826419-20041130-M00005.png) | 1982-06-04 |
| JPH0221147B2 (US06826419-20041130-M00005.png) | 1990-05-11 |
| NL8000830A (nl) | 1980-08-18 |
| IE800257L (en) | 1980-08-14 |
| SE8001042L (sv) | 1980-08-15 |
| IT1140550B (it) | 1986-10-01 |
| IT8019838A0 (it) | 1980-02-11 |
| GB2043342A (en) | 1980-10-01 |
| GB2043342B (en) | 1983-03-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |